FR2377949A1 - Emballage pour disques semi-conducteurs - Google Patents
Emballage pour disques semi-conducteursInfo
- Publication number
- FR2377949A1 FR2377949A1 FR7801611A FR7801611A FR2377949A1 FR 2377949 A1 FR2377949 A1 FR 2377949A1 FR 7801611 A FR7801611 A FR 7801611A FR 7801611 A FR7801611 A FR 7801611A FR 2377949 A1 FR2377949 A1 FR 2377949A1
- Authority
- FR
- France
- Prior art keywords
- discs
- cones
- disks
- packaging
- lower element
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67383—Closed carriers characterised by substrate supports
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D25/00—Details of other kinds or types of rigid or semi-rigid containers
- B65D25/02—Internal fittings
- B65D25/10—Devices to locate articles in containers
- B65D25/107—Grooves, ribs, or the like, situated on opposed walls and between which the articles are located
Abstract
Claie empilable pour emballage de disques semi-conducteurs, comprenant un élement inférieur recevant les disques et un couvercle correspondant. Cette claie en matière plastique inerte vis-à-vis des disques fabriquée par emboutissage et l'élément inférieur comporte sur ses deux grands côtés verticaux des nervures de guidage des bisques et dans le fond des nervures de stabilisation, la partie inférieure des grands côtés étant pliée vers l'intérieur et comportant dans les surfaces de transition des protubérances servant de points d'appui aux disques et le couvercle à parois latérales verticales est muni à l'intérieur de deux rangées longitudinales de cônes de retenue à surface de base jointive, chaque disque étant maintenu sur sa circonférence entre deux cônes de chaque rangée.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE2702464A DE2702464C2 (de) | 1977-01-21 | 1977-01-21 | Verpackung von Halbleiterscheiben |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2377949A1 true FR2377949A1 (fr) | 1978-08-18 |
FR2377949B1 FR2377949B1 (fr) | 1981-01-09 |
Family
ID=5999240
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR7801611A Granted FR2377949A1 (fr) | 1977-01-21 | 1978-01-20 | Emballage pour disques semi-conducteurs |
Country Status (9)
Country | Link |
---|---|
US (1) | US4160504A (fr) |
JP (1) | JPS5392661A (fr) |
BE (1) | BE863111A (fr) |
DE (1) | DE2702464C2 (fr) |
DK (1) | DK10378A (fr) |
FR (1) | FR2377949A1 (fr) |
GB (1) | GB1586526A (fr) |
IT (1) | IT1102016B (fr) |
NL (1) | NL7714275A (fr) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0159416A2 (fr) * | 1984-04-12 | 1985-10-30 | Wacker-Chemitronic Gesellschaft für Elektronik-Grundstoffe mbH | Empaquetage pour plaques à semi-conducteurs |
WO1996039711A1 (fr) * | 1995-06-06 | 1996-12-12 | Fluoroware, Inc. | Dispositif de calage pour emballage d'expedition de plaquettes semi-conductrices |
Families Citing this family (30)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59199477A (ja) * | 1983-04-25 | 1984-11-12 | 住友電気工業株式会社 | ウエハ−ボツクス |
US4520925A (en) * | 1983-08-09 | 1985-06-04 | Empak Inc. | Package |
US4557382A (en) * | 1983-08-17 | 1985-12-10 | Empak Inc. | Disk package |
US4668484A (en) * | 1984-02-13 | 1987-05-26 | Elliott David J | Transport containers for semiconductor wafers |
USRE33361E (en) * | 1984-06-07 | 1990-10-02 | Substrate and media carrier | |
US4588086A (en) * | 1984-06-07 | 1986-05-13 | Coe Thomas U | Substrate and media carrier |
US4669612A (en) * | 1985-02-20 | 1987-06-02 | Empak Inc. | Disk processing cassette |
US4793488A (en) * | 1987-07-07 | 1988-12-27 | Empak, Inc. | Package for semiconductor wafers |
JPH0278246A (ja) * | 1988-09-14 | 1990-03-19 | Kakizaki Seisakusho:Kk | 薄板処理用バスケット |
US5046615A (en) * | 1989-04-03 | 1991-09-10 | Fluoroware, Inc. | Disk shipper |
US5555981A (en) * | 1992-05-26 | 1996-09-17 | Empak, Inc. | Wafer suspension box |
US5273159A (en) * | 1992-05-26 | 1993-12-28 | Empak, Inc. | Wafer suspension box |
US5348151A (en) * | 1993-12-20 | 1994-09-20 | Empak, Inc. | Low profile disk carrier |
TW296361B (fr) * | 1995-06-26 | 1997-01-21 | Kakizaki Seisakusho Kk | |
USD378873S (en) * | 1995-10-13 | 1997-04-22 | Empak, Inc. | 300 mm microenvironment pod with door on side |
USD387903S (en) * | 1995-10-13 | 1997-12-23 | Empak, Inc. | Shipping container |
USD383898S (en) * | 1995-10-13 | 1997-09-23 | Empak, Inc. | Combination shipping and transport cassette |
US5709065A (en) * | 1996-07-31 | 1998-01-20 | Empak, Inc. | Desiccant substrate package |
US5921397A (en) * | 1996-12-10 | 1999-07-13 | Empak, Inc. | Disk cassette |
US6070730A (en) * | 1997-06-18 | 2000-06-06 | Fluoroware, Inc. | Disk container |
US6216873B1 (en) * | 1999-03-19 | 2001-04-17 | Asyst Technologies, Inc. | SMIF container including a reticle support structure |
TW522448B (en) * | 2001-10-22 | 2003-03-01 | Advanced Semiconductor Eng | Semiconductor wafer carrying apparatus |
US7252199B2 (en) * | 2004-03-26 | 2007-08-07 | Entegris, Inc. | Disk cassette system |
WO2006011609A1 (fr) * | 2004-07-30 | 2006-02-02 | Showa Denko K.K. | Boitier de disque magnetique |
JP2006062704A (ja) * | 2004-08-26 | 2006-03-09 | Miraial Kk | 薄板支持容器 |
US7967146B2 (en) * | 2007-08-08 | 2011-06-28 | E.Pak International, Inc. | Container |
JP4999808B2 (ja) * | 2008-09-29 | 2012-08-15 | 東京エレクトロン株式会社 | 基板処理装置 |
JP5473691B2 (ja) * | 2010-03-16 | 2014-04-16 | 株式会社ディスコ | 収容カセット |
DE102015217208A1 (de) * | 2015-09-09 | 2017-03-09 | Bayerische Motoren Werke Aktiengesellschaft | Stapelvorrichtung zum Stapeln von Lack- und Montagestopfen |
WO2023049117A1 (fr) * | 2021-09-22 | 2023-03-30 | Entegris, Inc. | Support de traitement |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3164478A (en) * | 1961-12-15 | 1965-01-05 | Poster Packaging Inc | Doughnut package |
US3212907A (en) * | 1962-03-27 | 1965-10-19 | Plastic Packaging Products Ltd | Food package and tray |
US3322267A (en) * | 1964-06-12 | 1967-05-30 | Pantasote Company Of New York | Multiple-cavity cookie container |
US3223234A (en) * | 1965-02-01 | 1965-12-14 | Pantasota Company | End support for fragile tubular articles |
US3467242A (en) * | 1968-03-04 | 1969-09-16 | Dale E De Rousse | Storage unit for wafer-like articles |
US3534862A (en) * | 1968-09-13 | 1970-10-20 | Rca Corp | Semiconductor wafer transporting jig |
US3923156A (en) * | 1974-04-29 | 1975-12-02 | Fluoroware Inc | Wafer basket |
US3961877A (en) * | 1974-09-11 | 1976-06-08 | Fluoroware, Inc. | Reinforced wafer basket |
US3980226A (en) * | 1975-05-05 | 1976-09-14 | Franz Charles F | Evacuateable bag |
US4043451A (en) * | 1976-03-18 | 1977-08-23 | Fluoroware, Inc. | Shipping container for silicone semiconductor wafers |
-
1977
- 1977-01-21 DE DE2702464A patent/DE2702464C2/de not_active Expired
- 1977-12-22 NL NL7714275A patent/NL7714275A/xx not_active Application Discontinuation
-
1978
- 1978-01-09 GB GB721/78A patent/GB1586526A/en not_active Expired
- 1978-01-10 DK DK10378A patent/DK10378A/da unknown
- 1978-01-19 US US05/870,911 patent/US4160504A/en not_active Expired - Lifetime
- 1978-01-19 IT IT47702/78A patent/IT1102016B/it active
- 1978-01-20 JP JP512978A patent/JPS5392661A/ja active Granted
- 1978-01-20 BE BE184473A patent/BE863111A/fr not_active IP Right Cessation
- 1978-01-20 FR FR7801611A patent/FR2377949A1/fr active Granted
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0159416A2 (fr) * | 1984-04-12 | 1985-10-30 | Wacker-Chemitronic Gesellschaft für Elektronik-Grundstoffe mbH | Empaquetage pour plaques à semi-conducteurs |
EP0159416A3 (fr) * | 1984-04-12 | 1988-07-27 | Wacker-Chemitronic Gesellschaft für Elektronik-Grundstoffe mbH | Empaquetage pour plaques à semi-conducteurs |
WO1996039711A1 (fr) * | 1995-06-06 | 1996-12-12 | Fluoroware, Inc. | Dispositif de calage pour emballage d'expedition de plaquettes semi-conductrices |
Also Published As
Publication number | Publication date |
---|---|
DK10378A (da) | 1978-07-22 |
NL7714275A (nl) | 1978-07-25 |
IT1102016B (it) | 1985-10-07 |
DE2702464C2 (de) | 1981-10-15 |
BE863111A (fr) | 1978-07-20 |
FR2377949B1 (fr) | 1981-01-09 |
US4160504A (en) | 1979-07-10 |
IT7847702A0 (it) | 1978-01-19 |
JPS559822B2 (fr) | 1980-03-12 |
GB1586526A (en) | 1981-03-18 |
DE2702464A1 (de) | 1978-07-27 |
JPS5392661A (en) | 1978-08-14 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |