JPS5579867A - Vacuum evaporation method - Google Patents
Vacuum evaporation methodInfo
- Publication number
- JPS5579867A JPS5579867A JP15329278A JP15329278A JPS5579867A JP S5579867 A JPS5579867 A JP S5579867A JP 15329278 A JP15329278 A JP 15329278A JP 15329278 A JP15329278 A JP 15329278A JP S5579867 A JPS5579867 A JP S5579867A
- Authority
- JP
- Japan
- Prior art keywords
- oil
- metal
- mask process
- evaporation
- molecular weight
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/04—Coating on selected surface areas, e.g. using masks
- C23C14/042—Coating on selected surface areas, e.g. using masks using masks
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15329278A JPS5579867A (en) | 1978-12-11 | 1978-12-11 | Vacuum evaporation method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15329278A JPS5579867A (en) | 1978-12-11 | 1978-12-11 | Vacuum evaporation method |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5579867A true JPS5579867A (en) | 1980-06-16 |
JPS5547113B2 JPS5547113B2 (ja) | 1980-11-27 |
Family
ID=15559279
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15329278A Granted JPS5579867A (en) | 1978-12-11 | 1978-12-11 | Vacuum evaporation method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5579867A (ja) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0073949A2 (de) * | 1981-09-01 | 1983-03-16 | Siemens Aktiengesellschaft | Verfahren und Herstellung von metallfreien Streifen bei der Metallbedampfung eines Isolierstoffbandes und Vorrichtung zur Durchführung des Verfahrens |
JPS5897823A (ja) * | 1981-12-07 | 1983-06-10 | 松下電器産業株式会社 | 金属化フイルムコンデンサの製造方法 |
JPS637363A (ja) * | 1986-06-25 | 1988-01-13 | Kakogawa Plast Kk | 真空蒸着方法 |
US4749591A (en) * | 1985-07-03 | 1988-06-07 | Metalvuoto Films S.P.A. | Device for making metallized plastic films with clearly defined non-metallized areas |
JPH11204371A (ja) * | 1998-01-20 | 1999-07-30 | Matsushita Electric Ind Co Ltd | 薄膜積層体及び薄膜積層体の製造方法 |
US6576523B1 (en) | 1997-11-18 | 2003-06-10 | Matsushita Electric Industrial Co., Ltd. | Layered product, capacitor and a method for producing the layered product |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57156608A (en) * | 1981-03-20 | 1982-09-28 | Nissin Electric Co Ltd | Gas insulating switching device |
JPS57156610A (en) * | 1981-05-27 | 1982-09-28 | Nissin Electric Co Ltd | Gas insulating switching device |
-
1978
- 1978-12-11 JP JP15329278A patent/JPS5579867A/ja active Granted
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0073949A2 (de) * | 1981-09-01 | 1983-03-16 | Siemens Aktiengesellschaft | Verfahren und Herstellung von metallfreien Streifen bei der Metallbedampfung eines Isolierstoffbandes und Vorrichtung zur Durchführung des Verfahrens |
JPS5897823A (ja) * | 1981-12-07 | 1983-06-10 | 松下電器産業株式会社 | 金属化フイルムコンデンサの製造方法 |
JPS6357932B2 (ja) * | 1981-12-07 | 1988-11-14 | Matsushita Electric Ind Co Ltd | |
US4749591A (en) * | 1985-07-03 | 1988-06-07 | Metalvuoto Films S.P.A. | Device for making metallized plastic films with clearly defined non-metallized areas |
JPS637363A (ja) * | 1986-06-25 | 1988-01-13 | Kakogawa Plast Kk | 真空蒸着方法 |
JPH0359981B2 (ja) * | 1986-06-25 | 1991-09-12 | Kakogawa Purasuchitsukusu Kk | |
US6576523B1 (en) | 1997-11-18 | 2003-06-10 | Matsushita Electric Industrial Co., Ltd. | Layered product, capacitor and a method for producing the layered product |
US6838153B2 (en) | 1997-11-18 | 2005-01-04 | Matsushita Electric Industrial Co., Ltd. | Layered product, capacitor and a method for producing the layered product |
JPH11204371A (ja) * | 1998-01-20 | 1999-07-30 | Matsushita Electric Ind Co Ltd | 薄膜積層体及び薄膜積層体の製造方法 |
Also Published As
Publication number | Publication date |
---|---|
JPS5547113B2 (ja) | 1980-11-27 |
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