JPS556861A - Semiconductor integrated circuit device - Google Patents
Semiconductor integrated circuit deviceInfo
- Publication number
- JPS556861A JPS556861A JP7933378A JP7933378A JPS556861A JP S556861 A JPS556861 A JP S556861A JP 7933378 A JP7933378 A JP 7933378A JP 7933378 A JP7933378 A JP 7933378A JP S556861 A JPS556861 A JP S556861A
- Authority
- JP
- Japan
- Prior art keywords
- wiring
- gate electrode
- integrated circuit
- semiconductor integrated
- circuit device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Abstract
PURPOSE: To highly compact this device, by forming a selective oxide film of polycrystal mounted on the winding of the first region containing a gate electrode in an over-coat oxide film of the winding of the first region.
CONSTITUTION: Field oxide films 2 and gate electrode wiring 4 are made up on a P type silicon single-crystal substrate 1. Doped polycrystal silicon 5, oxide films 7 and Al wiring 9 are built up. The polycrystal silicon 5 is put to a connecting portion between the gate electrode wiring 4 and the Al wiring 9. In this case, contact force is formed in self-alignment structure to the wiring of the polycrystal silicon 5, and consequently this device can be compacted.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7933378A JPS556861A (en) | 1978-06-29 | 1978-06-29 | Semiconductor integrated circuit device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7933378A JPS556861A (en) | 1978-06-29 | 1978-06-29 | Semiconductor integrated circuit device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS556861A true JPS556861A (en) | 1980-01-18 |
Family
ID=13686958
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7933378A Pending JPS556861A (en) | 1978-06-29 | 1978-06-29 | Semiconductor integrated circuit device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS556861A (en) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5314580A (en) * | 1976-07-26 | 1978-02-09 | Hitachi Ltd | Production of semiconductor device |
-
1978
- 1978-06-29 JP JP7933378A patent/JPS556861A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5314580A (en) * | 1976-07-26 | 1978-02-09 | Hitachi Ltd | Production of semiconductor device |
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