JPS5575226A - Manufacturing semiconductor device - Google Patents
Manufacturing semiconductor deviceInfo
- Publication number
- JPS5575226A JPS5575226A JP14985078A JP14985078A JPS5575226A JP S5575226 A JPS5575226 A JP S5575226A JP 14985078 A JP14985078 A JP 14985078A JP 14985078 A JP14985078 A JP 14985078A JP S5575226 A JPS5575226 A JP S5575226A
- Authority
- JP
- Japan
- Prior art keywords
- thin
- film
- less
- heat treatment
- nickel film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title abstract 2
- 238000004519 manufacturing process Methods 0.000 title 1
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 abstract 10
- 229910052759 nickel Inorganic materials 0.000 abstract 5
- 238000010438 heat treatment Methods 0.000 abstract 4
- 229910021334 nickel silicide Inorganic materials 0.000 abstract 2
- RUFLMLWJRZAWLJ-UHFFFAOYSA-N nickel silicide Chemical compound [Ni]=[Si]=[Ni] RUFLMLWJRZAWLJ-UHFFFAOYSA-N 0.000 abstract 2
- 229910000679 solder Inorganic materials 0.000 abstract 2
- 238000005476 soldering Methods 0.000 abstract 2
- 229910052720 vanadium Inorganic materials 0.000 abstract 2
- LEONUFNNVUYDNQ-UHFFFAOYSA-N vanadium atom Chemical compound [V] LEONUFNNVUYDNQ-UHFFFAOYSA-N 0.000 abstract 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 abstract 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract 1
- 229910052787 antimony Inorganic materials 0.000 abstract 1
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 abstract 1
- 229910052802 copper Inorganic materials 0.000 abstract 1
- 239000010949 copper Substances 0.000 abstract 1
- 238000000151 deposition Methods 0.000 abstract 1
- 229910052738 indium Inorganic materials 0.000 abstract 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 abstract 1
- 229910052751 metal Inorganic materials 0.000 abstract 1
- 239000002184 metal Substances 0.000 abstract 1
- 239000008188 pellet Substances 0.000 abstract 1
- 229910052710 silicon Inorganic materials 0.000 abstract 1
- 239000010703 silicon Substances 0.000 abstract 1
Landscapes
- Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
- Die Bonding (AREA)
- Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14985078A JPS5575226A (en) | 1978-12-04 | 1978-12-04 | Manufacturing semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14985078A JPS5575226A (en) | 1978-12-04 | 1978-12-04 | Manufacturing semiconductor device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5575226A true JPS5575226A (en) | 1980-06-06 |
| JPS6353693B2 JPS6353693B2 (enrdf_load_stackoverflow) | 1988-10-25 |
Family
ID=15484008
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14985078A Granted JPS5575226A (en) | 1978-12-04 | 1978-12-04 | Manufacturing semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5575226A (enrdf_load_stackoverflow) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59198727A (ja) * | 1983-04-26 | 1984-11-10 | Nec Home Electronics Ltd | 半導体装置の製造方法 |
| US4954870A (en) * | 1984-12-28 | 1990-09-04 | Kabushiki Kaisha Toshiba | Semiconductor device |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5027990A (enrdf_load_stackoverflow) * | 1973-07-13 | 1975-03-22 |
-
1978
- 1978-12-04 JP JP14985078A patent/JPS5575226A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5027990A (enrdf_load_stackoverflow) * | 1973-07-13 | 1975-03-22 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59198727A (ja) * | 1983-04-26 | 1984-11-10 | Nec Home Electronics Ltd | 半導体装置の製造方法 |
| US4954870A (en) * | 1984-12-28 | 1990-09-04 | Kabushiki Kaisha Toshiba | Semiconductor device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6353693B2 (enrdf_load_stackoverflow) | 1988-10-25 |
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