JPS51132087A - Observing method of semiconductor surface defect - Google Patents
Observing method of semiconductor surface defectInfo
- Publication number
- JPS51132087A JPS51132087A JP50056454A JP5645475A JPS51132087A JP S51132087 A JPS51132087 A JP S51132087A JP 50056454 A JP50056454 A JP 50056454A JP 5645475 A JP5645475 A JP 5645475A JP S51132087 A JPS51132087 A JP S51132087A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor surface
- surface defect
- observing method
- observing
- beside
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Tests Of Electronic Circuits (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
PURPOSE: Observing method which makes it possible to observe a crystal deflect beside a semiconductor surface easy without damaging a sample with comparatively little electron beam.
COPYRIGHT: (C)1976,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50056454A JPS51132087A (en) | 1975-05-12 | 1975-05-12 | Observing method of semiconductor surface defect |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50056454A JPS51132087A (en) | 1975-05-12 | 1975-05-12 | Observing method of semiconductor surface defect |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS51132087A true JPS51132087A (en) | 1976-11-16 |
Family
ID=13027541
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP50056454A Pending JPS51132087A (en) | 1975-05-12 | 1975-05-12 | Observing method of semiconductor surface defect |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS51132087A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012049312A (en) * | 2010-08-26 | 2012-03-08 | Toyota Motor Corp | Method for observing defect on semiconductor single crystal substrate |
-
1975
- 1975-05-12 JP JP50056454A patent/JPS51132087A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012049312A (en) * | 2010-08-26 | 2012-03-08 | Toyota Motor Corp | Method for observing defect on semiconductor single crystal substrate |
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