JPS5528061B2 - - Google Patents
Info
- Publication number
- JPS5528061B2 JPS5528061B2 JP11439075A JP11439075A JPS5528061B2 JP S5528061 B2 JPS5528061 B2 JP S5528061B2 JP 11439075 A JP11439075 A JP 11439075A JP 11439075 A JP11439075 A JP 11439075A JP S5528061 B2 JPS5528061 B2 JP S5528061B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/42—Stripping or agents therefor
- G03F7/422—Stripping or agents therefor using liquids only
- G03F7/423—Stripping or agents therefor using liquids only containing mineral acids or salts thereof, containing mineral oxidizing substances, e.g. peroxy compounds
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
- Manufacturing Of Printed Circuit Boards (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE2447225A DE2447225C2 (de) | 1974-10-03 | 1974-10-03 | Verfahren zum Ablösen von positiven Photolack |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5159502A JPS5159502A (en) | 1976-05-24 |
| JPS5528061B2 true JPS5528061B2 (US07935154-20110503-C00006.png) | 1980-07-25 |
Family
ID=5927447
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP50114390A Granted JPS5159502A (en) | 1974-10-03 | 1975-09-23 | Hojiteibu fuotorejisutosooyokaisuruhoho |
Country Status (7)
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6056586B2 (ja) * | 1983-04-05 | 1985-12-11 | 本田技研工業株式会社 | 溶湯鍛造装置 |
| JPH06556U (ja) * | 1992-06-18 | 1994-01-11 | 日立金属株式会社 | 加圧鋳造機のプランジャーチップ |
Families Citing this family (30)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2808928A1 (de) * | 1978-03-02 | 1979-09-06 | Hoechst Ag | Korrekturmittel fuer lichtgehaertete kopierschichten |
| US4263387A (en) * | 1978-03-16 | 1981-04-21 | Coulter Systems Corporation | Lithographic printing plate and process for making same |
| JPS5569265A (en) * | 1978-11-15 | 1980-05-24 | Hitachi Ltd | Pattern-forming method |
| US4383026A (en) * | 1979-05-31 | 1983-05-10 | Bell Telephone Laboratories, Incorporated | Accelerated particle lithographic processing and articles so produced |
| US4409319A (en) * | 1981-07-15 | 1983-10-11 | International Business Machines Corporation | Electron beam exposed positive resist mask process |
| US4439516A (en) * | 1982-03-15 | 1984-03-27 | Shipley Company Inc. | High temperature positive diazo photoresist processing using polyvinyl phenol |
| US4427713A (en) | 1983-01-17 | 1984-01-24 | Rca Corporation | Planarization technique |
| JPS60114575A (ja) * | 1983-11-28 | 1985-06-21 | Tokyo Ohka Kogyo Co Ltd | 乾式パタ−ン形成方法 |
| JPS60115222A (ja) * | 1983-11-28 | 1985-06-21 | Tokyo Ohka Kogyo Co Ltd | 微細パタ−ン形成方法 |
| US4885232A (en) * | 1985-03-11 | 1989-12-05 | Hoechst Celanese Corporation | High temperature post exposure baking treatment for positive photoresist compositions |
| CA1308596C (en) * | 1986-01-13 | 1992-10-13 | Rohm And Haas Company | Microplastic structures and method of manufacture |
| US4707426A (en) * | 1986-02-04 | 1987-11-17 | Sony Corporation | Radiation exposure method of manufacturing a color cathode ray tube having light absorptive areas |
| US5507978A (en) * | 1995-05-08 | 1996-04-16 | Ocg Microelectronic Materials, Inc. | Novolak containing photoresist stripper composition |
| US5561105A (en) * | 1995-05-08 | 1996-10-01 | Ocg Microelectronic Materials, Inc. | Chelating reagent containing photoresist stripper composition |
| US6030932A (en) * | 1996-09-06 | 2000-02-29 | Olin Microelectronic Chemicals | Cleaning composition and method for removing residues |
| US5817610A (en) * | 1996-09-06 | 1998-10-06 | Olin Microelectronic Chemicals, Inc. | Non-corrosive cleaning composition for removing plasma etching residues |
| US5780406A (en) * | 1996-09-06 | 1998-07-14 | Honda; Kenji | Non-corrosive cleaning composition for removing plasma etching residues |
| US5759973A (en) * | 1996-09-06 | 1998-06-02 | Olin Microelectronic Chemicals, Inc. | Photoresist stripping and cleaning compositions |
| US6413923B2 (en) | 1999-11-15 | 2002-07-02 | Arch Specialty Chemicals, Inc. | Non-corrosive cleaning composition for removing plasma etching residues |
| TW439118B (en) * | 2000-02-10 | 2001-06-07 | Winbond Electronics Corp | Multilayer thin photoresist process |
| US6955485B2 (en) * | 2002-03-01 | 2005-10-18 | Tokyo Electron Limited | Developing method and developing unit |
| US7446051B2 (en) * | 2003-09-09 | 2008-11-04 | Csg Solar Ag | Method of etching silicon |
| EP1665394A4 (en) * | 2003-09-09 | 2006-12-13 | Csg Solar Ag | REFLECTING MASK SETTING |
| US7585781B2 (en) * | 2003-09-09 | 2009-09-08 | Csg Solar Ag | Method of forming openings in an organic resin material |
| US7867696B2 (en) * | 2004-04-15 | 2011-01-11 | The Boeing Company | Method and apparatus for monitoring saturation levels of solvents used during rapid prototyping processes |
| NL2004888A (en) * | 2009-06-29 | 2010-12-30 | Asml Netherlands Bv | Deposition method and apparatus. |
| JP2013511844A (ja) * | 2009-11-18 | 2013-04-04 | スリーエム イノベイティブ プロパティズ カンパニー | Ｉｉ〜ｖｉ半導体のための新規なウェットエッチング剤及び方法 |
| CN105555046B (zh) * | 2015-12-31 | 2019-06-25 | 湖北碧辰科技股份有限公司 | 一种双面pcb板的生产工艺 |
| CN105578784A (zh) * | 2015-12-31 | 2016-05-11 | 东莞市优森电子有限公司 | 一种单面pcb板的生产工艺 |
| DE112020002762T5 (de) * | 2019-05-31 | 2022-02-17 | Ams Sensors Singapore Pte. Ltd. | Verfahren zur herstellung eines master für einen vervielfältigungsprozess |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4914684A (US07935154-20110503-C00006.png) * | 1972-06-02 | 1974-02-08 | ||
| JPS4914682A (US07935154-20110503-C00006.png) * | 1972-06-05 | 1974-02-08 |
Family Cites Families (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CA572560A (en) * | 1959-03-17 | Western Electric Company, Incorporated | Etching silicon semiconductors | |
| DE551057C (de) * | 1930-09-30 | 1932-05-26 | Kodak Akt Ges | Photographisches Umkehrverfahren |
| BE510563A (US07935154-20110503-C00006.png) * | 1949-07-23 | |||
| DE1146755B (de) * | 1959-08-17 | 1963-04-04 | Friedr Schoembs K G | Verfahren zum Entschichten von Kopierschichten aus Polyvinylalkohol auf Druckplatten und Siebdrucknetzen |
| NL121233C (US07935154-20110503-C00006.png) * | 1959-09-01 | |||
| DE1224147B (de) * | 1963-08-23 | 1966-09-01 | Kalle Ag | Verfahren zur Umkehrentwicklung von Diazo-verbindungen enthaltenden Kopierschichten |
| US3639185A (en) * | 1969-06-30 | 1972-02-01 | Ibm | Novel etchant and process for etching thin metal films |
| BE755441A (fr) * | 1969-08-28 | 1971-03-01 | Du Pont | Solutions de finissage pour plaques lithographiques |
| US3759711A (en) * | 1970-09-16 | 1973-09-18 | Eastman Kodak Co | Er compositions and elements nitrogen linked apperding quinone diazide light sensitive vinyl polym |
| FR2120365A5 (en) * | 1970-12-30 | 1972-08-18 | Applic Chim Phys Tech | Elimination of pva photosensitive layers - using permanganate and thiourea acid soln |
| BE789196A (fr) * | 1971-09-25 | 1973-03-22 | Kalle Ag | Matiere a copier photosensible |
| US3814641A (en) * | 1972-07-20 | 1974-06-04 | Instr Inc | Process of fabricating silicon photomask |
| US3930857A (en) * | 1973-05-03 | 1976-01-06 | International Business Machines Corporation | Resist process |
| US3871929A (en) * | 1974-01-30 | 1975-03-18 | Allied Chem | Polymeric etch resist strippers and method of using same |
-
1974
- 1974-10-03 DE DE2447225A patent/DE2447225C2/de not_active Expired
-
1975
- 1975-08-19 FR FR7526333A patent/FR2287060A1/fr active Granted
- 1975-08-22 US US05/607,000 patent/US4015986A/en not_active Expired - Lifetime
- 1975-08-27 IT IT26596/75A patent/IT1041938B/it active
- 1975-09-05 GB GB36718/75A patent/GB1481935A/en not_active Expired
- 1975-09-23 JP JP50114390A patent/JPS5159502A/ja active Granted
- 1975-10-02 CA CA236,873A patent/CA1067332A/en not_active Expired
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4914684A (US07935154-20110503-C00006.png) * | 1972-06-02 | 1974-02-08 | ||
| JPS4914682A (US07935154-20110503-C00006.png) * | 1972-06-05 | 1974-02-08 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6056586B2 (ja) * | 1983-04-05 | 1985-12-11 | 本田技研工業株式会社 | 溶湯鍛造装置 |
| JPH06556U (ja) * | 1992-06-18 | 1994-01-11 | 日立金属株式会社 | 加圧鋳造機のプランジャーチップ |
Also Published As
| Publication number | Publication date |
|---|---|
| IT1041938B (it) | 1980-01-10 |
| FR2287060B1 (US07935154-20110503-C00006.png) | 1978-04-07 |
| DE2447225A1 (de) | 1976-04-08 |
| FR2287060A1 (fr) | 1976-04-30 |
| US4015986A (en) | 1977-04-05 |
| GB1481935A (en) | 1977-08-03 |
| JPS5159502A (en) | 1976-05-24 |
| DE2447225C2 (de) | 1983-12-22 |
| CA1067332A (en) | 1979-12-04 |
