JPS55155453A - Electric field emission type electron gun - Google Patents
Electric field emission type electron gunInfo
- Publication number
- JPS55155453A JPS55155453A JP6306479A JP6306479A JPS55155453A JP S55155453 A JPS55155453 A JP S55155453A JP 6306479 A JP6306479 A JP 6306479A JP 6306479 A JP6306479 A JP 6306479A JP S55155453 A JPS55155453 A JP S55155453A
- Authority
- JP
- Japan
- Prior art keywords
- emitter
- electric field
- field emission
- electron gun
- emission type
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005684 electric field Effects 0.000 title 1
- 230000003247 decreasing effect Effects 0.000 abstract 1
- 238000011010 flushing procedure Methods 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
- H01J37/073—Electron guns using field emission, photo emission, or secondary emission electron sources
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Sources, Ion Sources (AREA)
Abstract
PURPOSE:To prevent the damage of the emitter in the decreasing region of the emitted current, by enabling the protection device to operate by only a rapid change without regard to the DC components of all the emitted current. CONSTITUTION:The voltage signal corresponding to all the emitted current from a detecting resistor 5 is differentiated by a differentiating circuit 9. The output signal of the differentiating circuit 9 is compared to the reference voltage of a reference power supply unit 1 by a comparator 10. When it exceeds to the reference voltage, a pulse signal generates and it controls a high voltage switching circuit 8. A emitter flushing circuit 12 heats up the emitter to high temperature by manual operation.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6306479A JPS55155453A (en) | 1979-05-22 | 1979-05-22 | Electric field emission type electron gun |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6306479A JPS55155453A (en) | 1979-05-22 | 1979-05-22 | Electric field emission type electron gun |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS55155453A true JPS55155453A (en) | 1980-12-03 |
Family
ID=13218530
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6306479A Pending JPS55155453A (en) | 1979-05-22 | 1979-05-22 | Electric field emission type electron gun |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS55155453A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58102452A (en) * | 1981-12-14 | 1983-06-18 | Jeol Ltd | Electron gun of electric-field discharging type |
JPS61206200A (en) * | 1985-03-08 | 1986-09-12 | 日新ハイボルテ−ジ株式会社 | Discharge detection circuit for charged particle accelerator |
-
1979
- 1979-05-22 JP JP6306479A patent/JPS55155453A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58102452A (en) * | 1981-12-14 | 1983-06-18 | Jeol Ltd | Electron gun of electric-field discharging type |
JPS6340016B2 (en) * | 1981-12-14 | 1988-08-09 | Nippon Electron Optics Lab | |
JPS61206200A (en) * | 1985-03-08 | 1986-09-12 | 日新ハイボルテ−ジ株式会社 | Discharge detection circuit for charged particle accelerator |
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