JPS5476073A - Cubic probe card - Google Patents
Cubic probe cardInfo
- Publication number
- JPS5476073A JPS5476073A JP14412377A JP14412377A JPS5476073A JP S5476073 A JPS5476073 A JP S5476073A JP 14412377 A JP14412377 A JP 14412377A JP 14412377 A JP14412377 A JP 14412377A JP S5476073 A JPS5476073 A JP S5476073A
- Authority
- JP
- Japan
- Prior art keywords
- probe card
- probe
- cubic
- bumps
- laminating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Measuring Leads Or Probes (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
PURPOSE: To enable to electrical contact with a number of bumps with probe needles in minimized pitch, by laminating the probe cards different in the arrangement of probes.
CONSTITUTION: The probe card 6 isolated with a given distance is laminated by linking pin 7 on the probe card 5. Thus, the approach of the semiconductor chip can be sectioned to two surfaces and the bumps of multi-stage arrangement can be contacted with the probe needles in minimized pitch by laminating a plurality of stages.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14412377A JPS5476073A (en) | 1977-11-30 | 1977-11-30 | Cubic probe card |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14412377A JPS5476073A (en) | 1977-11-30 | 1977-11-30 | Cubic probe card |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5476073A true JPS5476073A (en) | 1979-06-18 |
Family
ID=15354720
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14412377A Pending JPS5476073A (en) | 1977-11-30 | 1977-11-30 | Cubic probe card |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5476073A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0221268A (en) * | 1988-07-11 | 1990-01-24 | Tokyo Electron Ltd | Contact type prober for electric inspection |
-
1977
- 1977-11-30 JP JP14412377A patent/JPS5476073A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0221268A (en) * | 1988-07-11 | 1990-01-24 | Tokyo Electron Ltd | Contact type prober for electric inspection |
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