JPS5562646A - Manufacturing method of thermal decomposition graphite grid - Google Patents

Manufacturing method of thermal decomposition graphite grid

Info

Publication number
JPS5562646A
JPS5562646A JP13657678A JP13657678A JPS5562646A JP S5562646 A JPS5562646 A JP S5562646A JP 13657678 A JP13657678 A JP 13657678A JP 13657678 A JP13657678 A JP 13657678A JP S5562646 A JPS5562646 A JP S5562646A
Authority
JP
Japan
Prior art keywords
grid
plating
mask
processed
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13657678A
Other languages
Japanese (ja)
Inventor
Tetsuo Tsuji
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP13657678A priority Critical patent/JPS5562646A/en
Publication of JPS5562646A publication Critical patent/JPS5562646A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To obtain a grid which is extremely excellent in the dimensional precision after it is processed by setting up plating film on the surface of material, etching this film, forming a grid mask, injection-processing it through this mask using abrasive material, and making the mask adhere to processed material.
CONSTITUTION: The grid material 1 consists of a cylindrical thermal decomposition graphite shell with its bottom. The grid effective section is cut in outside and inside diameters and is processed in proper dimensions. Copper plating 3 which is easy to be plated on graphite is applied to the gride effective section of this material 1 as the first coat and the thicker plating of nickel or chrome plating 4 is applied on it to form the multilayer plating film 2. Sensitized agent is coated on the plating film 2 to form the grid pattern. By removing the plating layer 2 except for the resist pattern in nitric acid solution by corrosion or electropolishing, the plating layer of the grid pattern is left. As a result, the grid mask which adheres to the material 1 can be formed.
COPYRIGHT: (C)1980,JPO&Japio
JP13657678A 1978-11-06 1978-11-06 Manufacturing method of thermal decomposition graphite grid Pending JPS5562646A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13657678A JPS5562646A (en) 1978-11-06 1978-11-06 Manufacturing method of thermal decomposition graphite grid

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13657678A JPS5562646A (en) 1978-11-06 1978-11-06 Manufacturing method of thermal decomposition graphite grid

Publications (1)

Publication Number Publication Date
JPS5562646A true JPS5562646A (en) 1980-05-12

Family

ID=15178493

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13657678A Pending JPS5562646A (en) 1978-11-06 1978-11-06 Manufacturing method of thermal decomposition graphite grid

Country Status (1)

Country Link
JP (1) JPS5562646A (en)

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