JPS55148433A - Manufacture of semiconductor device and device therefor - Google Patents

Manufacture of semiconductor device and device therefor

Info

Publication number
JPS55148433A
JPS55148433A JP5615279A JP5615279A JPS55148433A JP S55148433 A JPS55148433 A JP S55148433A JP 5615279 A JP5615279 A JP 5615279A JP 5615279 A JP5615279 A JP 5615279A JP S55148433 A JPS55148433 A JP S55148433A
Authority
JP
Japan
Prior art keywords
wafer
supporting rods
rotating
heat treatment
heat
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5615279A
Other languages
English (en)
Japanese (ja)
Other versions
JPS626646B2 (OSRAM
Inventor
Fumio Shimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP5615279A priority Critical patent/JPS55148433A/ja
Publication of JPS55148433A publication Critical patent/JPS55148433A/ja
Publication of JPS626646B2 publication Critical patent/JPS626646B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P95/90—
JP5615279A 1979-05-08 1979-05-08 Manufacture of semiconductor device and device therefor Granted JPS55148433A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5615279A JPS55148433A (en) 1979-05-08 1979-05-08 Manufacture of semiconductor device and device therefor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5615279A JPS55148433A (en) 1979-05-08 1979-05-08 Manufacture of semiconductor device and device therefor

Publications (2)

Publication Number Publication Date
JPS55148433A true JPS55148433A (en) 1980-11-19
JPS626646B2 JPS626646B2 (OSRAM) 1987-02-12

Family

ID=13019109

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5615279A Granted JPS55148433A (en) 1979-05-08 1979-05-08 Manufacture of semiconductor device and device therefor

Country Status (1)

Country Link
JP (1) JPS55148433A (OSRAM)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57138130A (en) * 1981-02-20 1982-08-26 Fujitsu Ltd Diffusion treatment method
US5180150A (en) * 1992-01-24 1993-01-19 Hughes Danbury Optical Systems, Inc. Apparatus for providing consistent registration of semiconductor wafers

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4834670A (OSRAM) * 1971-09-07 1973-05-21
JPS5277674A (en) * 1975-12-22 1977-06-30 Siemens Ag Method of heat treatment for semiconductor board

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4834670A (OSRAM) * 1971-09-07 1973-05-21
JPS5277674A (en) * 1975-12-22 1977-06-30 Siemens Ag Method of heat treatment for semiconductor board

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57138130A (en) * 1981-02-20 1982-08-26 Fujitsu Ltd Diffusion treatment method
US5180150A (en) * 1992-01-24 1993-01-19 Hughes Danbury Optical Systems, Inc. Apparatus for providing consistent registration of semiconductor wafers

Also Published As

Publication number Publication date
JPS626646B2 (OSRAM) 1987-02-12

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