JPS5610943A - Semiconductor wafer whose electric characteristics are easily measurable - Google Patents
Semiconductor wafer whose electric characteristics are easily measurableInfo
- Publication number
- JPS5610943A JPS5610943A JP8623279A JP8623279A JPS5610943A JP S5610943 A JPS5610943 A JP S5610943A JP 8623279 A JP8623279 A JP 8623279A JP 8623279 A JP8623279 A JP 8623279A JP S5610943 A JPS5610943 A JP S5610943A
- Authority
- JP
- Japan
- Prior art keywords
- elements
- chip
- semiconductor wafer
- electric characteristics
- forming
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
PURPOSE:To reduce the number of contacting of a probe stylus of a probe card with a number of elements on a semiconductor wafer by obtaining a pluraity of chip groups with a number of elements as one chip of the same type when forming a number of elements on the wafer and disposing the bonding pads thereto only on the periphery of the chip groups. CONSTITUTION:When forming a number of elements on a semiconductor wafer as one chip, the chip is formed of similar chips 1A, 1B or 4A-4D repeating in the same shape. When forming bonding pads on a square or rectangular chip thus formed, one side of the periphery is made vacant, and the other three sides are formed of the pads. In this manner, the number of contacting probe stylus of a probe card with the elements are reduced when measuring the electric characteristics of the respective elements by assembling the chips so as to remarkably improve the working efficiency.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8623279A JPS5610943A (en) | 1979-07-06 | 1979-07-06 | Semiconductor wafer whose electric characteristics are easily measurable |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8623279A JPS5610943A (en) | 1979-07-06 | 1979-07-06 | Semiconductor wafer whose electric characteristics are easily measurable |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5610943A true JPS5610943A (en) | 1981-02-03 |
Family
ID=13881040
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8623279A Pending JPS5610943A (en) | 1979-07-06 | 1979-07-06 | Semiconductor wafer whose electric characteristics are easily measurable |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5610943A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0429346A (en) * | 1990-05-24 | 1992-01-31 | Mitsubishi Electric Corp | Semiconductor device |
JPH05166895A (en) * | 1991-12-19 | 1993-07-02 | Kawasaki Steel Corp | Semiconductor integrated circuit |
US6764879B2 (en) | 2001-08-08 | 2004-07-20 | Matsushita Electric Industrial Co., Ltd. | Semiconductor wafer, semiconductor device, and method for manufacturing the same |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55130137A (en) * | 1979-03-30 | 1980-10-08 | Hitachi Ltd | Inspection method of semiconductor wafer and probe card |
-
1979
- 1979-07-06 JP JP8623279A patent/JPS5610943A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55130137A (en) * | 1979-03-30 | 1980-10-08 | Hitachi Ltd | Inspection method of semiconductor wafer and probe card |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0429346A (en) * | 1990-05-24 | 1992-01-31 | Mitsubishi Electric Corp | Semiconductor device |
JPH05166895A (en) * | 1991-12-19 | 1993-07-02 | Kawasaki Steel Corp | Semiconductor integrated circuit |
US6764879B2 (en) | 2001-08-08 | 2004-07-20 | Matsushita Electric Industrial Co., Ltd. | Semiconductor wafer, semiconductor device, and method for manufacturing the same |
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