JPS55150224A - Apparatus for printing pattern - Google Patents

Apparatus for printing pattern

Info

Publication number
JPS55150224A
JPS55150224A JP5711179A JP5711179A JPS55150224A JP S55150224 A JPS55150224 A JP S55150224A JP 5711179 A JP5711179 A JP 5711179A JP 5711179 A JP5711179 A JP 5711179A JP S55150224 A JPS55150224 A JP S55150224A
Authority
JP
Japan
Prior art keywords
light
tables
movable
printed
pattern
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5711179A
Other languages
Japanese (ja)
Inventor
Susumu Aiuchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP5711179A priority Critical patent/JPS55150224A/en
Publication of JPS55150224A publication Critical patent/JPS55150224A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G03F7/2002—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image
    • G03F7/2004—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image characterised by the use of a particular light source, e.g. fluorescent lamps or deep UV light
    • G03F7/2006—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image characterised by the use of a particular light source, e.g. fluorescent lamps or deep UV light using coherent light; using polarised light

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

PURPOSE:To print a pattern without contact by employing two movable tables, placing a printed board to be printed with the pattern on one table and a photomask on the other table, and projecting a light from the photomask via a reflecting mirror on the board while observing the laser light. CONSTITUTION:A table 2 movable in Y direction is placed on a table 1 movable in X direction, two tables 3 movable in X, Y and theta directions are also provided thereon, a photomask 4 is placed on one of the tables 3 and a printed board 5 to be printed with a pattern is placed on the other of the tables 3. One rotatable polygonal mirror 9 is arranged through F and theta lenses 10 and 11 thereon to project the light from a laser oscillator 6 corresponding to the lens 10 and the light from a laser oscillator 7 through a light modulator 8 corresponding to the lens 11 thereto. Thereafter, the light is observed via an eyepiece 19 provided between the tables and the mirror 9 to project the reflected light from the mask 4 on the board 5.
JP5711179A 1979-05-11 1979-05-11 Apparatus for printing pattern Pending JPS55150224A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5711179A JPS55150224A (en) 1979-05-11 1979-05-11 Apparatus for printing pattern

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5711179A JPS55150224A (en) 1979-05-11 1979-05-11 Apparatus for printing pattern

Publications (1)

Publication Number Publication Date
JPS55150224A true JPS55150224A (en) 1980-11-22

Family

ID=13046403

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5711179A Pending JPS55150224A (en) 1979-05-11 1979-05-11 Apparatus for printing pattern

Country Status (1)

Country Link
JP (1) JPS55150224A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6053017A (en) * 1983-09-02 1985-03-26 Tokyo Erekutoron Kk Vapor growth device using laser beam
JPS62252136A (en) * 1986-04-24 1987-11-02 Nikon Corp Working apparatus
JPS62190336U (en) * 1986-05-26 1987-12-03

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6053017A (en) * 1983-09-02 1985-03-26 Tokyo Erekutoron Kk Vapor growth device using laser beam
JPS62252136A (en) * 1986-04-24 1987-11-02 Nikon Corp Working apparatus
JPS62190336U (en) * 1986-05-26 1987-12-03

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