JPS5572090A - Elastic surface wave element - Google Patents
Elastic surface wave elementInfo
- Publication number
- JPS5572090A JPS5572090A JP14528978A JP14528978A JPS5572090A JP S5572090 A JPS5572090 A JP S5572090A JP 14528978 A JP14528978 A JP 14528978A JP 14528978 A JP14528978 A JP 14528978A JP S5572090 A JPS5572090 A JP S5572090A
- Authority
- JP
- Japan
- Prior art keywords
- piezo
- wave element
- sio
- surface wave
- specific resistance
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000463 material Substances 0.000 abstract 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 4
- 239000004065 semiconductor Substances 0.000 abstract 3
- 229910052681 coesite Inorganic materials 0.000 abstract 2
- 229910052906 cristobalite Inorganic materials 0.000 abstract 2
- 239000000377 silicon dioxide Substances 0.000 abstract 2
- 229910052682 stishovite Inorganic materials 0.000 abstract 2
- 229910052905 tridymite Inorganic materials 0.000 abstract 2
- 229910013637 LiNbO2 Inorganic materials 0.000 abstract 1
- 229910052581 Si3N4 Inorganic materials 0.000 abstract 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 abstract 1
- 230000015572 biosynthetic process Effects 0.000 abstract 1
- 229910052593 corundum Inorganic materials 0.000 abstract 1
- 230000008020 evaporation Effects 0.000 abstract 1
- 238000001704 evaporation Methods 0.000 abstract 1
- 239000012212 insulator Substances 0.000 abstract 1
- 238000003475 lamination Methods 0.000 abstract 1
- 238000005086 pumping Methods 0.000 abstract 1
- 238000004544 sputter deposition Methods 0.000 abstract 1
- 230000006641 stabilisation Effects 0.000 abstract 1
- 238000011105 stabilization Methods 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
- 229910001845 yogo sapphire Inorganic materials 0.000 abstract 1
Landscapes
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14528978A JPS5572090A (en) | 1978-11-27 | 1978-11-27 | Elastic surface wave element |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14528978A JPS5572090A (en) | 1978-11-27 | 1978-11-27 | Elastic surface wave element |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5572090A true JPS5572090A (en) | 1980-05-30 |
JPS5742985B2 JPS5742985B2 (ja) | 1982-09-11 |
Family
ID=15381688
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14528978A Granted JPS5572090A (en) | 1978-11-27 | 1978-11-27 | Elastic surface wave element |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5572090A (ja) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5236677A (en) * | 1975-06-02 | 1977-03-22 | Ciba Geigy Ag | Diazine derivatives and preparation method thereof and preventive medicine for coccidae cotaining compound thereof and prevention method for coccidae |
-
1978
- 1978-11-27 JP JP14528978A patent/JPS5572090A/ja active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5236677A (en) * | 1975-06-02 | 1977-03-22 | Ciba Geigy Ag | Diazine derivatives and preparation method thereof and preventive medicine for coccidae cotaining compound thereof and prevention method for coccidae |
Also Published As
Publication number | Publication date |
---|---|
JPS5742985B2 (ja) | 1982-09-11 |
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