JPS51132087A - Observing method of semiconductor surface defect - Google Patents

Observing method of semiconductor surface defect

Info

Publication number
JPS51132087A
JPS51132087A JP50056454A JP5645475A JPS51132087A JP S51132087 A JPS51132087 A JP S51132087A JP 50056454 A JP50056454 A JP 50056454A JP 5645475 A JP5645475 A JP 5645475A JP S51132087 A JPS51132087 A JP S51132087A
Authority
JP
Japan
Prior art keywords
semiconductor surface
surface defect
observing method
observing
beside
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP50056454A
Other languages
Japanese (ja)
Inventor
Tadao Kato
Takayuki Matsukawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP50056454A priority Critical patent/JPS51132087A/en
Publication of JPS51132087A publication Critical patent/JPS51132087A/en
Pending legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

PURPOSE: Observing method which makes it possible to observe a crystal deflect beside a semiconductor surface easy without damaging a sample with comparatively little electron beam.
COPYRIGHT: (C)1976,JPO&Japio
JP50056454A 1975-05-12 1975-05-12 Observing method of semiconductor surface defect Pending JPS51132087A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50056454A JPS51132087A (en) 1975-05-12 1975-05-12 Observing method of semiconductor surface defect

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50056454A JPS51132087A (en) 1975-05-12 1975-05-12 Observing method of semiconductor surface defect

Publications (1)

Publication Number Publication Date
JPS51132087A true JPS51132087A (en) 1976-11-16

Family

ID=13027541

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50056454A Pending JPS51132087A (en) 1975-05-12 1975-05-12 Observing method of semiconductor surface defect

Country Status (1)

Country Link
JP (1) JPS51132087A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012049312A (en) * 2010-08-26 2012-03-08 Toyota Motor Corp Method for observing defect on semiconductor single crystal substrate

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012049312A (en) * 2010-08-26 2012-03-08 Toyota Motor Corp Method for observing defect on semiconductor single crystal substrate

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