JPS5586059A - Ion micro analyser - Google Patents

Ion micro analyser

Info

Publication number
JPS5586059A
JPS5586059A JP15857778A JP15857778A JPS5586059A JP S5586059 A JPS5586059 A JP S5586059A JP 15857778 A JP15857778 A JP 15857778A JP 15857778 A JP15857778 A JP 15857778A JP S5586059 A JPS5586059 A JP S5586059A
Authority
JP
Japan
Prior art keywords
output
amplifier
current amplifier
total secondary
secondary ion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15857778A
Other languages
Japanese (ja)
Inventor
Eiichi Izumi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP15857778A priority Critical patent/JPS5586059A/en
Publication of JPS5586059A publication Critical patent/JPS5586059A/en
Pending legal-status Critical Current

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  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

PURPOSE: To fix the output of a total secondary current amplifier to the constant value and extend its measurement range by setting up an amplifier connected to a controller which is controlled by the output of a compatator that is compared with a compare voltage source between an ion current amplifier and a division circuit.
CONSTITUTION: Each gain switching amplifier 16 is connected to the rear stage of each ion current amplifier 8 to which the total secondary ion IT and the specific secondary ion IJ are input and is connected to the division circuit 9. When the output voltage of the total secondary ion current amplifier is lower than the preset compare voltage E from the compare voltage source 13, the output of the comparator 14 is inverted. The control circuit 15 increases the gain of the gain switching amplifier 16 and multiplies the input X of the division circuit 9 by G. In this case, if the input Y is also multiplied by G, the ratio of Y to X does not change. This enables the total secondary ion IT to be equivalently made constant and its division accuracy and dynamic lenses to increase.
COPYRIGHT: (C)1980,JPO&Japio
JP15857778A 1978-12-25 1978-12-25 Ion micro analyser Pending JPS5586059A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15857778A JPS5586059A (en) 1978-12-25 1978-12-25 Ion micro analyser

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15857778A JPS5586059A (en) 1978-12-25 1978-12-25 Ion micro analyser

Publications (1)

Publication Number Publication Date
JPS5586059A true JPS5586059A (en) 1980-06-28

Family

ID=15674720

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15857778A Pending JPS5586059A (en) 1978-12-25 1978-12-25 Ion micro analyser

Country Status (1)

Country Link
JP (1) JPS5586059A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59261U (en) * 1982-06-25 1984-01-05 日本電子株式会社 Image signal processing circuit
US5438197A (en) * 1993-07-09 1995-08-01 Seiko Instruments Inc. Focused ion beam apparatus
DE102008038216A1 (en) * 2008-08-18 2010-03-11 Carl Zeiss Nts Gmbh A method of generating corpuscular beam images with a corpuscular beam apparatus

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59261U (en) * 1982-06-25 1984-01-05 日本電子株式会社 Image signal processing circuit
JPH0224209Y2 (en) * 1982-06-25 1990-07-03
US5438197A (en) * 1993-07-09 1995-08-01 Seiko Instruments Inc. Focused ion beam apparatus
DE102008038216A1 (en) * 2008-08-18 2010-03-11 Carl Zeiss Nts Gmbh A method of generating corpuscular beam images with a corpuscular beam apparatus
US8153967B2 (en) 2008-08-18 2012-04-10 Carl Zeiss Nts Gmbh Method of generating particle beam images using a particle beam apparatus

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