JPS5578451A - Inspecting method of contamination in electron-optical system - Google Patents
Inspecting method of contamination in electron-optical systemInfo
- Publication number
- JPS5578451A JPS5578451A JP15159078A JP15159078A JPS5578451A JP S5578451 A JPS5578451 A JP S5578451A JP 15159078 A JP15159078 A JP 15159078A JP 15159078 A JP15159078 A JP 15159078A JP S5578451 A JPS5578451 A JP S5578451A
- Authority
- JP
- Japan
- Prior art keywords
- electron beam
- detector
- electron
- drift
- contamination
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15159078A JPS5858778B2 (ja) | 1978-12-07 | 1978-12-07 | 電子光学系の汚染チエツク法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15159078A JPS5858778B2 (ja) | 1978-12-07 | 1978-12-07 | 電子光学系の汚染チエツク法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5578451A true JPS5578451A (en) | 1980-06-13 |
JPS5858778B2 JPS5858778B2 (ja) | 1983-12-27 |
Family
ID=15521831
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15159078A Expired JPS5858778B2 (ja) | 1978-12-07 | 1978-12-07 | 電子光学系の汚染チエツク法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5858778B2 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2005121902A1 (ja) * | 2004-06-07 | 2005-12-22 | Pioneer Corporation | 電子ビーム位置変動測定方法、電子ビーム位置変動測定装置、電子ビーム記録装置 |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60175183U (ja) * | 1984-04-27 | 1985-11-20 | 遠藤 美佐夫 | ストロ− |
JPS61149576U (ja) * | 1985-03-08 | 1986-09-16 | ||
JP2003077814A (ja) * | 2001-09-05 | 2003-03-14 | Nikon Corp | 荷電粒子線露光装置の結像性能の計測方法及びその計測装置、荷電粒子線露光装置 |
-
1978
- 1978-12-07 JP JP15159078A patent/JPS5858778B2/ja not_active Expired
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2005121902A1 (ja) * | 2004-06-07 | 2005-12-22 | Pioneer Corporation | 電子ビーム位置変動測定方法、電子ビーム位置変動測定装置、電子ビーム記録装置 |
US8289384B2 (en) | 2004-06-07 | 2012-10-16 | Nuflare Technology, Inc. | Electron beam displacement measuring method, electron beam displacement measuring device, and electron beam recording apparatus |
Also Published As
Publication number | Publication date |
---|---|
JPS5858778B2 (ja) | 1983-12-27 |
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