JPS56101506A - Optical measurement device - Google Patents

Optical measurement device

Info

Publication number
JPS56101506A
JPS56101506A JP441280A JP441280A JPS56101506A JP S56101506 A JPS56101506 A JP S56101506A JP 441280 A JP441280 A JP 441280A JP 441280 A JP441280 A JP 441280A JP S56101506 A JPS56101506 A JP S56101506A
Authority
JP
Japan
Prior art keywords
signal
film
light
filters
detection element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP441280A
Other languages
Japanese (ja)
Inventor
Katsuyuki Miyauchi
Masuo Yamaguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Chino Corp
Original Assignee
Chino Works Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Chino Works Ltd filed Critical Chino Works Ltd
Priority to JP441280A priority Critical patent/JPS56101506A/en
Publication of JPS56101506A publication Critical patent/JPS56101506A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0691—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of objects while moving

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Temperature Or Quantity Of Heat (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

PURPOSE:To arrange so tht even a film of heavy thickness may be measured cor- rectly by measuring with the sum of two components of transmission factor and reflection factor in a central wavelength band. CONSTITUTION:A light from a light source 1 is porjected on a film 3 and its transmission light or reflection light is projected onto a detection element 6 through the intermediary of filters 51 to 53 provided on a rotary sector 5. A detection signal from the detection element 6 separates rectifies and outputs signals e1, e2 and e3 corresponding to the wavelengths lambda1, lambda2 and lambda3 of filters 51, 52 and 53 on a rotary sector 5 at a synchronous signal from a synchronous signal generator 9 with the assistance of a signal separation rectifier 8. A signal e2+e3 obtained by adding the signals e2 and e3 with the held of an adder 10 is divided by the signal e1 at a divider 11 and a signal equivalent to e2+e3/2e1, i.e. a measurement signal corresponding to the thickness of a film is indicated on an indicator 12.
JP441280A 1980-01-18 1980-01-18 Optical measurement device Pending JPS56101506A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP441280A JPS56101506A (en) 1980-01-18 1980-01-18 Optical measurement device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP441280A JPS56101506A (en) 1980-01-18 1980-01-18 Optical measurement device

Publications (1)

Publication Number Publication Date
JPS56101506A true JPS56101506A (en) 1981-08-14

Family

ID=11583590

Family Applications (1)

Application Number Title Priority Date Filing Date
JP441280A Pending JPS56101506A (en) 1980-01-18 1980-01-18 Optical measurement device

Country Status (1)

Country Link
JP (1) JPS56101506A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05196426A (en) * 1991-01-30 1993-08-06 Kuwabara Yasunaga Method for measuring distribution of thickness of layer constituting laminated body

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05196426A (en) * 1991-01-30 1993-08-06 Kuwabara Yasunaga Method for measuring distribution of thickness of layer constituting laminated body

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