JPS5586059A - Ion micro analyser - Google Patents
Ion micro analyserInfo
- Publication number
- JPS5586059A JPS5586059A JP15857778A JP15857778A JPS5586059A JP S5586059 A JPS5586059 A JP S5586059A JP 15857778 A JP15857778 A JP 15857778A JP 15857778 A JP15857778 A JP 15857778A JP S5586059 A JPS5586059 A JP S5586059A
- Authority
- JP
- Japan
- Prior art keywords
- output
- amplifier
- current amplifier
- total secondary
- secondary ion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
Abstract
PURPOSE: To fix the output of a total secondary current amplifier to the constant value and extend its measurement range by setting up an amplifier connected to a controller which is controlled by the output of a compatator that is compared with a compare voltage source between an ion current amplifier and a division circuit.
CONSTITUTION: Each gain switching amplifier 16 is connected to the rear stage of each ion current amplifier 8 to which the total secondary ion IT and the specific secondary ion IJ are input and is connected to the division circuit 9. When the output voltage of the total secondary ion current amplifier is lower than the preset compare voltage E from the compare voltage source 13, the output of the comparator 14 is inverted. The control circuit 15 increases the gain of the gain switching amplifier 16 and multiplies the input X of the division circuit 9 by G. In this case, if the input Y is also multiplied by G, the ratio of Y to X does not change. This enables the total secondary ion IT to be equivalently made constant and its division accuracy and dynamic lenses to increase.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15857778A JPS5586059A (en) | 1978-12-25 | 1978-12-25 | Ion micro analyser |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15857778A JPS5586059A (en) | 1978-12-25 | 1978-12-25 | Ion micro analyser |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5586059A true JPS5586059A (en) | 1980-06-28 |
Family
ID=15674720
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15857778A Pending JPS5586059A (en) | 1978-12-25 | 1978-12-25 | Ion micro analyser |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5586059A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59261U (en) * | 1982-06-25 | 1984-01-05 | 日本電子株式会社 | Image signal processing circuit |
US5438197A (en) * | 1993-07-09 | 1995-08-01 | Seiko Instruments Inc. | Focused ion beam apparatus |
DE102008038216A1 (en) * | 2008-08-18 | 2010-03-11 | Carl Zeiss Nts Gmbh | A method of generating corpuscular beam images with a corpuscular beam apparatus |
-
1978
- 1978-12-25 JP JP15857778A patent/JPS5586059A/en active Pending
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59261U (en) * | 1982-06-25 | 1984-01-05 | 日本電子株式会社 | Image signal processing circuit |
JPH0224209Y2 (en) * | 1982-06-25 | 1990-07-03 | ||
US5438197A (en) * | 1993-07-09 | 1995-08-01 | Seiko Instruments Inc. | Focused ion beam apparatus |
DE102008038216A1 (en) * | 2008-08-18 | 2010-03-11 | Carl Zeiss Nts Gmbh | A method of generating corpuscular beam images with a corpuscular beam apparatus |
US8153967B2 (en) | 2008-08-18 | 2012-04-10 | Carl Zeiss Nts Gmbh | Method of generating particle beam images using a particle beam apparatus |
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