JPS5543219A - Cryopump - Google Patents

Cryopump

Info

Publication number
JPS5543219A
JPS5543219A JP11477078A JP11477078A JPS5543219A JP S5543219 A JPS5543219 A JP S5543219A JP 11477078 A JP11477078 A JP 11477078A JP 11477078 A JP11477078 A JP 11477078A JP S5543219 A JPS5543219 A JP S5543219A
Authority
JP
Japan
Prior art keywords
cryogenic fluid
fins
pipeline
fluid pipeline
cooling
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11477078A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6124551B2 (enrdf_load_stackoverflow
Inventor
Hitoshi Sugimoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Aisin Corp
Original Assignee
Aisin Seiki Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Aisin Seiki Co Ltd filed Critical Aisin Seiki Co Ltd
Priority to JP11477078A priority Critical patent/JPS5543219A/ja
Publication of JPS5543219A publication Critical patent/JPS5543219A/ja
Publication of JPS6124551B2 publication Critical patent/JPS6124551B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP11477078A 1978-09-18 1978-09-18 Cryopump Granted JPS5543219A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11477078A JPS5543219A (en) 1978-09-18 1978-09-18 Cryopump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11477078A JPS5543219A (en) 1978-09-18 1978-09-18 Cryopump

Publications (2)

Publication Number Publication Date
JPS5543219A true JPS5543219A (en) 1980-03-27
JPS6124551B2 JPS6124551B2 (enrdf_load_stackoverflow) 1986-06-11

Family

ID=14646245

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11477078A Granted JPS5543219A (en) 1978-09-18 1978-09-18 Cryopump

Country Status (1)

Country Link
JP (1) JPS5543219A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57119186A (en) * 1981-01-14 1982-07-24 Japan Atom Energy Res Inst Cryo pump
US4484869A (en) * 1981-04-24 1984-11-27 Kabushiki Kaisha Toyoda Jidoshokki Seisakusho Volumetric fluid compressor

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57119186A (en) * 1981-01-14 1982-07-24 Japan Atom Energy Res Inst Cryo pump
US4484869A (en) * 1981-04-24 1984-11-27 Kabushiki Kaisha Toyoda Jidoshokki Seisakusho Volumetric fluid compressor

Also Published As

Publication number Publication date
JPS6124551B2 (enrdf_load_stackoverflow) 1986-06-11

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