JPS5680383A - Beam current control device - Google Patents
Beam current control deviceInfo
- Publication number
- JPS5680383A JPS5680383A JP15767279A JP15767279A JPS5680383A JP S5680383 A JPS5680383 A JP S5680383A JP 15767279 A JP15767279 A JP 15767279A JP 15767279 A JP15767279 A JP 15767279A JP S5680383 A JPS5680383 A JP S5680383A
- Authority
- JP
- Japan
- Prior art keywords
- cathode
- control device
- controlled
- current control
- electron beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Welding Or Cutting Using Electron Beams (AREA)
- Electron Sources, Ion Sources (AREA)
- Electron Beam Exposure (AREA)
Abstract
PURPOSE: To make it possible to improve capacity of the beam current control device, by adjusting the resistance using a switching element when a divided voltage is impressed on the cathode in the electron beam chamber constituting the beam current control device.
CONSTITUTION: When the voltage is drawn from the voltage divider composed or resistances 51 and 52 connected to source of acceleration voltage 2 in parallel and the current flowing into cathode 4 is controlled through cathode resistance 3, in case where the prescribed work is performed by containing object to be irradiated 8 in electron beam chamber 1 having cathode 4, etc., and by irradiating electron beam 7 on the object, the output from function generator 37 and triangle wave generator 38 is applied to the circuit composed of light emission diode 39, light guide 35 and phototransistor 33 through comparator 40. After that, switching element 31 is controlled by transistor 33, the resisting value of cathode resistance 3 is controlled, and the rise time and breaking time of the current flowing into cathode 4 is shortened, so that the capacity of device can be raised.
COPYRIGHT: (C)1981,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15767279A JPS5680383A (en) | 1979-12-05 | 1979-12-05 | Beam current control device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15767279A JPS5680383A (en) | 1979-12-05 | 1979-12-05 | Beam current control device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5680383A true JPS5680383A (en) | 1981-07-01 |
| JPS6321306B2 JPS6321306B2 (en) | 1988-05-06 |
Family
ID=15654850
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15767279A Granted JPS5680383A (en) | 1979-12-05 | 1979-12-05 | Beam current control device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5680383A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6226753A (en) * | 1985-07-26 | 1987-02-04 | ラジエイシヨン ダイナミツクス インコ−ポレ−テツド | Pulse width modulation type electron beam controlling apparatus and method using optical link |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4935150U (en) * | 1972-06-24 | 1974-03-28 | ||
| JPS507797U (en) * | 1973-05-21 | 1975-01-27 | ||
| JPS51131999A (en) * | 1975-04-04 | 1976-11-16 | Leybold Heraeus Verwaltung | Device for controlling output of high pressure electron beam generator |
-
1979
- 1979-12-05 JP JP15767279A patent/JPS5680383A/en active Granted
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4935150U (en) * | 1972-06-24 | 1974-03-28 | ||
| JPS507797U (en) * | 1973-05-21 | 1975-01-27 | ||
| JPS51131999A (en) * | 1975-04-04 | 1976-11-16 | Leybold Heraeus Verwaltung | Device for controlling output of high pressure electron beam generator |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6226753A (en) * | 1985-07-26 | 1987-02-04 | ラジエイシヨン ダイナミツクス インコ−ポレ−テツド | Pulse width modulation type electron beam controlling apparatus and method using optical link |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6321306B2 (en) | 1988-05-06 |
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