JPS5569816A - Flow controller - Google Patents
Flow controllerInfo
- Publication number
- JPS5569816A JPS5569816A JP14463478A JP14463478A JPS5569816A JP S5569816 A JPS5569816 A JP S5569816A JP 14463478 A JP14463478 A JP 14463478A JP 14463478 A JP14463478 A JP 14463478A JP S5569816 A JPS5569816 A JP S5569816A
- Authority
- JP
- Japan
- Prior art keywords
- vapor
- flow rate
- control valve
- flow
- detector
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Flow Control (AREA)
Abstract
PURPOSE: To simplify the flow control of a low-pressure gas supply by preventing vapor from being liquidized by decompressing a part, following the secondary side of a regulator valve provided a flow controller, lower than vapor pressure of carbon tetrachloride at the normal temprature.
CONSTITUTION: Flow controller 14 is provided with thermal mass type flow rate detector 1 detecting the flow rate of gas or vapor and flow control valve 2 regulating the flow rate of magnetic gas or vapor and between detector 1 and control valve 2, setter 3 and operation board 4 are provided; and control valve 2 is operated on the basis of the flow rate detected by detector 1 to control the flow rate of gas or vapor. Control valve 2 of this controller 14 is arranged on the inflow side of carbon tetrachloride 11 contained in carbon-tetrachloride container 12 and detector 1 is coupled with pressure reducing container 13 for vapor of carbon tetrachloride; and the part following the secondary side of control valve 2 is decompressed lower than vapor pressure of carbon tetrachloride at the normal temperature to prevent vapor from being liquidized, thereby simplifying flow control.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14463478A JPS5569816A (en) | 1978-11-21 | 1978-11-21 | Flow controller |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14463478A JPS5569816A (en) | 1978-11-21 | 1978-11-21 | Flow controller |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5569816A true JPS5569816A (en) | 1980-05-26 |
Family
ID=15366607
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14463478A Pending JPS5569816A (en) | 1978-11-21 | 1978-11-21 | Flow controller |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5569816A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS573109A (en) * | 1980-06-06 | 1982-01-08 | Suido Kiko Kk | Flow rate control device |
| JPS57187715A (en) * | 1981-05-13 | 1982-11-18 | Toshiba Corp | Control system for constant flow rate of gate valve |
| JPS60213846A (en) * | 1984-03-19 | 1985-10-26 | ホリバ インスツルメンツ インコーポレーテツド | Measuring device for content of discharged substance form internal combustion engine |
-
1978
- 1978-11-21 JP JP14463478A patent/JPS5569816A/en active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS573109A (en) * | 1980-06-06 | 1982-01-08 | Suido Kiko Kk | Flow rate control device |
| JPS6336003B2 (en) * | 1980-06-06 | 1988-07-18 | Suido Kiko Kk | |
| JPS57187715A (en) * | 1981-05-13 | 1982-11-18 | Toshiba Corp | Control system for constant flow rate of gate valve |
| JPH0337203B2 (en) * | 1981-05-13 | 1991-06-04 | Tokyo Shibaura Electric Co | |
| JPS60213846A (en) * | 1984-03-19 | 1985-10-26 | ホリバ インスツルメンツ インコーポレーテツド | Measuring device for content of discharged substance form internal combustion engine |
| JPH0810180B2 (en) * | 1984-03-19 | 1996-01-31 | ホリバ インスツルメンツ インコーポレーテッド | Device for measuring fine particle content of exhaust gas of internal combustion engine |
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