JPS5574409A - Defect inspection system of repetitive pattern - Google Patents
Defect inspection system of repetitive patternInfo
- Publication number
- JPS5574409A JPS5574409A JP14950578A JP14950578A JPS5574409A JP S5574409 A JPS5574409 A JP S5574409A JP 14950578 A JP14950578 A JP 14950578A JP 14950578 A JP14950578 A JP 14950578A JP S5574409 A JPS5574409 A JP S5574409A
- Authority
- JP
- Japan
- Prior art keywords
- repetitive pattern
- picture element
- signal
- defect
- patterns
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Image Processing (AREA)
- Image Analysis (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14950578A JPS5574409A (en) | 1978-11-30 | 1978-11-30 | Defect inspection system of repetitive pattern |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14950578A JPS5574409A (en) | 1978-11-30 | 1978-11-30 | Defect inspection system of repetitive pattern |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5574409A true JPS5574409A (en) | 1980-06-05 |
Family
ID=15476605
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14950578A Pending JPS5574409A (en) | 1978-11-30 | 1978-11-30 | Defect inspection system of repetitive pattern |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5574409A (ja) |
Cited By (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57137805A (en) * | 1981-02-20 | 1982-08-25 | Dainippon Printing Co Ltd | Inspecting method repetitive patterns |
JPS59192943A (ja) * | 1983-04-15 | 1984-11-01 | Hitachi Ltd | 繰返しパタ−ンの欠陥検査装置 |
JPS6093305A (ja) * | 1983-10-27 | 1985-05-25 | Fujitsu Ltd | マスク検査方法 |
JPS62226013A (ja) * | 1986-03-28 | 1987-10-05 | Teijin Ltd | 光電検出装置 |
JPS63111586A (ja) * | 1986-10-29 | 1988-05-16 | Hitachi Ltd | パタ−ン欠陥検査方法 |
JPH01140271A (ja) * | 1987-11-26 | 1989-06-01 | Oki Electric Ind Co Ltd | パターン欠陥検出装置 |
JPH05264465A (ja) * | 1992-12-04 | 1993-10-12 | Hitachi Ltd | 繰返しパターンの欠陥検査装置 |
JPH05264467A (ja) * | 1992-12-04 | 1993-10-12 | Hitachi Ltd | 繰返しパターンの欠陥検査装置 |
JPH05264464A (ja) * | 1992-12-04 | 1993-10-12 | Hitachi Ltd | 繰返しパターンの欠陥検査装置 |
JPH05264466A (ja) * | 1992-12-04 | 1993-10-12 | Hitachi Ltd | 繰返しパターンの欠陥検査装置 |
JPH06201611A (ja) * | 1993-01-08 | 1994-07-22 | Datsuku Eng Kk | シート状印刷物の欠陥検出方法 |
US6169282B1 (en) | 1997-10-29 | 2001-01-02 | Hitachi, Ltd. | Defect inspection method and apparatus therefor |
USRE37740E1 (en) | 1988-02-19 | 2002-06-11 | Kla-Tencor Corporation | Method and apparatus for optical inspection of substrates |
US6947587B1 (en) | 1998-04-21 | 2005-09-20 | Hitachi, Ltd. | Defect inspection method and apparatus |
JP2009262191A (ja) * | 2008-04-24 | 2009-11-12 | V Technology Co Ltd | パターンの欠陥修正方法 |
-
1978
- 1978-11-30 JP JP14950578A patent/JPS5574409A/ja active Pending
Cited By (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57137805A (en) * | 1981-02-20 | 1982-08-25 | Dainippon Printing Co Ltd | Inspecting method repetitive patterns |
JPS59192943A (ja) * | 1983-04-15 | 1984-11-01 | Hitachi Ltd | 繰返しパタ−ンの欠陥検査装置 |
JPH0526136B2 (ja) * | 1983-04-15 | 1993-04-15 | Hitachi Ltd | |
JPS6093305A (ja) * | 1983-10-27 | 1985-05-25 | Fujitsu Ltd | マスク検査方法 |
JPH0417361B2 (ja) * | 1983-10-27 | 1992-03-25 | Fujitsu Ltd | |
JPS62226013A (ja) * | 1986-03-28 | 1987-10-05 | Teijin Ltd | 光電検出装置 |
JPS63111586A (ja) * | 1986-10-29 | 1988-05-16 | Hitachi Ltd | パタ−ン欠陥検査方法 |
JPH01140271A (ja) * | 1987-11-26 | 1989-06-01 | Oki Electric Ind Co Ltd | パターン欠陥検出装置 |
USRE37740E1 (en) | 1988-02-19 | 2002-06-11 | Kla-Tencor Corporation | Method and apparatus for optical inspection of substrates |
JPH05264464A (ja) * | 1992-12-04 | 1993-10-12 | Hitachi Ltd | 繰返しパターンの欠陥検査装置 |
JPH05264467A (ja) * | 1992-12-04 | 1993-10-12 | Hitachi Ltd | 繰返しパターンの欠陥検査装置 |
JPH05264466A (ja) * | 1992-12-04 | 1993-10-12 | Hitachi Ltd | 繰返しパターンの欠陥検査装置 |
JPH05264465A (ja) * | 1992-12-04 | 1993-10-12 | Hitachi Ltd | 繰返しパターンの欠陥検査装置 |
JPH06201611A (ja) * | 1993-01-08 | 1994-07-22 | Datsuku Eng Kk | シート状印刷物の欠陥検出方法 |
US6169282B1 (en) | 1997-10-29 | 2001-01-02 | Hitachi, Ltd. | Defect inspection method and apparatus therefor |
US6947587B1 (en) | 1998-04-21 | 2005-09-20 | Hitachi, Ltd. | Defect inspection method and apparatus |
US7274813B2 (en) | 1998-04-21 | 2007-09-25 | Hitachi, Ltd. | Defect inspection method and apparatus |
US7512259B2 (en) | 1998-04-21 | 2009-03-31 | Hitachi, Ltd. | Defect inspection method and apparatus |
US7916929B2 (en) | 1998-04-21 | 2011-03-29 | Hitachi, Ltd. | Defect inspection method and apparatus |
US8107717B2 (en) | 1998-04-21 | 2012-01-31 | Hitachi, Ltd. | Defect inspection method and apparatus |
JP2009262191A (ja) * | 2008-04-24 | 2009-11-12 | V Technology Co Ltd | パターンの欠陥修正方法 |
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