JPS56116621A - Electron beam painting device - Google Patents

Electron beam painting device

Info

Publication number
JPS56116621A
JPS56116621A JP1912180A JP1912180A JPS56116621A JP S56116621 A JPS56116621 A JP S56116621A JP 1912180 A JP1912180 A JP 1912180A JP 1912180 A JP1912180 A JP 1912180A JP S56116621 A JPS56116621 A JP S56116621A
Authority
JP
Japan
Prior art keywords
aperture
beams
rectangular
electron beams
rectangles
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1912180A
Other languages
English (en)
Inventor
Tadao Konishi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP1912180A priority Critical patent/JPS56116621A/ja
Publication of JPS56116621A publication Critical patent/JPS56116621A/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/3002—Details
    • H01J37/3007—Electron or ion-optical systems

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)
JP1912180A 1980-02-20 1980-02-20 Electron beam painting device Pending JPS56116621A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1912180A JPS56116621A (en) 1980-02-20 1980-02-20 Electron beam painting device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1912180A JPS56116621A (en) 1980-02-20 1980-02-20 Electron beam painting device

Publications (1)

Publication Number Publication Date
JPS56116621A true JPS56116621A (en) 1981-09-12

Family

ID=11990628

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1912180A Pending JPS56116621A (en) 1980-02-20 1980-02-20 Electron beam painting device

Country Status (1)

Country Link
JP (1) JPS56116621A (ja)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6030131A (ja) * 1983-07-29 1985-02-15 Toshiba Corp 電子ビ−ム露光装置
JPH01112729A (ja) * 1987-10-26 1989-05-01 Fujitsu Ltd 電子ビーム露光方法
JPH01175737A (ja) * 1987-12-29 1989-07-12 Toshiba Corp 荷電ビーム描画方法
US4914304A (en) * 1986-10-31 1990-04-03 Kabushiki Kaisha Toshiba Charged-beam exposure system
JP2007147535A (ja) * 2005-11-30 2007-06-14 Tokyo Electron Ltd 液面検出装置及びそれを備えた液処理装置

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6030131A (ja) * 1983-07-29 1985-02-15 Toshiba Corp 電子ビ−ム露光装置
US4914304A (en) * 1986-10-31 1990-04-03 Kabushiki Kaisha Toshiba Charged-beam exposure system
JPH01112729A (ja) * 1987-10-26 1989-05-01 Fujitsu Ltd 電子ビーム露光方法
JPH01175737A (ja) * 1987-12-29 1989-07-12 Toshiba Corp 荷電ビーム描画方法
JP2007147535A (ja) * 2005-11-30 2007-06-14 Tokyo Electron Ltd 液面検出装置及びそれを備えた液処理装置

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