JPS55158626A - Heat treating apparatus - Google Patents

Heat treating apparatus

Info

Publication number
JPS55158626A
JPS55158626A JP6619179A JP6619179A JPS55158626A JP S55158626 A JPS55158626 A JP S55158626A JP 6619179 A JP6619179 A JP 6619179A JP 6619179 A JP6619179 A JP 6619179A JP S55158626 A JPS55158626 A JP S55158626A
Authority
JP
Japan
Prior art keywords
treating apparatus
heat treating
reaction tube
arm
opening
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6619179A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6227530B2 (cg-RX-API-DMAC7.html
Inventor
Kazuhiro Nakao
Hiromitsu Mishimagi
Masao Honda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CHIYOU LSI GIJUTSU KENKYU KUMIAI
Original Assignee
CHIYOU LSI GIJUTSU KENKYU KUMIAI
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CHIYOU LSI GIJUTSU KENKYU KUMIAI filed Critical CHIYOU LSI GIJUTSU KENKYU KUMIAI
Priority to JP6619179A priority Critical patent/JPS55158626A/ja
Publication of JPS55158626A publication Critical patent/JPS55158626A/ja
Publication of JPS6227530B2 publication Critical patent/JPS6227530B2/ja
Granted legal-status Critical Current

Links

JP6619179A 1979-05-30 1979-05-30 Heat treating apparatus Granted JPS55158626A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6619179A JPS55158626A (en) 1979-05-30 1979-05-30 Heat treating apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6619179A JPS55158626A (en) 1979-05-30 1979-05-30 Heat treating apparatus

Related Child Applications (2)

Application Number Title Priority Date Filing Date
JP21508285A Division JPS61184821A (ja) 1985-09-30 1985-09-30 熱処理装置
JP21508385A Division JPS61184822A (ja) 1985-09-30 1985-09-30 熱処理方法

Publications (2)

Publication Number Publication Date
JPS55158626A true JPS55158626A (en) 1980-12-10
JPS6227530B2 JPS6227530B2 (cg-RX-API-DMAC7.html) 1987-06-15

Family

ID=13308699

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6619179A Granted JPS55158626A (en) 1979-05-30 1979-05-30 Heat treating apparatus

Country Status (1)

Country Link
JP (1) JPS55158626A (cg-RX-API-DMAC7.html)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5636129A (en) * 1979-08-31 1981-04-09 Hitachi Ltd Method and device for heat treatment of semiconductor thin plate
JPS58207626A (ja) * 1982-05-28 1983-12-03 Hitachi Ltd 半導体処理装置
JPS58212146A (ja) * 1982-04-29 1983-12-09 ヘレウス・クアルツシユメルツエ・ゲゼルシヤフト・ミツト・ベシユレンクタ−・ハフツング マガジン内のシリコン・ウエフアを炉内へ導入するための装置
JPS59158954A (ja) * 1983-03-02 1984-09-08 Ushio Inc 光照射加熱装置
JPS59158953A (ja) * 1983-03-02 1984-09-08 Ushio Inc 光照射加熱装置
JPS59200431A (ja) * 1983-04-28 1984-11-13 Toshiba Ceramics Co Ltd ウエハ−ボ−ト搬送用具
JPS6173324A (ja) * 1984-09-17 1986-04-15 Dainippon Screen Mfg Co Ltd 熱処理装置
JPS6236817A (ja) * 1985-08-12 1987-02-17 Hitachi Ltd 熱処理装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3744650A (en) * 1971-10-26 1973-07-10 Semiconductor Elect Memories Boat mover for semiconductor fusion process
JPS50139778A (cg-RX-API-DMAC7.html) * 1974-04-25 1975-11-08
JPS50156870A (cg-RX-API-DMAC7.html) * 1974-06-07 1975-12-18

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3744650A (en) * 1971-10-26 1973-07-10 Semiconductor Elect Memories Boat mover for semiconductor fusion process
JPS50139778A (cg-RX-API-DMAC7.html) * 1974-04-25 1975-11-08
JPS50156870A (cg-RX-API-DMAC7.html) * 1974-06-07 1975-12-18

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5636129A (en) * 1979-08-31 1981-04-09 Hitachi Ltd Method and device for heat treatment of semiconductor thin plate
JPS58212146A (ja) * 1982-04-29 1983-12-09 ヘレウス・クアルツシユメルツエ・ゲゼルシヤフト・ミツト・ベシユレンクタ−・ハフツング マガジン内のシリコン・ウエフアを炉内へ導入するための装置
JPS58207626A (ja) * 1982-05-28 1983-12-03 Hitachi Ltd 半導体処理装置
JPS59158954A (ja) * 1983-03-02 1984-09-08 Ushio Inc 光照射加熱装置
JPS59158953A (ja) * 1983-03-02 1984-09-08 Ushio Inc 光照射加熱装置
JPS59200431A (ja) * 1983-04-28 1984-11-13 Toshiba Ceramics Co Ltd ウエハ−ボ−ト搬送用具
JPS6173324A (ja) * 1984-09-17 1986-04-15 Dainippon Screen Mfg Co Ltd 熱処理装置
JPS6236817A (ja) * 1985-08-12 1987-02-17 Hitachi Ltd 熱処理装置

Also Published As

Publication number Publication date
JPS6227530B2 (cg-RX-API-DMAC7.html) 1987-06-15

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