JPS5587480A - Insulated gate type field effect transistor and manufacture thereof - Google Patents
Insulated gate type field effect transistor and manufacture thereofInfo
- Publication number
- JPS5587480A JPS5587480A JP16216378A JP16216378A JPS5587480A JP S5587480 A JPS5587480 A JP S5587480A JP 16216378 A JP16216378 A JP 16216378A JP 16216378 A JP16216378 A JP 16216378A JP S5587480 A JPS5587480 A JP S5587480A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- groove
- manufacture
- film
- field effect
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electrodes Of Semiconductors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16216378A JPS5587480A (en) | 1978-12-25 | 1978-12-25 | Insulated gate type field effect transistor and manufacture thereof |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16216378A JPS5587480A (en) | 1978-12-25 | 1978-12-25 | Insulated gate type field effect transistor and manufacture thereof |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5587480A true JPS5587480A (en) | 1980-07-02 |
Family
ID=15749218
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP16216378A Pending JPS5587480A (en) | 1978-12-25 | 1978-12-25 | Insulated gate type field effect transistor and manufacture thereof |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5587480A (ja) |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS508483A (ja) * | 1973-05-21 | 1975-01-28 | ||
JPS52113173A (en) * | 1976-03-17 | 1977-09-22 | Matsushita Electric Ind Co Ltd | Mos type semiconductor device |
-
1978
- 1978-12-25 JP JP16216378A patent/JPS5587480A/ja active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS508483A (ja) * | 1973-05-21 | 1975-01-28 | ||
JPS52113173A (en) * | 1976-03-17 | 1977-09-22 | Matsushita Electric Ind Co Ltd | Mos type semiconductor device |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS55151363A (en) | Mos semiconductor device and fabricating method of the same | |
JPS54109785A (en) | Semiconductor device | |
JPS54161282A (en) | Manufacture of mos semiconductor device | |
JPS57201078A (en) | Semiconductor and its manufacture | |
JPS5587480A (en) | Insulated gate type field effect transistor and manufacture thereof | |
JPS5522879A (en) | Insulation gate type field effect semiconductor device | |
JPS5575238A (en) | Method of fabricating semiconductor device | |
JPS5583267A (en) | Method of fabricating semiconductor device | |
JPS5483778A (en) | Mos semiconductor device and its manufacture | |
JPS54153583A (en) | Semiconductor device | |
JPS5538019A (en) | Manufacturing of semiconductor device | |
JPS52117079A (en) | Preparation of semiconductor device | |
JPS5492074A (en) | Mis field effect transistor and its manufacture | |
JPS54143076A (en) | Semiconductor device and its manufacture | |
JPS5748248A (en) | Manufacture of semiconductor device | |
JPS56111217A (en) | Preparation of semiconductor device | |
JPS55162270A (en) | Semiconductor device | |
JPS5372473A (en) | Manufacture of mis type semicondctor device | |
JPS5739579A (en) | Mos semiconductor device and manufacture thereof | |
JPS56104470A (en) | Semiconductor device and manufacture thereof | |
JPS54124686A (en) | Mos transistor and its production | |
JPS5447488A (en) | Production of silicon gate type mis semiconductor device | |
JPS5580333A (en) | Manufacture of mos semiconductor device | |
JPS5572076A (en) | Production of double layer polycrystaline silicone construction semiconductor device | |
JPS5561070A (en) | Semiconductor device |