JPS5578578A - Manufacture of schottky barrier diode - Google Patents
Manufacture of schottky barrier diodeInfo
- Publication number
- JPS5578578A JPS5578578A JP15196978A JP15196978A JPS5578578A JP S5578578 A JPS5578578 A JP S5578578A JP 15196978 A JP15196978 A JP 15196978A JP 15196978 A JP15196978 A JP 15196978A JP S5578578 A JPS5578578 A JP S5578578A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- silicon
- manufacture
- barrier
- metal layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electrodes Of Semiconductors (AREA)
Abstract
PURPOSE: To increase dielectric strength and to decrease the current in the reverse direction by selectively forming a barrier metal layer on one main surface of a silicon substrate and then simultaneously forming a protecting film and a metal-silicon alloy layer on the main surface of the substrate.
CONSTITUTION: An n--layer 11b and an N++-layer 5 are formed on both surfaces of an n+ silicon substrate 1a, and a barrier metal layer 23 is deposited on the top surface. Then, an silicon oxide layer 12' and a sintered layer 13 of a barrier-metal silicon are simultaneously formed, and a window is opened through the silicon oxide layer 12'. Then, an electrode metal layer 14' is evaporated so that it is larger than the barrier metal layer 23.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15196978A JPS5578578A (en) | 1978-12-11 | 1978-12-11 | Manufacture of schottky barrier diode |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15196978A JPS5578578A (en) | 1978-12-11 | 1978-12-11 | Manufacture of schottky barrier diode |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5578578A true JPS5578578A (en) | 1980-06-13 |
Family
ID=15530169
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15196978A Pending JPS5578578A (en) | 1978-12-11 | 1978-12-11 | Manufacture of schottky barrier diode |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5578578A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5982774A (en) * | 1982-11-02 | 1984-05-12 | Nec Corp | Semiconductor device |
-
1978
- 1978-12-11 JP JP15196978A patent/JPS5578578A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5982774A (en) * | 1982-11-02 | 1984-05-12 | Nec Corp | Semiconductor device |
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