JPS56101505A - Optical measurement device - Google Patents

Optical measurement device

Info

Publication number
JPS56101505A
JPS56101505A JP441180A JP441180A JPS56101505A JP S56101505 A JPS56101505 A JP S56101505A JP 441180 A JP441180 A JP 441180A JP 441180 A JP441180 A JP 441180A JP S56101505 A JPS56101505 A JP S56101505A
Authority
JP
Japan
Prior art keywords
transmission
light
factor
reflection
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP441180A
Other languages
Japanese (ja)
Inventor
Katsuyuki Miyauchi
Masuo Yamaguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Chino Works Ltd
Original Assignee
Chino Works Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Chino Works Ltd filed Critical Chino Works Ltd
Priority to JP441180A priority Critical patent/JPS56101505A/en
Publication of JPS56101505A publication Critical patent/JPS56101505A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0691—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of objects while moving

Abstract

PURPOSE:To improve precision by dividing a component of the transmission factor and reflection factor of a central wavelength band by the sum of components of the transmission factor and reflection factor in two wavelength bands at the both sides of the central wavelength band. CONSTITUTION:A light from a light source 1 is projected onto a film 3 as a measured object by means of a projection lens 2. A transmission light or a reflection light is projected onto a detection element 6 through the intermediary of filters 51 to 54 having transmission wavelengths lambda1-lambda4 installed on a rotary selector 5. A detection signal from the detection element 6 is amplified by an amplifier 7 and then is separated into a signal corresponding to each wavelength by means of a signal separation/rectifier 8. These signals are processed by adders 10, 11 and divider 12 and a measurement signal corresponding to the thickness of a film 3 is indicated on an indicator 13.
JP441180A 1980-01-18 1980-01-18 Optical measurement device Pending JPS56101505A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP441180A JPS56101505A (en) 1980-01-18 1980-01-18 Optical measurement device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP441180A JPS56101505A (en) 1980-01-18 1980-01-18 Optical measurement device

Publications (1)

Publication Number Publication Date
JPS56101505A true JPS56101505A (en) 1981-08-14

Family

ID=11583562

Family Applications (1)

Application Number Title Priority Date Filing Date
JP441180A Pending JPS56101505A (en) 1980-01-18 1980-01-18 Optical measurement device

Country Status (1)

Country Link
JP (1) JPS56101505A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4957370A (en) * 1984-06-21 1990-09-18 Kabushiki Kaisha Toshiba Method and apparatus for determining the degree of oxidation of an oxide coating

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4957370A (en) * 1984-06-21 1990-09-18 Kabushiki Kaisha Toshiba Method and apparatus for determining the degree of oxidation of an oxide coating

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