JPS55158272A - Method and apparatus for recovering invalid plating metal vapor of vacuum plating - Google Patents

Method and apparatus for recovering invalid plating metal vapor of vacuum plating

Info

Publication number
JPS55158272A
JPS55158272A JP6604479A JP6604479A JPS55158272A JP S55158272 A JPS55158272 A JP S55158272A JP 6604479 A JP6604479 A JP 6604479A JP 6604479 A JP6604479 A JP 6604479A JP S55158272 A JPS55158272 A JP S55158272A
Authority
JP
Japan
Prior art keywords
oil
fats
oils
plating metal
plating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6604479A
Other languages
Japanese (ja)
Other versions
JPS5952706B2 (en
Inventor
Toshihiko Odohira
Yoshikiyo Nakagawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Heavy Industries Ltd
Original Assignee
Mitsubishi Heavy Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Heavy Industries Ltd filed Critical Mitsubishi Heavy Industries Ltd
Priority to JP54066044A priority Critical patent/JPS5952706B2/en
Publication of JPS55158272A publication Critical patent/JPS55158272A/en
Publication of JPS5952706B2 publication Critical patent/JPS5952706B2/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0005—Separation of the coating from the substrate

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Treating Waste Gases (AREA)
  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

PURPOSE:To improve the workability by making continuous recovery possible and also, to eliminate the trouble, by letting collide the invalid plating metal vapor with the oil flowing down by cooling and solidifying it and then, recovering by flowing out of vacuum vessel with the oil. CONSTITUTION:The invalid plating metal vapor particles V' are condensed colliding with the oil films 6 and 6' of low vapor pressure fats and oils in the hood 5 heated at the temperature not to deposit on the wall face and are suspended in the oil films 6, 6' turning into the solid minute metal particles and then, the suspension is sent to the lower oil reservoirs 9, 9' flowing downward. The above-mentioned suspension oil of the fats and oils and plating metal particles, is flowed out of the vacuum vessel 1 through the pump P, P' and the valves 13, 13' keeping the pressure of the vessel 1. Next, the suspension oil flowed out of the vessel, is sent to the evaporators 12, 12' and fats and oils are evaporated at the heat gradient zones M, M' and the plating metal particles are melted. Then, evaporated fats and oils are condensed again and are circulated.
JP54066044A 1979-05-30 1979-05-30 Method and device for recovering ineffective plating metal vapor during vacuum plating Expired JPS5952706B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP54066044A JPS5952706B2 (en) 1979-05-30 1979-05-30 Method and device for recovering ineffective plating metal vapor during vacuum plating

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP54066044A JPS5952706B2 (en) 1979-05-30 1979-05-30 Method and device for recovering ineffective plating metal vapor during vacuum plating

Publications (2)

Publication Number Publication Date
JPS55158272A true JPS55158272A (en) 1980-12-09
JPS5952706B2 JPS5952706B2 (en) 1984-12-21

Family

ID=13304475

Family Applications (1)

Application Number Title Priority Date Filing Date
JP54066044A Expired JPS5952706B2 (en) 1979-05-30 1979-05-30 Method and device for recovering ineffective plating metal vapor during vacuum plating

Country Status (1)

Country Link
JP (1) JPS5952706B2 (en)

Also Published As

Publication number Publication date
JPS5952706B2 (en) 1984-12-21

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