JPS5538002A - Dicing line monitoring device - Google Patents

Dicing line monitoring device

Info

Publication number
JPS5538002A
JPS5538002A JP10962078A JP10962078A JPS5538002A JP S5538002 A JPS5538002 A JP S5538002A JP 10962078 A JP10962078 A JP 10962078A JP 10962078 A JP10962078 A JP 10962078A JP S5538002 A JPS5538002 A JP S5538002A
Authority
JP
Japan
Prior art keywords
line
dicing
light
dicing line
image
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10962078A
Other languages
English (en)
Japanese (ja)
Other versions
JPS617020B2 (enrdf_load_stackoverflow
Inventor
Yukio Kenbo
Tomohiro Kuji
Hiroshi Makihira
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP10962078A priority Critical patent/JPS5538002A/ja
Publication of JPS5538002A publication Critical patent/JPS5538002A/ja
Publication of JPS617020B2 publication Critical patent/JPS617020B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Processing Of Stones Or Stones Resemblance Materials (AREA)
  • Dicing (AREA)
JP10962078A 1978-09-08 1978-09-08 Dicing line monitoring device Granted JPS5538002A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10962078A JPS5538002A (en) 1978-09-08 1978-09-08 Dicing line monitoring device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10962078A JPS5538002A (en) 1978-09-08 1978-09-08 Dicing line monitoring device

Publications (2)

Publication Number Publication Date
JPS5538002A true JPS5538002A (en) 1980-03-17
JPS617020B2 JPS617020B2 (enrdf_load_stackoverflow) 1986-03-03

Family

ID=14514899

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10962078A Granted JPS5538002A (en) 1978-09-08 1978-09-08 Dicing line monitoring device

Country Status (1)

Country Link
JP (1) JPS5538002A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01209104A (ja) * 1988-02-17 1989-08-22 Disco Abrasive Syst Ltd 加工装置
JP2011222846A (ja) * 2010-04-13 2011-11-04 Tokyo Seimitsu Co Ltd ダイシング装置による検査方法

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0371607U (enrdf_load_stackoverflow) * 1989-11-15 1991-07-19
CN103522434A (zh) * 2013-10-30 2014-01-22 华进半导体封装先导技术研发中心有限公司 基于红外技术的晶圆切割在线检测系统

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01209104A (ja) * 1988-02-17 1989-08-22 Disco Abrasive Syst Ltd 加工装置
JP2011222846A (ja) * 2010-04-13 2011-11-04 Tokyo Seimitsu Co Ltd ダイシング装置による検査方法

Also Published As

Publication number Publication date
JPS617020B2 (enrdf_load_stackoverflow) 1986-03-03

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