JPS5730837A - Manufacture of photomask for printing plate - Google Patents
Manufacture of photomask for printing plateInfo
- Publication number
- JPS5730837A JPS5730837A JP10589380A JP10589380A JPS5730837A JP S5730837 A JPS5730837 A JP S5730837A JP 10589380 A JP10589380 A JP 10589380A JP 10589380 A JP10589380 A JP 10589380A JP S5730837 A JPS5730837 A JP S5730837A
- Authority
- JP
- Japan
- Prior art keywords
- mark
- film
- mask pattern
- standard hole
- microscope
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Abstract
PURPOSE:To provide a photomask manufacture method high in redundancy, by forming a mark for indicating a standard hole position with a drawing machine at the same time as a mask pattern. CONSTITUTION:A mask pattern is formed on a transparent film with a drawing machine. Mark information for indicating a standard hole boring position is read out at the same time as pattern information is read out from a memory in drawing a mask pattern to write this mark on a given region, resulting in keeping both the coordinate positions of the mark and the mask pattern on the transparent film perfectly in a prescribed relationship. The mask film 6 thus obtaned is set to the standard hole boring apparatus which is provided with a light source 1, a hollow punch 2, a die 4 fixed to a support frame 3, a finely adjustable 2-dimensional position controlling table 5, a through hole 7, a reflective mirror 8 located on the optical axis of a light source 1, and a microscope 9. A microfilm 6 is bored with the punch 2 to form a standard hole through the film 6 by observing the film 6 with the microscope 9 and aligning the optical axis with the mark position.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10589380A JPS5730837A (en) | 1980-07-31 | 1980-07-31 | Manufacture of photomask for printing plate |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10589380A JPS5730837A (en) | 1980-07-31 | 1980-07-31 | Manufacture of photomask for printing plate |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5730837A true JPS5730837A (en) | 1982-02-19 |
Family
ID=14419579
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10589380A Pending JPS5730837A (en) | 1980-07-31 | 1980-07-31 | Manufacture of photomask for printing plate |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5730837A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0745267A1 (en) * | 1994-12-20 | 1996-12-04 | Baxter International Inc. | System detecting holes in polarized containers to indicate processing |
EP0745024A1 (en) * | 1994-12-20 | 1996-12-04 | Baxter International Inc. | System to identify bags that have undergone a process |
-
1980
- 1980-07-31 JP JP10589380A patent/JPS5730837A/en active Pending
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0745267A1 (en) * | 1994-12-20 | 1996-12-04 | Baxter International Inc. | System detecting holes in polarized containers to indicate processing |
EP0745024A1 (en) * | 1994-12-20 | 1996-12-04 | Baxter International Inc. | System to identify bags that have undergone a process |
EP0745267A4 (en) * | 1994-12-20 | 1999-04-07 | Baxter Int | System detecting holes in polarized containers to indicate processing |
EP0745024A4 (en) * | 1994-12-20 | 1999-07-21 | Baxter Int | System to identify bags that have undergone a process |
US6158319A (en) * | 1994-12-20 | 2000-12-12 | Baxter International Inc. | System to identify the status of bags that have been subjected to viral inactivation |
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