JPS5546577A - Method of fabricating semicondcutor device - Google Patents
Method of fabricating semicondcutor deviceInfo
- Publication number
- JPS5546577A JPS5546577A JP12076678A JP12076678A JPS5546577A JP S5546577 A JPS5546577 A JP S5546577A JP 12076678 A JP12076678 A JP 12076678A JP 12076678 A JP12076678 A JP 12076678A JP S5546577 A JPS5546577 A JP S5546577A
- Authority
- JP
- Japan
- Prior art keywords
- film
- region
- sio
- coated
- coating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 8
- 229910052681 coesite Inorganic materials 0.000 abstract 4
- 229910052906 cristobalite Inorganic materials 0.000 abstract 4
- 239000000463 material Substances 0.000 abstract 4
- 239000000377 silicon dioxide Substances 0.000 abstract 4
- 229910052682 stishovite Inorganic materials 0.000 abstract 4
- 229910052905 tridymite Inorganic materials 0.000 abstract 4
- 230000000903 blocking effect Effects 0.000 abstract 3
- 239000011248 coating agent Substances 0.000 abstract 3
- 238000000576 coating method Methods 0.000 abstract 3
- 239000004065 semiconductor Substances 0.000 abstract 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 abstract 2
- 229910052782 aluminium Inorganic materials 0.000 abstract 2
- 229910052710 silicon Inorganic materials 0.000 abstract 2
- 239000010703 silicon Substances 0.000 abstract 2
- 239000000758 substrate Substances 0.000 abstract 2
- 239000012535 impurity Substances 0.000 abstract 1
Landscapes
- Local Oxidation Of Silicon (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12076678A JPS5546577A (en) | 1978-09-30 | 1978-09-30 | Method of fabricating semicondcutor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12076678A JPS5546577A (en) | 1978-09-30 | 1978-09-30 | Method of fabricating semicondcutor device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5546577A true JPS5546577A (en) | 1980-04-01 |
| JPS617741B2 JPS617741B2 (enrdf_load_stackoverflow) | 1986-03-08 |
Family
ID=14794463
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12076678A Granted JPS5546577A (en) | 1978-09-30 | 1978-09-30 | Method of fabricating semicondcutor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5546577A (enrdf_load_stackoverflow) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62162527U (enrdf_load_stackoverflow) * | 1986-04-04 | 1987-10-15 | ||
| JPH0313041U (enrdf_load_stackoverflow) * | 1989-06-26 | 1991-02-08 |
-
1978
- 1978-09-30 JP JP12076678A patent/JPS5546577A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS617741B2 (enrdf_load_stackoverflow) | 1986-03-08 |
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