JPS56114348A - Inspecting system for wafer - Google Patents

Inspecting system for wafer

Info

Publication number
JPS56114348A
JPS56114348A JP1750280A JP1750280A JPS56114348A JP S56114348 A JPS56114348 A JP S56114348A JP 1750280 A JP1750280 A JP 1750280A JP 1750280 A JP1750280 A JP 1750280A JP S56114348 A JPS56114348 A JP S56114348A
Authority
JP
Japan
Prior art keywords
wafer
probe
tester
constitution
converted
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1750280A
Other languages
Japanese (ja)
Inventor
Junichi Inoue
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TERUMETSUKU KK
TELMEC CO Ltd
Original Assignee
TERUMETSUKU KK
TELMEC CO Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TERUMETSUKU KK, TELMEC CO Ltd filed Critical TERUMETSUKU KK
Priority to JP1750280A priority Critical patent/JPS56114348A/en
Publication of JPS56114348A publication Critical patent/JPS56114348A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

PURPOSE:To inspect a wafer accurately by a system wherein a probe of a probe card is connected to a tester at a remote location through optical fibers, and the output of the probe is converted into electrical signals, when inspecting an element with light receiving and luminous elements for input and output. CONSTITUTION:A head 2 including a driver and a comparator of a tester is not moved, and signals are given and received by optical fibers 5 from a probing machine 3 and converted 4 by photoelectrical transducer. According to such constitution, a wafer can be inspected efficiently.
JP1750280A 1980-02-14 1980-02-14 Inspecting system for wafer Pending JPS56114348A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1750280A JPS56114348A (en) 1980-02-14 1980-02-14 Inspecting system for wafer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1750280A JPS56114348A (en) 1980-02-14 1980-02-14 Inspecting system for wafer

Publications (1)

Publication Number Publication Date
JPS56114348A true JPS56114348A (en) 1981-09-08

Family

ID=11945755

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1750280A Pending JPS56114348A (en) 1980-02-14 1980-02-14 Inspecting system for wafer

Country Status (1)

Country Link
JP (1) JPS56114348A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6731122B2 (en) 2001-08-14 2004-05-04 International Business Machines Corporation Wafer test apparatus including optical elements and method of using the test apparatus

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6731122B2 (en) 2001-08-14 2004-05-04 International Business Machines Corporation Wafer test apparatus including optical elements and method of using the test apparatus
US7012440B2 (en) 2001-08-14 2006-03-14 International Business Machines Corporation Wafer test apparatus including optical elements and method of using the test apparatus
US7250778B2 (en) 2001-08-14 2007-07-31 International Business Machines Corporation Wafer test apparatus including optical elements and method of using the test apparatus

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