JPS55154442A - Inspecting apparatus - Google Patents

Inspecting apparatus

Info

Publication number
JPS55154442A
JPS55154442A JP6143879A JP6143879A JPS55154442A JP S55154442 A JPS55154442 A JP S55154442A JP 6143879 A JP6143879 A JP 6143879A JP 6143879 A JP6143879 A JP 6143879A JP S55154442 A JPS55154442 A JP S55154442A
Authority
JP
Japan
Prior art keywords
pattern
inspection area
effective inspection
small hole
effective
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6143879A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6226418B2 (enrdf_load_stackoverflow
Inventor
Yasuo Nakagawa
Hiroshi Makihira
Toshimitsu Hamada
Makoto Uko
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NUCLEAR FUEL CO Ltd
Hitachi Ltd
Original Assignee
NUCLEAR FUEL CO Ltd
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NUCLEAR FUEL CO Ltd, Hitachi Ltd filed Critical NUCLEAR FUEL CO Ltd
Priority to JP6143879A priority Critical patent/JPS55154442A/ja
Publication of JPS55154442A publication Critical patent/JPS55154442A/ja
Publication of JPS6226418B2 publication Critical patent/JPS6226418B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Monitoring And Testing Of Nuclear Reactors (AREA)
JP6143879A 1979-05-21 1979-05-21 Inspecting apparatus Granted JPS55154442A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6143879A JPS55154442A (en) 1979-05-21 1979-05-21 Inspecting apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6143879A JPS55154442A (en) 1979-05-21 1979-05-21 Inspecting apparatus

Publications (2)

Publication Number Publication Date
JPS55154442A true JPS55154442A (en) 1980-12-02
JPS6226418B2 JPS6226418B2 (enrdf_load_stackoverflow) 1987-06-09

Family

ID=13171063

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6143879A Granted JPS55154442A (en) 1979-05-21 1979-05-21 Inspecting apparatus

Country Status (1)

Country Link
JP (1) JPS55154442A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60108702A (ja) * 1983-11-18 1985-06-14 Tokico Ltd センサ装置
JP2013250247A (ja) * 2012-06-04 2013-12-12 Hitachi Power Solutions Co Ltd 検査システムおよび検査方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5379594A (en) * 1976-12-24 1978-07-14 Hitachi Ltd Surface inspecting apparatus of objects

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5379594A (en) * 1976-12-24 1978-07-14 Hitachi Ltd Surface inspecting apparatus of objects

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60108702A (ja) * 1983-11-18 1985-06-14 Tokico Ltd センサ装置
JP2013250247A (ja) * 2012-06-04 2013-12-12 Hitachi Power Solutions Co Ltd 検査システムおよび検査方法

Also Published As

Publication number Publication date
JPS6226418B2 (enrdf_load_stackoverflow) 1987-06-09

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