JPS5543818A - Photo-resist mask manufacturing method - Google Patents
Photo-resist mask manufacturing methodInfo
- Publication number
- JPS5543818A JPS5543818A JP11591178A JP11591178A JPS5543818A JP S5543818 A JPS5543818 A JP S5543818A JP 11591178 A JP11591178 A JP 11591178A JP 11591178 A JP11591178 A JP 11591178A JP S5543818 A JPS5543818 A JP S5543818A
- Authority
- JP
- Japan
- Prior art keywords
- copper plate
- mask pattern
- photo
- mask
- resist mask
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To enable a mask to prolong its service life by plating a metal in a mask pattern and using thus plated film as a mask pattern.
CONSTITUTION: A mask pattern 8 is printed on a copper plate 7, and after an exfoliating agent is coated, electroplating is conducted with the copper plate 7 as an electrode, so that metal contained on a plating liquid is plated into the mask pattern 8 printed on the copper plate 7. And then, the copper plate 7 is taken out, and a plated film 9 is exfoliated form the copper plate and attached onto a glass plate with an adhesive, so that a mask for photo-resist is produced.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11591178A JPS5543818A (en) | 1978-09-22 | 1978-09-22 | Photo-resist mask manufacturing method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11591178A JPS5543818A (en) | 1978-09-22 | 1978-09-22 | Photo-resist mask manufacturing method |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5543818A true JPS5543818A (en) | 1980-03-27 |
Family
ID=14674254
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11591178A Pending JPS5543818A (en) | 1978-09-22 | 1978-09-22 | Photo-resist mask manufacturing method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5543818A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62199132U (en) * | 1986-06-06 | 1987-12-18 |
-
1978
- 1978-09-22 JP JP11591178A patent/JPS5543818A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62199132U (en) * | 1986-06-06 | 1987-12-18 |
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