JPS5591848A - Preparation of microwave integrated circuit - Google Patents

Preparation of microwave integrated circuit

Info

Publication number
JPS5591848A
JPS5591848A JP16229978A JP16229978A JPS5591848A JP S5591848 A JPS5591848 A JP S5591848A JP 16229978 A JP16229978 A JP 16229978A JP 16229978 A JP16229978 A JP 16229978A JP S5591848 A JPS5591848 A JP S5591848A
Authority
JP
Japan
Prior art keywords
region
microwave
integrated circuit
impurities
gaas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16229978A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6239544B2 (enrdf_load_stackoverflow
Inventor
Eiji Yamamura
Masumi Fukuda
Masafumi Shigaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP16229978A priority Critical patent/JPS5591848A/ja
Publication of JPS5591848A publication Critical patent/JPS5591848A/ja
Publication of JPS6239544B2 publication Critical patent/JPS6239544B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Semiconductor Integrated Circuits (AREA)
JP16229978A 1978-12-29 1978-12-29 Preparation of microwave integrated circuit Granted JPS5591848A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16229978A JPS5591848A (en) 1978-12-29 1978-12-29 Preparation of microwave integrated circuit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16229978A JPS5591848A (en) 1978-12-29 1978-12-29 Preparation of microwave integrated circuit

Publications (2)

Publication Number Publication Date
JPS5591848A true JPS5591848A (en) 1980-07-11
JPS6239544B2 JPS6239544B2 (enrdf_load_stackoverflow) 1987-08-24

Family

ID=15751850

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16229978A Granted JPS5591848A (en) 1978-12-29 1978-12-29 Preparation of microwave integrated circuit

Country Status (1)

Country Link
JP (1) JPS5591848A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58101501A (ja) * 1981-12-14 1983-06-16 Mitsubishi Electric Corp 高周波スイツチ装置
JPS6053053A (ja) * 1983-07-29 1985-03-26 トムソン−セエスエフ 事前植設された超周波数集積回路のセル間相互接続装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58101501A (ja) * 1981-12-14 1983-06-16 Mitsubishi Electric Corp 高周波スイツチ装置
JPS6053053A (ja) * 1983-07-29 1985-03-26 トムソン−セエスエフ 事前植設された超周波数集積回路のセル間相互接続装置

Also Published As

Publication number Publication date
JPS6239544B2 (enrdf_load_stackoverflow) 1987-08-24

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