JPS5573866A - Continuous vacuum deposition apparatus - Google Patents

Continuous vacuum deposition apparatus

Info

Publication number
JPS5573866A
JPS5573866A JP14285378A JP14285378A JPS5573866A JP S5573866 A JPS5573866 A JP S5573866A JP 14285378 A JP14285378 A JP 14285378A JP 14285378 A JP14285378 A JP 14285378A JP S5573866 A JPS5573866 A JP S5573866A
Authority
JP
Japan
Prior art keywords
plating metal
contained
metal
evaporation source
connecting tube
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14285378A
Other languages
English (en)
Inventor
Yoshikiyo Nakagawa
Daisaku Shozen
Yasuhiro Ishibashi
Yoshikazu Yamada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Heavy Industries Ltd
Original Assignee
Mitsubishi Heavy Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Heavy Industries Ltd filed Critical Mitsubishi Heavy Industries Ltd
Priority to JP14285378A priority Critical patent/JPS5573866A/ja
Publication of JPS5573866A publication Critical patent/JPS5573866A/ja
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/246—Replenishment of source material

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
JP14285378A 1978-11-21 1978-11-21 Continuous vacuum deposition apparatus Pending JPS5573866A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14285378A JPS5573866A (en) 1978-11-21 1978-11-21 Continuous vacuum deposition apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14285378A JPS5573866A (en) 1978-11-21 1978-11-21 Continuous vacuum deposition apparatus

Publications (1)

Publication Number Publication Date
JPS5573866A true JPS5573866A (en) 1980-06-03

Family

ID=15325132

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14285378A Pending JPS5573866A (en) 1978-11-21 1978-11-21 Continuous vacuum deposition apparatus

Country Status (1)

Country Link
JP (1) JPS5573866A (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0184338A2 (en) * 1984-12-04 1986-06-11 The Secretary of State for Defence in Her Britannic Majesty's Government of the United Kingdom of Great Britain and Alloy production by vapour condensation
JP2007146207A (ja) * 2005-11-25 2007-06-14 Dainippon Printing Co Ltd 真空成膜方法、及び真空成膜装置
JP2021526186A (ja) * 2018-06-04 2021-09-30 ダイソン・テクノロジー・リミテッド デバイス

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0184338A2 (en) * 1984-12-04 1986-06-11 The Secretary of State for Defence in Her Britannic Majesty's Government of the United Kingdom of Great Britain and Alloy production by vapour condensation
JP2007146207A (ja) * 2005-11-25 2007-06-14 Dainippon Printing Co Ltd 真空成膜方法、及び真空成膜装置
JP2021526186A (ja) * 2018-06-04 2021-09-30 ダイソン・テクノロジー・リミテッド デバイス
US11613804B2 (en) 2018-06-04 2023-03-28 Dyson Technology Limited Vapour deposition evaporator device

Similar Documents

Publication Publication Date Title
JPS616152B2 (ja)
FR2416743A1 (fr) Procede d'obtention d'un revetement de gel d'une matiere refractaire sur un substrat, et substrat obtenu
FR2426745A1 (fr) Procede de revetement metallique par depot sous forme de vapeurs, pour la formation de trajets conducteurs sur un corps semi-conducteur
JPS5573866A (en) Continuous vacuum deposition apparatus
FR2384865A1 (fr) Procede de galvanisage partiel
SE8205395D0 (sv) Method and apparatus for the vapor deposition of material upon a substrate
JPS56141883A (en) Pretreatment and device for sheet metal structure before coating
JPS57188677A (en) Vapor depositing device for metallic thin film
JPS55128578A (en) Method and apparatus for vacuum deposition plating of metal
JPS5544509A (en) Vacuum apparatus part coated with metallic nitride
JPS5610368A (en) Method and device for immersion coating
KR810000329B1 (ko) 고압 반응기
JPS57135836A (en) Glow discharge treatment
JPS57192262A (en) Spatter apparatus
JPS55157301A (en) Collecting method and apparatus of ineffective metal vapor
JPS5765324A (en) Method and apparatus for preparing ultrafine particle membrane
JPS552709A (en) Evaporation source for metallizing
JPS5281704A (en) Discharging apparatus for liquid in vacuum vessel
JPS5571027A (en) Continuous surface treatment apparatus
JPS5681674A (en) Charging apparatus of molten metal for plating by vacuum vapor coating
Pinkhasov Evaporation of Material for Vapour Deposition: Device for Propulsion in Space
JPS56166377A (en) Plasma treating method of hollow body
JPS6439368A (en) Thin film forming vacuum device
JPS5528334A (en) Manufacturing apparatus for ultrafine particle
JPS5538430A (en) Condensed heat transmission surface and its manufacturing