JPS50156870A - - Google Patents

Info

Publication number
JPS50156870A
JPS50156870A JP6396574A JP6396574A JPS50156870A JP S50156870 A JPS50156870 A JP S50156870A JP 6396574 A JP6396574 A JP 6396574A JP 6396574 A JP6396574 A JP 6396574A JP S50156870 A JPS50156870 A JP S50156870A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6396574A
Other languages
Japanese (ja)
Other versions
JPS5729042B2 (cg-RX-API-DMAC7.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6396574A priority Critical patent/JPS5729042B2/ja
Publication of JPS50156870A publication Critical patent/JPS50156870A/ja
Publication of JPS5729042B2 publication Critical patent/JPS5729042B2/ja
Expired legal-status Critical Current

Links

JP6396574A 1974-06-07 1974-06-07 Expired JPS5729042B2 (cg-RX-API-DMAC7.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6396574A JPS5729042B2 (cg-RX-API-DMAC7.html) 1974-06-07 1974-06-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6396574A JPS5729042B2 (cg-RX-API-DMAC7.html) 1974-06-07 1974-06-07

Publications (2)

Publication Number Publication Date
JPS50156870A true JPS50156870A (cg-RX-API-DMAC7.html) 1975-12-18
JPS5729042B2 JPS5729042B2 (cg-RX-API-DMAC7.html) 1982-06-21

Family

ID=13244507

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6396574A Expired JPS5729042B2 (cg-RX-API-DMAC7.html) 1974-06-07 1974-06-07

Country Status (1)

Country Link
JP (1) JPS5729042B2 (cg-RX-API-DMAC7.html)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55158626A (en) * 1979-05-30 1980-12-10 Chiyou Lsi Gijutsu Kenkyu Kumiai Heat treating apparatus
JPS58501927A (ja) * 1981-12-31 1983-11-10 インタ−ナシヨナル・ビジネス・マシ−ンズ・コ−ポレ−シヨン シリコン・ウエハ中の酸素析出を減少させるための方法
JPS60140719A (ja) * 1983-12-28 1985-07-25 Oki Electric Ind Co Ltd 半導体ウエハの熱処理装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55158626A (en) * 1979-05-30 1980-12-10 Chiyou Lsi Gijutsu Kenkyu Kumiai Heat treating apparatus
JPS58501927A (ja) * 1981-12-31 1983-11-10 インタ−ナシヨナル・ビジネス・マシ−ンズ・コ−ポレ−シヨン シリコン・ウエハ中の酸素析出を減少させるための方法
JPS60140719A (ja) * 1983-12-28 1985-07-25 Oki Electric Ind Co Ltd 半導体ウエハの熱処理装置

Also Published As

Publication number Publication date
JPS5729042B2 (cg-RX-API-DMAC7.html) 1982-06-21

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