JPS559407A - Sampling table for scanning electron microscope etc - Google Patents

Sampling table for scanning electron microscope etc

Info

Publication number
JPS559407A
JPS559407A JP8101378A JP8101378A JPS559407A JP S559407 A JPS559407 A JP S559407A JP 8101378 A JP8101378 A JP 8101378A JP 8101378 A JP8101378 A JP 8101378A JP S559407 A JPS559407 A JP S559407A
Authority
JP
Japan
Prior art keywords
sampling table
probes
holders
electron microscope
scanning electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8101378A
Other languages
Japanese (ja)
Inventor
Tadashi Otaka
Kimio Kanda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP8101378A priority Critical patent/JPS559407A/en
Publication of JPS559407A publication Critical patent/JPS559407A/en
Pending legal-status Critical Current

Links

Landscapes

  • Tests Of Electronic Circuits (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

PURPOSE: To observe a surface potential image of an unbonded IC by providing several holders which are electrically insulated from a sampling table, and installing contacting probes to the holders on the sampling table, then applying voltage to the probes.
CONSTITUTION: A wafer consisting of an IC 2 is placed on the center of a sampling table 1, and through insulators 6, several holders 4 with contacting probes 3 attached to them are fixed on the periphery of the sampling table 1. The edges of these probes 3 are brought into contact with the edge of the IC 2, and voltage is applied through lead wires 5 which are connected to the holders 4. When the IC 2 is two-dimensionally scanned by means of an electron beam, signals being emitted from the IC 2 are shown on a CRT. By so doing, a surface potential image can be observed during manufacturing process before bonding the IC, thus enabling the analysis on the products and selection of good products. Therefore, manufacturing efficiency of the IC can be increased.
COPYRIGHT: (C)1980,JPO&Japio
JP8101378A 1978-07-05 1978-07-05 Sampling table for scanning electron microscope etc Pending JPS559407A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8101378A JPS559407A (en) 1978-07-05 1978-07-05 Sampling table for scanning electron microscope etc

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8101378A JPS559407A (en) 1978-07-05 1978-07-05 Sampling table for scanning electron microscope etc

Publications (1)

Publication Number Publication Date
JPS559407A true JPS559407A (en) 1980-01-23

Family

ID=13734607

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8101378A Pending JPS559407A (en) 1978-07-05 1978-07-05 Sampling table for scanning electron microscope etc

Country Status (1)

Country Link
JP (1) JPS559407A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001063660A1 (en) * 2000-02-25 2001-08-30 Hitachi, Ltd. Apparatus for detecting defect in device and method of detecting defect

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52113170A (en) * 1977-03-25 1977-09-22 Hitachi Ltd Spicemen carrier for ic

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52113170A (en) * 1977-03-25 1977-09-22 Hitachi Ltd Spicemen carrier for ic

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001063660A1 (en) * 2000-02-25 2001-08-30 Hitachi, Ltd. Apparatus for detecting defect in device and method of detecting defect
US6734687B1 (en) 2000-02-25 2004-05-11 Hitachi, Ltd. Apparatus for detecting defect in device and method of detecting defect
US6970004B2 (en) 2000-02-25 2005-11-29 Hitachi, Ltd. Apparatus for inspecting defects of devices and method of inspecting defects

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