JPS5514518A - Manufacture for magnetic recording media - Google Patents

Manufacture for magnetic recording media

Info

Publication number
JPS5514518A
JPS5514518A JP8647078A JP8647078A JPS5514518A JP S5514518 A JPS5514518 A JP S5514518A JP 8647078 A JP8647078 A JP 8647078A JP 8647078 A JP8647078 A JP 8647078A JP S5514518 A JPS5514518 A JP S5514518A
Authority
JP
Japan
Prior art keywords
mold
mask
macromolecular
magnetic metal
temperature
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8647078A
Other languages
Japanese (ja)
Other versions
JPS5751175B2 (en
Inventor
Toshiaki Kunieda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP8647078A priority Critical patent/JPS5514518A/en
Publication of JPS5514518A publication Critical patent/JPS5514518A/en
Publication of JPS5751175B2 publication Critical patent/JPS5751175B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C23C14/541—Heating or cooling of the substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Thin Magnetic Films (AREA)

Abstract

PURPOSE:To improve the yield rate at massproduction, by preventing the folds produced on macromolecular mold due to the radiation heat from the evaporation source and the condensation heat, through the provision of a heater between the macromolecular mold evaporated with magnetic metal thin layer and the mask. CONSTITUTION:In the vacuum vessel 1 providing the vacuum exhaust system 2, the macromolecular mold 3 is wound on the winding roll 7 from the supply roll 4 via the guide roller 5, cylindrical evaporation can 6, and roller 5. In the mean time, the evaporated atoms of magnetic metal come from the evaporation source 8 are attached and coated on the mold 3 while the incident angle is limited with the mask 9. The heater group 10 arranged from right to left end of the mask 9 to avoid the vapor of magnetic metal is regulated for the temperature so that the temperature at the A almost linearly decreases toward the point B. Since the radiation heat is suddenly interrupted at the mask 9, steep temperature drop of the mold 3 can be smoothed.
JP8647078A 1978-07-14 1978-07-14 Manufacture for magnetic recording media Granted JPS5514518A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8647078A JPS5514518A (en) 1978-07-14 1978-07-14 Manufacture for magnetic recording media

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8647078A JPS5514518A (en) 1978-07-14 1978-07-14 Manufacture for magnetic recording media

Publications (2)

Publication Number Publication Date
JPS5514518A true JPS5514518A (en) 1980-02-01
JPS5751175B2 JPS5751175B2 (en) 1982-10-30

Family

ID=13887837

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8647078A Granted JPS5514518A (en) 1978-07-14 1978-07-14 Manufacture for magnetic recording media

Country Status (1)

Country Link
JP (1) JPS5514518A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58125228A (en) * 1982-01-20 1983-07-26 Matsushita Electric Ind Co Ltd Production of magnetic recording medium

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58125228A (en) * 1982-01-20 1983-07-26 Matsushita Electric Ind Co Ltd Production of magnetic recording medium
JPH0364934B2 (en) * 1982-01-20 1991-10-09

Also Published As

Publication number Publication date
JPS5751175B2 (en) 1982-10-30

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