JPS5515868B2 - - Google Patents
Info
- Publication number
- JPS5515868B2 JPS5515868B2 JP8349376A JP8349376A JPS5515868B2 JP S5515868 B2 JPS5515868 B2 JP S5515868B2 JP 8349376 A JP8349376 A JP 8349376A JP 8349376 A JP8349376 A JP 8349376A JP S5515868 B2 JPS5515868 B2 JP S5515868B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
- H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
- H01L23/532—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body characterised by the materials
- H01L23/53204—Conductive materials
- H01L23/53271—Conductive materials containing semiconductor material, e.g. polysilicon
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/43—Electrodes ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/45—Ohmic electrodes
- H01L29/456—Ohmic electrodes on silicon
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S148/00—Metal treatment
- Y10S148/018—Compensation doping
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S148/00—Metal treatment
- Y10S148/02—Contacts, special
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S148/00—Metal treatment
- Y10S148/124—Polycrystalline emitter
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Ceramic Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Bipolar Transistors (AREA)
- Electrodes Of Semiconductors (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8349376A JPS539469A (en) | 1976-07-15 | 1976-07-15 | Semiconductor device having electrode of stepped structure and its production |
US05/814,552 US4188707A (en) | 1976-07-15 | 1977-07-11 | Semiconductor devices and method of manufacturing the same |
CA282,631A CA1085969A (en) | 1976-07-15 | 1977-07-13 | Semiconductor devices and method of manufacturing the same |
FR7721776A FR2358750A1 (fr) | 1976-07-15 | 1977-07-13 | Dispositifs semi-conducteurs comportant a leurs faces superieures une zone polycristalline et leur procede de fabrication |
GB29352/77A GB1567808A (en) | 1976-07-15 | 1977-07-13 | Semiconductor devices and method of manufacturing the same |
NLAANVRAGE7707919,A NL190255C (nl) | 1976-07-15 | 1977-07-15 | Werkwijze voor het vervaardigen van een halfgeleiderinrichting, omvattende een halfgeleiderlichaam met ten minste een uit het oppervlak van het halfgeleiderlichaam uitstekend elektrodelichaam van polykristallijn silicium. |
DE2732184A DE2732184C2 (de) | 1976-07-15 | 1977-07-15 | Verfahren zur Herstellung einer Halbleitervorrichtung |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8349376A JPS539469A (en) | 1976-07-15 | 1976-07-15 | Semiconductor device having electrode of stepped structure and its production |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS539469A JPS539469A (en) | 1978-01-27 |
JPS5515868B2 true JPS5515868B2 (ja) | 1980-04-26 |
Family
ID=13803997
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8349376A Granted JPS539469A (en) | 1976-07-15 | 1976-07-15 | Semiconductor device having electrode of stepped structure and its production |
Country Status (7)
Country | Link |
---|---|
US (1) | US4188707A (ja) |
JP (1) | JPS539469A (ja) |
CA (1) | CA1085969A (ja) |
DE (1) | DE2732184C2 (ja) |
FR (1) | FR2358750A1 (ja) |
GB (1) | GB1567808A (ja) |
NL (1) | NL190255C (ja) |
Families Citing this family (42)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4277883A (en) * | 1977-12-27 | 1981-07-14 | Raytheon Company | Integrated circuit manufacturing method |
NL190710C (nl) * | 1978-02-10 | 1994-07-01 | Nec Corp | Geintegreerde halfgeleiderketen. |
CA1129118A (en) * | 1978-07-19 | 1982-08-03 | Tetsushi Sakai | Semiconductor devices and method of manufacturing the same |
CA1136773A (en) * | 1978-08-14 | 1982-11-30 | Norikazu Ohuchi | Semiconductor device |
JPS5951743B2 (ja) * | 1978-11-08 | 1984-12-15 | 株式会社日立製作所 | 半導体集積装置 |
US4319932A (en) * | 1980-03-24 | 1982-03-16 | International Business Machines Corporation | Method of making high performance bipolar transistor with polysilicon base contacts |
US4259680A (en) * | 1980-04-17 | 1981-03-31 | Bell Telephone Laboratories, Incorporated | High speed lateral bipolar transistor |
US4411708A (en) * | 1980-08-25 | 1983-10-25 | Trw Inc. | Method of making precision doped polysilicon vertical ballast resistors by multiple implantations |
EP0054259B1 (en) * | 1980-12-12 | 1986-08-06 | Kabushiki Kaisha Toshiba | Method of manufacturing a semiconductor device of the mis type |
US4622735A (en) * | 1980-12-12 | 1986-11-18 | Tokyo Shibaura Denki Kabushiki Kaisha | Method for manufacturing a semiconductor device utilizing self-aligned silicide regions |
US4888297A (en) * | 1982-09-20 | 1989-12-19 | International Business Machines Corporation | Process for making a contact structure including polysilicon and metal alloys |
US4547959A (en) * | 1983-02-22 | 1985-10-22 | General Motors Corporation | Uses for buried contacts in integrated circuits |
US4738936A (en) * | 1983-07-01 | 1988-04-19 | Acrian, Inc. | Method of fabrication lateral FET structure having a substrate to source contact |
US5098854A (en) * | 1984-07-09 | 1992-03-24 | National Semiconductor Corporation | Process for forming self-aligned silicide base contact for bipolar transistor |
JPH0611053B2 (ja) * | 1984-12-20 | 1994-02-09 | 三菱電機株式会社 | 半導体装置の製造方法 |
US5227316A (en) * | 1985-01-22 | 1993-07-13 | National Semiconductor Corporation | Method of forming self aligned extended base contact for a bipolar transistor having reduced cell size |
GB2172744B (en) * | 1985-03-23 | 1989-07-19 | Stc Plc | Semiconductor devices |
GB8507624D0 (en) * | 1985-03-23 | 1985-05-01 | Standard Telephones Cables Ltd | Semiconductor devices |
DE3571366D1 (en) * | 1985-09-21 | 1989-08-10 | Itt Ind Gmbh Deutsche | Method of applying a contact to a contact area for a semiconductor substrate |
US4898838A (en) * | 1985-10-16 | 1990-02-06 | Texas Instruments Incorporated | Method for fabricating a poly emitter logic array |
US4755476A (en) * | 1985-12-17 | 1988-07-05 | Siemens Aktiengesellschaft | Process for the production of self-adjusted bipolar transistor structures having a reduced extrinsic base resistance |
GB2188479B (en) * | 1986-03-26 | 1990-05-23 | Stc Plc | Semiconductor devices |
US5063168A (en) * | 1986-07-02 | 1991-11-05 | National Semiconductor Corporation | Process for making bipolar transistor with polysilicon stringer base contact |
US4974046A (en) * | 1986-07-02 | 1990-11-27 | National Seimconductor Corporation | Bipolar transistor with polysilicon stringer base contact |
US4883772A (en) * | 1986-09-11 | 1989-11-28 | National Semiconductor Corporation | Process for making a self-aligned silicide shunt |
US5437940A (en) * | 1986-10-14 | 1995-08-01 | Westinghouse Electric Corporation | High power energy compression device |
US4933295A (en) * | 1987-05-08 | 1990-06-12 | Raytheon Company | Method of forming a bipolar transistor having closely spaced device regions |
US4803175A (en) * | 1987-09-14 | 1989-02-07 | Motorola Inc. | Method of fabricating a bipolar semiconductor device with silicide contacts |
JPH01123417A (ja) * | 1987-11-07 | 1989-05-16 | Mitsubishi Electric Corp | 半導体装置の製造方法 |
US5064773A (en) * | 1988-12-27 | 1991-11-12 | Raytheon Company | Method of forming bipolar transistor having closely spaced device regions |
US5066616A (en) * | 1989-06-14 | 1991-11-19 | Hewlett-Packard Company | Method for improving photoresist on wafers by applying fluid layer of liquid solvent |
US5089429A (en) * | 1989-06-22 | 1992-02-18 | David Sarnoff Research Center, Inc. | Self-aligned emitter bicmos process |
JPH0362568A (ja) * | 1989-07-31 | 1991-03-18 | Hitachi Ltd | 半導体装置の製造方法 |
US5226232A (en) * | 1990-05-18 | 1993-07-13 | Hewlett-Packard Company | Method for forming a conductive pattern on an integrated circuit |
GB2244176B (en) * | 1990-05-18 | 1994-10-05 | Hewlett Packard Co | Method and apparatus for forming a conductive pattern on an integrated circuit |
DE4032411A1 (de) * | 1990-10-12 | 1992-04-16 | Daimler Benz Ag | Verfahren zur herstellung von t-gate-elektroden |
US5397722A (en) * | 1994-03-15 | 1995-03-14 | National Semiconductor Corporation | Process for making self-aligned source/drain polysilicon or polysilicide contacts in field effect transistors |
US5451532A (en) * | 1994-03-15 | 1995-09-19 | National Semiconductor Corp. | Process for making self-aligned polysilicon base contact in a bipolar junction transistor |
US6471878B1 (en) * | 1994-08-30 | 2002-10-29 | Gordion Holding Corporation | Method for forming a radio frequency responsive target and apparatus for verifying the authenticity of same |
GB2320134A (en) * | 1996-12-04 | 1998-06-10 | United Microelectronics Corp | Salicide electrodes for semiconductor devices |
JPH10270451A (ja) * | 1997-03-25 | 1998-10-09 | Rohm Co Ltd | 半導体装置およびその製造方法 |
JP3886712B2 (ja) * | 2000-09-08 | 2007-02-28 | シャープ株式会社 | 半導体装置の製造方法 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
NL149638B (nl) * | 1966-04-14 | 1976-05-17 | Philips Nv | Werkwijze voor het vervaardigen van een halfgeleiderinrichting bevattende ten minste een veldeffecttransistor, en halfgeleiderinrichting, vervaardigd volgens deze werkwijze. |
DE2149705A1 (de) * | 1970-10-06 | 1972-04-13 | Motorola Inc | Halbleiteranordnung und Verfahren zu ihrer Herstellung |
JPS5329989B2 (ja) * | 1971-10-22 | 1978-08-24 | ||
JPS5116312A (ja) * | 1974-07-10 | 1976-02-09 | Takahama Industry | Wagawaraseikeikiheno sojikyokyusochi |
US4016587A (en) * | 1974-12-03 | 1977-04-05 | International Business Machines Corporation | Raised source and drain IGFET device and method |
US4057820A (en) * | 1976-06-29 | 1977-11-08 | Westinghouse Electric Corporation | Dual gate MNOS transistor |
-
1976
- 1976-07-15 JP JP8349376A patent/JPS539469A/ja active Granted
-
1977
- 1977-07-11 US US05/814,552 patent/US4188707A/en not_active Expired - Lifetime
- 1977-07-13 GB GB29352/77A patent/GB1567808A/en not_active Expired
- 1977-07-13 CA CA282,631A patent/CA1085969A/en not_active Expired
- 1977-07-13 FR FR7721776A patent/FR2358750A1/fr active Granted
- 1977-07-15 DE DE2732184A patent/DE2732184C2/de not_active Expired
- 1977-07-15 NL NLAANVRAGE7707919,A patent/NL190255C/xx not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
FR2358750A1 (fr) | 1978-02-10 |
NL190255B (nl) | 1993-07-16 |
NL190255C (nl) | 1993-12-16 |
DE2732184C2 (de) | 1986-11-27 |
JPS539469A (en) | 1978-01-27 |
NL7707919A (nl) | 1978-01-17 |
US4188707A (en) | 1980-02-19 |
GB1567808A (en) | 1980-05-21 |
CA1085969A (en) | 1980-09-16 |
FR2358750B1 (ja) | 1983-03-25 |
DE2732184A1 (de) | 1978-01-26 |