JPH0364934B2 - - Google Patents
Info
- Publication number
- JPH0364934B2 JPH0364934B2 JP57008121A JP812182A JPH0364934B2 JP H0364934 B2 JPH0364934 B2 JP H0364934B2 JP 57008121 A JP57008121 A JP 57008121A JP 812182 A JP812182 A JP 812182A JP H0364934 B2 JPH0364934 B2 JP H0364934B2
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- medium
- film
- temperature
- magnetic recording
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000758 substrate Substances 0.000 claims description 28
- 230000005415 magnetization Effects 0.000 claims description 7
- 238000004519 manufacturing process Methods 0.000 claims description 7
- 239000000463 material Substances 0.000 claims description 4
- 239000010408 film Substances 0.000 description 15
- 238000000034 method Methods 0.000 description 8
- 239000002861 polymer material Substances 0.000 description 5
- 229920002647 polyamide Polymers 0.000 description 4
- 229920000307 polymer substrate Polymers 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- 238000007738 vacuum evaporation Methods 0.000 description 3
- 239000004952 Polyamide Substances 0.000 description 2
- 229910052736 halogen Inorganic materials 0.000 description 2
- 150000002367 halogens Chemical class 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 238000001771 vacuum deposition Methods 0.000 description 2
- 239000004962 Polyamide-imide Substances 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000007733 ion plating Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 229920002312 polyamide-imide Polymers 0.000 description 1
- -1 polyethylene terephthalate Polymers 0.000 description 1
- 229920000139 polyethylene terephthalate Polymers 0.000 description 1
- 239000005020 polyethylene terephthalate Substances 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
Landscapes
- Manufacturing Of Magnetic Record Carriers (AREA)
- Thin Magnetic Films (AREA)
- Compositions Of Macromolecular Compounds (AREA)
- Magnetic Record Carriers (AREA)
Description
【発明の詳細な説明】
本発明は高分子材料より成る基板上に、磁化容
易軸が膜面に垂直方向にあるCoとCrを主成分と
する磁性層を形成した磁気記録媒体の製造方法に
関するものであつて、その目的とするところは磁
気記録媒体の製造過程において発生した該媒体の
走行性、巻き取り性、磁気ヘツドタツチ等に悪影
響を及ぼすカールを除去することにある。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method for manufacturing a magnetic recording medium in which a magnetic layer mainly composed of Co and Cr, the axis of easy magnetization of which is perpendicular to the film surface, is formed on a substrate made of a polymeric material. The purpose of this is to remove curls that occur during the manufacturing process of magnetic recording media and have an adverse effect on the running performance, winding performance, magnetic head touch, etc. of the media.
短波長記録特性の優れた磁気記録方式として、
垂直記録方法がある。この方式においては媒体の
膜面に垂直方向が磁化容易軸である垂直記録媒体
が必要となる。このような媒体に信号を記録する
と残留磁化は媒体の膜面に垂直方向を向き、従つ
て信号が短波長になる程媒体内反磁界は減少し、
優れた再生出力が得られる。 As a magnetic recording method with excellent short wavelength recording characteristics,
There is a perpendicular recording method. This method requires a perpendicular recording medium whose axis of easy magnetization is perpendicular to the film surface of the medium. When a signal is recorded on such a medium, the residual magnetization is oriented perpendicular to the film surface of the medium, so the shorter the signal wavelength, the smaller the demagnetizing field within the medium.
Excellent playback output can be obtained.
スパツタリング法あるいは真空蒸着法(イオン
プレーテイング法のように蒸発原子の一部をイオ
ン化する方法も含む)によりCoとCrを主成分と
する磁性層を形成すれば、膜面に垂直方向に磁化
容易軸を有する垂直磁化膜が得られることが知ら
れているが、高保磁力を有する特性の優れた垂直
磁化膜を得るためには、いずれの方法においても
薄膜形成時に基板温度を高温にすることが必要で
ある。すなわちスパツタリング法においては約
100℃以上、真空蒸着法においては約180℃以上に
する必要がある。この程度の基板温度はAl等の
非磁性金属より成る基板を用いる場合には問題に
ならないが、ポリエチレンテレフタレート等の耐
熱性の悪い高分子材料より成る基板は熱負けを生
じるので用いることができない。従つて高分子材
料より成る基板を使用する際にはポリアミド系あ
るいはポリイミド系等の耐熱性基板に限られる。
実際にポリアミド系の高分子材料より成る基板上
に、基板温度200℃にて真空蒸着法によりCo−Cr
膜を形成したが、膜面に垂直方向の保磁力が、
800Oeの垂直磁化膜が得られた。しかし得られた
媒体は第1図に示す様にCo−Cr垂直磁化膜1が
内側になる様なカールを生じ、これを磁気記録媒
体として使用する際には前記した様な問題を生じ
る。なお2はポリアミド系の高分子材料より成る
基板である。スパツタリング法で作成しても第1
図に示す様なカールをした媒体が得られる。磁気
記録媒体として使用するためには、カールの量を
第1図に示したt、lを用いてt/lで表わす
と、t/lが10%以下になることが必要である。
この条件を満たすためには、薄膜形成後に熱処理
を施して基板2を収縮させればよいが、ポリアミ
ド系の様な耐熱性高分子材料より成る基板を収縮
させるためには300℃以上の高温にしなければな
らない。また実験の結果、出来るだけ高温度で
(ただし高分子材料が分解する温度以下)かつ短
時間で処理することが好ましい結果を与えること
が明らかになつた。従来この様な処理は媒体を高
温の円筒状キヤンの周側面に沿つて走行させるこ
とによつて行なわれていたが、円筒状キヤンの温
度を300℃以上にすることは困難であり、したが
つて真空蒸着等によつて磁性層を形成する工程中
にカールを除去することはできないという課題が
あつた。本発明は磁性層を形成したあとでも基板
温度を容易に300℃以上にしかつ短時間に処理を
することにより磁性層の形成工程中基板に発生し
たカールをカールを除去しようとするもので以下
に図面を用い本発明の説明を行う。 If a magnetic layer mainly composed of Co and Cr is formed by sputtering or vacuum evaporation (including methods such as ion plating that ionizes some of the evaporated atoms), it can be easily magnetized in the direction perpendicular to the film surface. It is known that a perpendicularly magnetized film with an axis can be obtained, but in order to obtain a perpendicularly magnetized film with excellent properties and high coercive force, it is necessary to raise the substrate temperature to a high temperature during thin film formation in any method. is necessary. In other words, in the sputtering method, approximately
The temperature needs to be 100°C or higher, or about 180°C or higher in the case of vacuum evaporation. Although this level of substrate temperature is not a problem when using a substrate made of a non-magnetic metal such as Al, it cannot be used with a substrate made of a polymeric material with poor heat resistance such as polyethylene terephthalate because it causes heat loss. Therefore, when using a substrate made of a polymer material, it is limited to a heat-resistant substrate such as polyamide or polyimide.
Co-Cr was actually deposited on a substrate made of polyamide-based polymer material by vacuum evaporation at a substrate temperature of 200°C.
A film was formed, but the coercive force perpendicular to the film surface was
A perpendicular magnetization film of 800 Oe was obtained. However, as shown in FIG. 1, the obtained medium is curled so that the Co--Cr perpendicular magnetization film 1 is on the inside, and when this medium is used as a magnetic recording medium, the above-mentioned problems occur. Note that 2 is a substrate made of a polyamide-based polymer material. Even if it is made by sputtering method, it is the first
A curled medium as shown in the figure is obtained. In order to use it as a magnetic recording medium, when the amount of curl is expressed as t/l using t and l shown in FIG. 1, it is necessary that t/l is 10% or less.
In order to satisfy this condition, the substrate 2 may be shrinked by heat treatment after the thin film is formed, but in order to shrink a substrate made of a heat-resistant polymer material such as polyamide, it is necessary to heat the substrate 2 at a high temperature of 300°C or higher. There must be. Further, as a result of experiments, it has become clear that preferable results can be obtained by performing the treatment at as high a temperature as possible (but below the temperature at which the polymeric material decomposes) and in a short time. Conventionally, this type of treatment was carried out by running the medium along the circumferential side of a high-temperature cylindrical can, but it was difficult to raise the temperature of the cylindrical can to over 300°C. However, there was a problem in that curls could not be removed during the process of forming the magnetic layer by vacuum deposition or the like. The present invention attempts to remove curls generated on the substrate during the process of forming the magnetic layer by easily increasing the substrate temperature to 300°C or higher and performing treatment in a short time even after the magnetic layer is formed. The present invention will be explained using the drawings.
第2図は本発明による製造方法の1例を示す。
図において、3,4はそれぞれ面上に垂直磁化膜
が形成された耐熱性の高分子基板2よりなる記録
媒体5の供給ロール及び巻き取りロールである。
6はハロゲンランプあるいはキセノンランプ等の
光源であり、これから発する光は集光器7によつ
て集光されて高分子基板2を照射し加熱する。基
板2は垂直磁化膜としての金属薄膜を有している
ために、集光されて細く絞られた光によつて容易
に、かつ極めて短時間に300℃以上の温度とする
ことができる。従つて耐熱性の高分子基板は熱収
縮を生じ製造過程において基板2に発生したカー
ルを除去できる。なおカールの除去量は、媒体の
送り速度、光源に供給する電力、基板と光源との
距離によつて調整できる光の照射範囲および強度
等より調整する。なお、本発明の製造方法におけ
る第2図に示すカールの除去処理は大気圧中にお
いても行うことができる。 FIG. 2 shows an example of the manufacturing method according to the present invention.
In the figure, numerals 3 and 4 are a supply roll and a take-up roll for a recording medium 5 made of a heat-resistant polymer substrate 2 on which a perpendicularly magnetized film is formed, respectively.
Reference numeral 6 denotes a light source such as a halogen lamp or a xenon lamp, and the light emitted from the light source is collected by a condenser 7 to irradiate and heat the polymer substrate 2. Since the substrate 2 has a metal thin film as a perpendicularly magnetized film, it can be heated to a temperature of 300° C. or higher easily and in an extremely short time using focused light. Therefore, the heat-resistant polymer substrate undergoes thermal shrinkage and curls generated on the substrate 2 during the manufacturing process can be removed. Note that the amount of curl removal is adjusted based on the irradiation range and intensity of light, which can be adjusted by the feeding speed of the medium, the power supplied to the light source, the distance between the substrate and the light source, and the like. Note that the curl removal treatment shown in FIG. 2 in the manufacturing method of the present invention can also be performed at atmospheric pressure.
次に実施例について述べる。膜厚12μmのポリ
アミド系高分子材料より成る基板上に、真空蒸着
法により基板温度200℃にて膜厚1500ÅのCo−Cr
垂直磁化膜を形成すると、t/lが約80%のカー
ルを発生する。この基板に第2図に示す装置によ
りカールの除去処理を施した。ただし、光源とし
ては500Wのハロゲンランプを用い、基板の送り
速度は5m/分、基板とランプとの距離は8cmと
した。このような処理を経て得られた磁気記媒体
はカールの量t/lが約3%であつた。 Next, examples will be described. A Co-Cr film with a thickness of 1500 Å was deposited on a substrate made of polyamide polymer material with a thickness of 12 μm at a substrate temperature of 200°C by vacuum evaporation method.
When a perpendicularly magnetized film is formed, a curl with a t/l of about 80% occurs. This substrate was subjected to curl removal treatment using the apparatus shown in FIG. However, a 500 W halogen lamp was used as the light source, the substrate feeding speed was 5 m/min, and the distance between the substrate and the lamp was 8 cm. The magnetic recording medium obtained through such treatment had a curl amount t/l of about 3%.
なお、第2図は基板2が支持体に沿わずに走行
する最も単純な例を示しているが、基板2が円筒
状キヤン等の支持体に沿つて走行しても何ら差し
つかえない。 Although FIG. 2 shows the simplest example in which the substrate 2 runs not along a support, there is no problem even if the board 2 runs along a support such as a cylindrical can.
以上のように本発明によれば、集光され、かつ
細く絞られた光を照射し、加熱することによつて
基板に発生したカールを除去することができるた
めカールの殆んどない磁気記録媒体を容易に得る
ことができる。 As described above, according to the present invention, curls generated on the substrate can be removed by irradiating the substrate with focused and narrowly focused light and heating it, so magnetic recording with almost no curls can be achieved. Medium can be easily obtained.
第1図は磁気記録媒体におけるカールの状態を
示す斜視図、第2図は本発明による製造方法の1
例を示す図である。
1……垂直磁化膜、2……基板、6……光源、
7……集光器。
FIG. 1 is a perspective view showing the state of curl in a magnetic recording medium, and FIG. 2 is a first example of the manufacturing method according to the present invention.
It is a figure which shows an example. 1... Perpendicular magnetization film, 2... Substrate, 6... Light source,
7... Light collector.
Claims (1)
を主成分とする磁性層が面上に形成された高分子
材料より成る基板に集光器によつて集光され、か
つ細く絞られた光を照射し加熱することを特徴と
する磁気記録媒体の製造方法。1 Co and Cr whose easy axis of magnetization is perpendicular to the film surface
A magnetic recording medium characterized in that a substrate made of a polymeric material on which a magnetic layer containing as a main component is formed is heated by being focused by a condenser and irradiated with narrowly narrowed light. manufacturing method.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP812182A JPS58125228A (en) | 1982-01-20 | 1982-01-20 | Production of magnetic recording medium |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP812182A JPS58125228A (en) | 1982-01-20 | 1982-01-20 | Production of magnetic recording medium |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS58125228A JPS58125228A (en) | 1983-07-26 |
JPH0364934B2 true JPH0364934B2 (en) | 1991-10-09 |
Family
ID=11684450
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP812182A Granted JPS58125228A (en) | 1982-01-20 | 1982-01-20 | Production of magnetic recording medium |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS58125228A (en) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5514518A (en) * | 1978-07-14 | 1980-02-01 | Matsushita Electric Ind Co Ltd | Manufacture for magnetic recording media |
-
1982
- 1982-01-20 JP JP812182A patent/JPS58125228A/en active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5514518A (en) * | 1978-07-14 | 1980-02-01 | Matsushita Electric Ind Co Ltd | Manufacture for magnetic recording media |
Also Published As
Publication number | Publication date |
---|---|
JPS58125228A (en) | 1983-07-26 |
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