JPS559822B2 - - Google Patents
Info
- Publication number
- JPS559822B2 JPS559822B2 JP512978A JP512978A JPS559822B2 JP S559822 B2 JPS559822 B2 JP S559822B2 JP 512978 A JP512978 A JP 512978A JP 512978 A JP512978 A JP 512978A JP S559822 B2 JPS559822 B2 JP S559822B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H10P72/1921—
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D25/00—Details of other kinds or types of rigid or semi-rigid containers
- B65D25/02—Internal fittings
- B65D25/10—Devices to locate articles in containers
- B65D25/107—Grooves, ribs, or the like, situated on opposed walls and between which the articles are located
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Packaging Frangible Articles (AREA)
- Packaging For Recording Disks (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Packaging Of Annular Or Rod-Shaped Articles, Wearing Apparel, Cassettes, Or The Like (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE2702464A DE2702464C2 (de) | 1977-01-21 | 1977-01-21 | Verpackung von Halbleiterscheiben |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5392661A JPS5392661A (en) | 1978-08-14 |
| JPS559822B2 true JPS559822B2 (cg-RX-API-DMAC10.html) | 1980-03-12 |
Family
ID=5999240
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP512978A Granted JPS5392661A (en) | 1977-01-21 | 1978-01-20 | Packaging case for disk semiconductor |
Country Status (9)
| Country | Link |
|---|---|
| US (1) | US4160504A (cg-RX-API-DMAC10.html) |
| JP (1) | JPS5392661A (cg-RX-API-DMAC10.html) |
| BE (1) | BE863111A (cg-RX-API-DMAC10.html) |
| DE (1) | DE2702464C2 (cg-RX-API-DMAC10.html) |
| DK (1) | DK10378A (cg-RX-API-DMAC10.html) |
| FR (1) | FR2377949A1 (cg-RX-API-DMAC10.html) |
| GB (1) | GB1586526A (cg-RX-API-DMAC10.html) |
| IT (1) | IT1102016B (cg-RX-API-DMAC10.html) |
| NL (1) | NL7714275A (cg-RX-API-DMAC10.html) |
Families Citing this family (36)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| USD260237S (en) | 1978-08-07 | 1981-08-18 | Fuzere Manufacturing Co., Inc. | Semiconductor wafer container |
| JPS59199477A (ja) * | 1983-04-25 | 1984-11-12 | 住友電気工業株式会社 | ウエハ−ボツクス |
| US4520925A (en) * | 1983-08-09 | 1985-06-04 | Empak Inc. | Package |
| US4557382A (en) * | 1983-08-17 | 1985-12-10 | Empak Inc. | Disk package |
| US4668484A (en) * | 1984-02-13 | 1987-05-26 | Elliott David J | Transport containers for semiconductor wafers |
| DE3413837A1 (de) * | 1984-04-12 | 1985-10-17 | Wacker-Chemitronic Gesellschaft für Elektronik-Grundstoffe mbH, 8263 Burghausen | Verpackung fuer halbleiterscheiben |
| USRE33361E (en) * | 1984-06-07 | 1990-10-02 | Substrate and media carrier | |
| US4588086A (en) * | 1984-06-07 | 1986-05-13 | Coe Thomas U | Substrate and media carrier |
| US4669612A (en) * | 1985-02-20 | 1987-06-02 | Empak Inc. | Disk processing cassette |
| US4793488A (en) * | 1987-07-07 | 1988-12-27 | Empak, Inc. | Package for semiconductor wafers |
| JPH0278246A (ja) * | 1988-09-14 | 1990-03-19 | Kakizaki Seisakusho:Kk | 薄板処理用バスケット |
| US5046615A (en) * | 1989-04-03 | 1991-09-10 | Fluoroware, Inc. | Disk shipper |
| US5273159A (en) * | 1992-05-26 | 1993-12-28 | Empak, Inc. | Wafer suspension box |
| US5555981A (en) * | 1992-05-26 | 1996-09-17 | Empak, Inc. | Wafer suspension box |
| US5348151A (en) * | 1993-12-20 | 1994-09-20 | Empak, Inc. | Low profile disk carrier |
| US5816410A (en) * | 1994-07-15 | 1998-10-06 | Fluoroware, Inc. | Wafer cushions for wafer shipper |
| TW296361B (cg-RX-API-DMAC10.html) * | 1995-06-26 | 1997-01-21 | Kakizaki Seisakusho Kk | |
| USD387903S (en) * | 1995-10-13 | 1997-12-23 | Empak, Inc. | Shipping container |
| USD378873S (en) * | 1995-10-13 | 1997-04-22 | Empak, Inc. | 300 mm microenvironment pod with door on side |
| USD383898S (en) * | 1995-10-13 | 1997-09-23 | Empak, Inc. | Combination shipping and transport cassette |
| US5709065A (en) * | 1996-07-31 | 1998-01-20 | Empak, Inc. | Desiccant substrate package |
| US5921397A (en) * | 1996-12-10 | 1999-07-13 | Empak, Inc. | Disk cassette |
| US6070730A (en) * | 1997-06-18 | 2000-06-06 | Fluoroware, Inc. | Disk container |
| US6216873B1 (en) * | 1999-03-19 | 2001-04-17 | Asyst Technologies, Inc. | SMIF container including a reticle support structure |
| TW522448B (en) * | 2001-10-22 | 2003-03-01 | Advanced Semiconductor Eng | Semiconductor wafer carrying apparatus |
| US7252199B2 (en) * | 2004-03-26 | 2007-08-07 | Entegris, Inc. | Disk cassette system |
| US20080245686A1 (en) * | 2004-07-30 | 2008-10-09 | Showa Denko K.K. | Magnetic Disk Case |
| JP2006062704A (ja) * | 2004-08-26 | 2006-03-09 | Miraial Kk | 薄板支持容器 |
| RU2282572C1 (ru) * | 2005-01-11 | 2006-08-27 | ГОУ ВПО Белгородский государственный университет | Устройство для упаковки хрупких предметов |
| US7967146B2 (en) * | 2007-08-08 | 2011-06-28 | E.Pak International, Inc. | Container |
| USD639154S1 (en) * | 2007-11-21 | 2011-06-07 | E.Pak International, Inc. | Container |
| JP4999808B2 (ja) * | 2008-09-29 | 2012-08-15 | 東京エレクトロン株式会社 | 基板処理装置 |
| JP5473691B2 (ja) * | 2010-03-16 | 2014-04-16 | 株式会社ディスコ | 収容カセット |
| DE102015217208A1 (de) | 2015-09-09 | 2017-03-09 | Bayerische Motoren Werke Aktiengesellschaft | Stapelvorrichtung zum Stapeln von Lack- und Montagestopfen |
| JP2024533650A (ja) * | 2021-09-22 | 2024-09-12 | インテグリス・インコーポレーテッド | プロセスキャリア |
| TWI902161B (zh) * | 2023-03-17 | 2025-10-21 | 美商恩特葛瑞斯股份有限公司 | 寬插入角製程載具 |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3164478A (en) * | 1961-12-15 | 1965-01-05 | Poster Packaging Inc | Doughnut package |
| US3212907A (en) * | 1962-03-27 | 1965-10-19 | Plastic Packaging Products Ltd | Food package and tray |
| US3322267A (en) * | 1964-06-12 | 1967-05-30 | Pantasote Company Of New York | Multiple-cavity cookie container |
| US3223234A (en) * | 1965-02-01 | 1965-12-14 | Pantasota Company | End support for fragile tubular articles |
| US3467242A (en) * | 1968-03-04 | 1969-09-16 | Dale E De Rousse | Storage unit for wafer-like articles |
| US3534862A (en) * | 1968-09-13 | 1970-10-20 | Rca Corp | Semiconductor wafer transporting jig |
| US3923156A (en) * | 1974-04-29 | 1975-12-02 | Fluoroware Inc | Wafer basket |
| US3961877A (en) * | 1974-09-11 | 1976-06-08 | Fluoroware, Inc. | Reinforced wafer basket |
| US3980226A (en) * | 1975-05-05 | 1976-09-14 | Franz Charles F | Evacuateable bag |
| US4043451A (en) * | 1976-03-18 | 1977-08-23 | Fluoroware, Inc. | Shipping container for silicone semiconductor wafers |
-
1977
- 1977-01-21 DE DE2702464A patent/DE2702464C2/de not_active Expired
- 1977-12-22 NL NL7714275A patent/NL7714275A/xx not_active Application Discontinuation
-
1978
- 1978-01-09 GB GB721/78A patent/GB1586526A/en not_active Expired
- 1978-01-10 DK DK10378A patent/DK10378A/da unknown
- 1978-01-19 IT IT47702/78A patent/IT1102016B/it active
- 1978-01-19 US US05/870,911 patent/US4160504A/en not_active Expired - Lifetime
- 1978-01-20 JP JP512978A patent/JPS5392661A/ja active Granted
- 1978-01-20 FR FR7801611A patent/FR2377949A1/fr active Granted
- 1978-01-20 BE BE184473A patent/BE863111A/xx not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| US4160504A (en) | 1979-07-10 |
| BE863111A (fr) | 1978-07-20 |
| NL7714275A (nl) | 1978-07-25 |
| JPS5392661A (en) | 1978-08-14 |
| DE2702464A1 (de) | 1978-07-27 |
| DE2702464C2 (de) | 1981-10-15 |
| FR2377949B1 (cg-RX-API-DMAC10.html) | 1981-01-09 |
| DK10378A (da) | 1978-07-22 |
| IT1102016B (it) | 1985-10-07 |
| GB1586526A (en) | 1981-03-18 |
| FR2377949A1 (fr) | 1978-08-18 |
| IT7847702A0 (it) | 1978-01-19 |