JPS5520747Y2 - - Google Patents

Info

Publication number
JPS5520747Y2
JPS5520747Y2 JP1975075200U JP7520075U JPS5520747Y2 JP S5520747 Y2 JPS5520747 Y2 JP S5520747Y2 JP 1975075200 U JP1975075200 U JP 1975075200U JP 7520075 U JP7520075 U JP 7520075U JP S5520747 Y2 JPS5520747 Y2 JP S5520747Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1975075200U
Other languages
Japanese (ja)
Other versions
JPS5149723U (enrdf_load_html_response
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS5149723U publication Critical patent/JPS5149723U/ja
Application granted granted Critical
Publication of JPS5520747Y2 publication Critical patent/JPS5520747Y2/ja
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00—Electrodes
    • H01M4/86—Inert electrodes with catalytic activity, e.g. for fuel cells
    • H01M4/88—Processes of manufacture
    • H01M4/8825—Methods for deposition of the catalytic active composition
    • H01M4/8867—Vapour deposition
    • H01M4/8871—Sputtering
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/30—Hydrogen technology
    • Y02E60/50—Fuel cells

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Materials Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Electrochemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • ing And Chemical Polishing (AREA)
JP1975075200U 1970-07-10 1975-06-03 Expired JPS5520747Y2 (enrdf_load_html_response)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7026730A FR2098563A5 (enrdf_load_html_response) 1970-07-10 1970-07-10

Publications (2)

Publication Number Publication Date
JPS5149723U JPS5149723U (enrdf_load_html_response) 1976-04-15
JPS5520747Y2 true JPS5520747Y2 (enrdf_load_html_response) 1980-05-19

Family

ID=9058937

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1975075200U Expired JPS5520747Y2 (enrdf_load_html_response) 1970-07-10 1975-06-03

Country Status (13)

Country Link
US (1) US3779885A (enrdf_load_html_response)
JP (1) JPS5520747Y2 (enrdf_load_html_response)
AT (1) AT304220B (enrdf_load_html_response)
BE (1) BE769722A (enrdf_load_html_response)
CA (2) CA994708A (enrdf_load_html_response)
CH (1) CH538551A (enrdf_load_html_response)
DE (1) DE2134377C3 (enrdf_load_html_response)
ES (1) ES393087A1 (enrdf_load_html_response)
FR (1) FR2098563A5 (enrdf_load_html_response)
GB (1) GB1333617A (enrdf_load_html_response)
NL (1) NL7109534A (enrdf_load_html_response)
SE (1) SE366778B (enrdf_load_html_response)
SU (1) SU405215A3 (enrdf_load_html_response)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU5889880A (en) * 1979-07-02 1981-01-15 Olin Corporation Manufacture of low overvoltage electrodes by cathodic sputtering
DE3107914A1 (de) * 1981-03-02 1982-09-16 Leybold-Heraeus GmbH, 5000 Köln Verfahren und vorrichtung zum beschichten von formteilen durch katodenzerstaeubung
US4451344A (en) * 1982-03-26 1984-05-29 International Business Machines Corp. Method of making edge protected ferrite core
US4812217A (en) * 1987-04-27 1989-03-14 American Telephone And Telegraph Company, At&T Bell Laboratories Method and apparatus for feeding and coating articles in a controlled atmosphere
US5279724A (en) * 1991-12-26 1994-01-18 Xerox Corporation Dual sputtering source
US5322606A (en) * 1991-12-26 1994-06-21 Xerox Corporation Use of rotary solenoid as a shutter actuator on a rotating arm
EP0647352A1 (en) 1992-06-26 1995-04-12 Materials Research Corporation Transport system for wafer processing line
KR20230008774A (ko) * 2020-06-23 2023-01-16 미쿠니 일렉트론 코포레이션 유도결합플라즈마에 의해 스퍼터링 성막을 수행하는 성막장치

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1758531A (en) * 1926-10-22 1930-05-13 Elektrodenzerstaubung M B H Ge Vacuum dispersion coating process
US3294670A (en) * 1963-10-07 1966-12-27 Western Electric Co Apparatus for processing materials in a controlled atmosphere
LU45647A1 (enrdf_load_html_response) * 1964-03-12 1965-09-13
LU52106A1 (enrdf_load_html_response) * 1966-10-05 1968-05-07
US3594301A (en) * 1968-11-22 1971-07-20 Gen Electric Sputter coating apparatus

Also Published As

Publication number Publication date
ES393087A1 (es) 1973-10-01
US3779885A (en) 1973-12-18
CA981622A (en) 1976-01-13
GB1333617A (en) 1973-10-10
SE366778B (enrdf_load_html_response) 1974-05-06
JPS5149723U (enrdf_load_html_response) 1976-04-15
CH538551A (fr) 1973-06-30
FR2098563A5 (enrdf_load_html_response) 1972-03-10
AT304220B (de) 1972-12-27
SU405215A3 (enrdf_load_html_response) 1973-10-22
CA994708A (fr) 1976-08-10
BE769722A (fr) 1971-11-16
DE2134377B2 (de) 1974-04-25
NL7109534A (enrdf_load_html_response) 1972-01-12
DE2134377A1 (de) 1972-01-13
DE2134377C3 (de) 1974-11-28

Similar Documents

Publication Publication Date Title
FR2098563A5 (enrdf_load_html_response)
AU2044470A (enrdf_load_html_response)
AU1473870A (enrdf_load_html_response)
AU1336970A (enrdf_load_html_response)
AU1716970A (enrdf_load_html_response)
AU1833270A (enrdf_load_html_response)
AU1517670A (enrdf_load_html_response)
AU2130570A (enrdf_load_html_response)
AU1326870A (enrdf_load_html_response)
AU2085370A (enrdf_load_html_response)
AU2017870A (enrdf_load_html_response)
AU1832970A (enrdf_load_html_response)
AU1881070A (enrdf_load_html_response)
AU1328670A (enrdf_load_html_response)
AU1343870A (enrdf_load_html_response)
AU2144270A (enrdf_load_html_response)
AU2131570A (enrdf_load_html_response)
AU2130770A (enrdf_load_html_response)
AU1581370A (enrdf_load_html_response)
AU2119370A (enrdf_load_html_response)
AU2115870A (enrdf_load_html_response)
AU2112570A (enrdf_load_html_response)
AU1591370A (enrdf_load_html_response)
AU1603270A (enrdf_load_html_response)
AU1974970A (enrdf_load_html_response)