JPS5524985A - Equipment for producing microparticle film - Google Patents

Equipment for producing microparticle film

Info

Publication number
JPS5524985A
JPS5524985A JP9922478A JP9922478A JPS5524985A JP S5524985 A JPS5524985 A JP S5524985A JP 9922478 A JP9922478 A JP 9922478A JP 9922478 A JP9922478 A JP 9922478A JP S5524985 A JPS5524985 A JP S5524985A
Authority
JP
Japan
Prior art keywords
boat
gas
barrier
substrate
microparticles
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9922478A
Other languages
Japanese (ja)
Inventor
Atsushi Abe
Kuni Ogawa
Masahiro Nishikawa
Shigeru Hayakawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP9922478A priority Critical patent/JPS5524985A/en
Publication of JPS5524985A publication Critical patent/JPS5524985A/en
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation

Abstract

PURPOSE:To provide uniform microparticle film on a substrate in vacuum deposition, the substrate is located beneath a microparticle evaporator, and barriers are located above the evaporator so that convection of microparticles and gas is made uniform with respect to the substrate. CONSTITUTION:The vacuum container 11 is provided with boat 12 containing evaporating material 17 such as Sn, below which substrates 13, 14 to be deposited with film are located. The first barrier 15 is located above the boat 12, and the second barrier 16 between the boat 12 and the substatrates 13, 14. The vacuum container 11 is evacuated through the outlet 19 and Ar gas etc. is introduced through the gas inlet 18. Then, current is fed to the boat 12 to evaporate material 17. Evaporated atoms and argon gas collide to form microparticles and deposit on the surface of the substrates. Preferably, the barrier 15 is heated to direct microparticles and gas flow downward regardless of boat strucuture and operation temperature.
JP9922478A 1978-08-14 1978-08-14 Equipment for producing microparticle film Pending JPS5524985A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9922478A JPS5524985A (en) 1978-08-14 1978-08-14 Equipment for producing microparticle film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9922478A JPS5524985A (en) 1978-08-14 1978-08-14 Equipment for producing microparticle film

Publications (1)

Publication Number Publication Date
JPS5524985A true JPS5524985A (en) 1980-02-22

Family

ID=14241683

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9922478A Pending JPS5524985A (en) 1978-08-14 1978-08-14 Equipment for producing microparticle film

Country Status (1)

Country Link
JP (1) JPS5524985A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58188540A (en) * 1982-04-30 1983-11-04 Aisin Chem Co Ltd Resin coated sand grain

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5120083A (en) * 1974-08-12 1976-02-17 Nippon Electric Co SHINKUJOCHAKUHOHO
JPS5110350B1 (en) * 1970-09-04 1976-04-03
JPS51107286A (en) * 1975-03-18 1976-09-22 Mitsubishi Electric Corp JOCHAKUSOCHI
JPS5262138A (en) * 1975-11-18 1977-05-23 Shimadzu Corp Vacuum deposition process

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5110350B1 (en) * 1970-09-04 1976-04-03
JPS5120083A (en) * 1974-08-12 1976-02-17 Nippon Electric Co SHINKUJOCHAKUHOHO
JPS51107286A (en) * 1975-03-18 1976-09-22 Mitsubishi Electric Corp JOCHAKUSOCHI
JPS5262138A (en) * 1975-11-18 1977-05-23 Shimadzu Corp Vacuum deposition process

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58188540A (en) * 1982-04-30 1983-11-04 Aisin Chem Co Ltd Resin coated sand grain
JPH0123222B2 (en) * 1982-04-30 1989-05-01 Aishin Kako Kk

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