JPS55152176A - Pipe internal coating equipment - Google Patents

Pipe internal coating equipment

Info

Publication number
JPS55152176A
JPS55152176A JP5859879A JP5859879A JPS55152176A JP S55152176 A JPS55152176 A JP S55152176A JP 5859879 A JP5859879 A JP 5859879A JP 5859879 A JP5859879 A JP 5859879A JP S55152176 A JPS55152176 A JP S55152176A
Authority
JP
Japan
Prior art keywords
filament
electrode
tension
pipe
decreased
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5859879A
Other languages
Japanese (ja)
Other versions
JPS5842267B2 (en
Inventor
Akihiko Isao
Norio Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc filed Critical Ulvac Inc
Priority to JP5859879A priority Critical patent/JPS5842267B2/en
Publication of JPS55152176A publication Critical patent/JPS55152176A/en
Publication of JPS5842267B2 publication Critical patent/JPS5842267B2/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/26—Vacuum evaporation by resistance or inductive heating of the source
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

PURPOSE:To avoid a filament from breaking by melting or too much elongation when the filament under tensile in a pipe is heated, by flowing current, to a temperature of vacuum deposition by a method wherein the tensile is reduced at the point when filament creep occurs, and filament elonagtion is decreased. CONSTITUTION:In the vacuum chamber 1, the filament 4 is passed through the hollow portion 3 of a pipe 2 vertically installed and held by blocks 17, 17. The filament 4 is held at its upper end with an electrode 5 and its lower end with an electrode 6 so that it is given a tension. The lower electrode 6 is attached with weights 19 which corrects the filament bending at room temperature and makes adjustment by providing an initial tension to compensate for frictional force which occurs as the electrode 6 falls. When the fialament 4 is energized with current, it causes thermal expansion due to the generated heat and begins falling due to creep. At this time, dushpot 9 acts to reduce the tension of the filament 4 and thus the elongation of the filament is decreased.
JP5859879A 1979-05-15 1979-05-15 Tube inner surface coating method Expired JPS5842267B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5859879A JPS5842267B2 (en) 1979-05-15 1979-05-15 Tube inner surface coating method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5859879A JPS5842267B2 (en) 1979-05-15 1979-05-15 Tube inner surface coating method

Publications (2)

Publication Number Publication Date
JPS55152176A true JPS55152176A (en) 1980-11-27
JPS5842267B2 JPS5842267B2 (en) 1983-09-19

Family

ID=13088932

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5859879A Expired JPS5842267B2 (en) 1979-05-15 1979-05-15 Tube inner surface coating method

Country Status (1)

Country Link
JP (1) JPS5842267B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008062730A1 (en) * 2006-11-20 2008-05-29 Kirin Beer Kabushiki Kaisha Process for producing plastic container coated with oxide thin film

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008062730A1 (en) * 2006-11-20 2008-05-29 Kirin Beer Kabushiki Kaisha Process for producing plastic container coated with oxide thin film
JP2008127053A (en) * 2006-11-20 2008-06-05 Kirin Brewery Co Ltd Method for producing plastic container coated with oxide thin film

Also Published As

Publication number Publication date
JPS5842267B2 (en) 1983-09-19

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