JPS5526613B2 - - Google Patents
Info
- Publication number
- JPS5526613B2 JPS5526613B2 JP14759375A JP14759375A JPS5526613B2 JP S5526613 B2 JPS5526613 B2 JP S5526613B2 JP 14759375 A JP14759375 A JP 14759375A JP 14759375 A JP14759375 A JP 14759375A JP S5526613 B2 JPS5526613 B2 JP S5526613B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14759375A JPS5271171A (en) | 1975-12-10 | 1975-12-10 | Production of epitaxial wafer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14759375A JPS5271171A (en) | 1975-12-10 | 1975-12-10 | Production of epitaxial wafer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5271171A JPS5271171A (en) | 1977-06-14 |
| JPS5526613B2 true JPS5526613B2 (it) | 1980-07-15 |
Family
ID=15433849
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14759375A Granted JPS5271171A (en) | 1975-12-10 | 1975-12-10 | Production of epitaxial wafer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5271171A (it) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5446270U (it) * | 1977-09-05 | 1979-03-30 | ||
| JPS55121649A (en) * | 1979-03-14 | 1980-09-18 | Pioneer Electronic Corp | Cvd device |
| JPS57203545U (it) * | 1981-06-19 | 1982-12-24 | ||
| JPS5890725A (ja) * | 1981-11-26 | 1983-05-30 | Fujitsu Ltd | 気相成長装置用基板ホルダ− |
| JPS60116229U (ja) * | 1984-01-10 | 1985-08-06 | 日本電気株式会社 | 半導体ウエ−ハの発熱担体 |
| JP3565469B2 (ja) * | 1997-02-10 | 2004-09-15 | 東芝セラミックス株式会社 | 気相成長用のサセプタ |
| JP5970841B2 (ja) * | 2012-02-14 | 2016-08-17 | 三菱電機株式会社 | ウエハホルダ、成膜装置 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4945681A (it) * | 1972-07-01 | 1974-05-01 | ||
| JPS5096182A (it) * | 1973-12-24 | 1975-07-31 |
-
1975
- 1975-12-10 JP JP14759375A patent/JPS5271171A/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4945681A (it) * | 1972-07-01 | 1974-05-01 | ||
| JPS5096182A (it) * | 1973-12-24 | 1975-07-31 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5271171A (en) | 1977-06-14 |