JPH02137124A - Production of magnetic recording medium - Google Patents
Production of magnetic recording mediumInfo
- Publication number
- JPH02137124A JPH02137124A JP63291155A JP29115588A JPH02137124A JP H02137124 A JPH02137124 A JP H02137124A JP 63291155 A JP63291155 A JP 63291155A JP 29115588 A JP29115588 A JP 29115588A JP H02137124 A JPH02137124 A JP H02137124A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- laser
- film
- magnetic thin
- recording medium
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 12
- 239000010409 thin film Substances 0.000 claims abstract description 38
- 239000002184 metal Substances 0.000 claims abstract description 36
- 229910052751 metal Inorganic materials 0.000 claims abstract description 36
- 239000010408 film Substances 0.000 claims abstract description 29
- 238000000034 method Methods 0.000 claims abstract description 13
- 239000000758 substrate Substances 0.000 claims abstract description 11
- 230000001678 irradiating effect Effects 0.000 claims abstract description 4
- 229920006254 polymer film Polymers 0.000 claims description 25
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 claims description 5
- 229910001882 dioxygen Inorganic materials 0.000 claims description 5
- 230000003647 oxidation Effects 0.000 abstract description 4
- 238000007254 oxidation reaction Methods 0.000 abstract description 4
- 238000010438 heat treatment Methods 0.000 abstract description 3
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 12
- 230000000694 effects Effects 0.000 description 12
- 238000001704 evaporation Methods 0.000 description 7
- 230000008020 evaporation Effects 0.000 description 7
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 6
- 229910002092 carbon dioxide Inorganic materials 0.000 description 6
- 239000001569 carbon dioxide Substances 0.000 description 6
- 229910052760 oxygen Inorganic materials 0.000 description 6
- 239000001301 oxygen Substances 0.000 description 6
- 229920001721 polyimide Polymers 0.000 description 5
- 238000007738 vacuum evaporation Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 238000004544 sputter deposition Methods 0.000 description 3
- 229910018487 Ni—Cr Inorganic materials 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 238000005566 electron beam evaporation Methods 0.000 description 2
- 238000000682 scanning probe acoustic microscopy Methods 0.000 description 2
- 241000282465 Canis Species 0.000 description 1
- 241000270281 Coluber constrictor Species 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- OQZCSNDVOWYALR-UHFFFAOYSA-N flurochloridone Chemical compound FC(F)(F)C1=CC=CC(N2C(C(Cl)C(CCl)C2)=O)=C1 OQZCSNDVOWYALR-UHFFFAOYSA-N 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 239000006247 magnetic powder Substances 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 238000007790 scraping Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 210000004233 talus Anatomy 0.000 description 1
- 230000003685 thermal hair damage Effects 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
Landscapes
- Manufacturing Of Magnetic Record Carriers (AREA)
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明は、高分子フィルム等の基板上に高密度記録特性
に優れた金属磁性薄膜を形成する磁気記録媒体の製造方
法に関するものである。DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to a method for manufacturing a magnetic recording medium, in which a metal magnetic thin film having excellent high-density recording characteristics is formed on a substrate such as a polymer film.
従来の技術
従来、磁気記録媒体としては高分子フィルム等の非磁性
基板上に磁性粉を塗布した塗布型のものが使用されて来
たが、より高い記録密度を達成するために、非磁性基板
上に金属薄膜（部分的に酸化あるいは窒化されているも
のを含む）をスパッタ法や真空蒸着法で形成した薄膜型
が実用化されつつ島る。薄膜型磁気記録媒体の中でも、
特にＣｏ基磁性薄膜を磁性層として形成した磁気記録媒
体か、優れた短波長記録特性のゆえに注目を集めている
。Ｃｏ基磁性薄膜はスパッタ法や真空蒸着法（イオンブ
レーティング法のように蒸発原子の一部をイオン化して
膜を堆積する方法も含む）により作成されるが、特に後
者の方法によれば高い堆積速度が達成でき、ｍ産に適し
ている。Conventional technology Conventionally, coated magnetic recording media have been used, in which magnetic powder is coated on a non-magnetic substrate such as a polymer film, but in order to achieve higher recording density, a non-magnetic substrate Thin film types, in which a metal thin film (including partially oxidized or nitrided films) is formed on top by sputtering or vacuum evaporation, are becoming more and more practical. Among thin film magnetic recording media,
In particular, magnetic recording media in which a Co-based magnetic thin film is formed as a magnetic layer are attracting attention because of their excellent short wavelength recording characteristics. Co-based magnetic thin films are created by sputtering or vacuum evaporation (including methods such as ion blating, which ionizes some of the evaporated atoms to deposit the film), but the latter method is especially expensive. The deposition rate can be achieved and it is suitable for m production.
非磁性基板として高分子フィルムを用いて、真空蒸着法
により金属薄膜型磁気記録媒体を製造する方法としては
、高分子フィルムを円筒状キャンの周面に沿わせて走行
させつつ磁性層を蒸着する方法が最も優れている。第３
図にこのような方法を用いた真空蒸着装置の内部構造の
概略を示す。A method of manufacturing a metal thin film magnetic recording medium by vacuum evaporation using a polymer film as a non-magnetic substrate involves depositing a magnetic layer while running the polymer film along the circumferential surface of a cylindrical can. method is the best. Third
The figure schematically shows the internal structure of a vacuum evaporation apparatus using this method.
高分子フィルム１は円筒状キャン２の周面に沿って矢印
Ａの向きに走行する。この高分子フィルム１上に蒸発源
δによって磁性層が形成される。The polymer film 1 runs along the circumferential surface of the cylindrical can 2 in the direction of arrow A. A magnetic layer is formed on this polymer film 1 by the evaporation source δ.
３．４はそれぞれ高分子フィルム１の供給ロール及び巻
き取りロールである。蒸発源δとしては、抵抗加熱蒸発
源、誘導加熱蒸発源、電子ビーム蒸発源等が考えられる
が、高融点金属であるＣｏ基合金を高速で蒸発させるた
めには、電子ビーム蒸発源を採用する必要がある。蒸発
源５と円筒状キャン２との間には、蒸発源５から蒸発す
る蒸気が不要な部分に付着するのを防止するために、遮
蔽板６が配置されている。遮蔽板６はＳで示されるよう
に開口している。この間口部Ｓを通過した蒸気が高分子
フィルム１上に付着し、磁性層が形成される。3.4 are a supply roll and a take-up roll of the polymer film 1, respectively. As the evaporation source δ, resistance heating evaporation source, induction heating evaporation source, electron beam evaporation source, etc. can be considered, but in order to evaporate Co-based alloy, which is a high melting point metal, at high speed, an electron beam evaporation source is adopted. There is a need. A shielding plate 6 is arranged between the evaporation source 5 and the cylindrical can 2 in order to prevent the vapor evaporated from the evaporation source 5 from adhering to unnecessary parts. The shielding plate 6 is open as shown by S. The vapor that has passed through this opening S adheres to the polymer film 1, forming a magnetic layer.
発明が解決しようとする課題
ところで、Ｃｏ−Ｃｒ膜あるいはＣｏ−Ｎｉ−Ｃｒ膜を
磁性層として形成した後、テープ状にスリットしてデツ
キにて記録再生すると、磁性層に慣が発生し再生出力が
低下するという問題を生じた。Problems to be Solved by the Invention By the way, when a Co-Cr film or a Co-Ni-Cr film is formed as a magnetic layer and then slit into a tape shape and recorded/reproduced on a deck, the magnetic layer becomes distorted and the reproduced output decreases. This resulted in a problem of a decrease in
本発明は、このような従来技術の課題を解決することを
目的とする。The present invention aims to solve the problems of the prior art.
課題を解決するための手段
本発明は、基板上にＣｏとＣｒあるいはＣｏとＮｉとＣ
ｒを主成分とする金属磁性薄膜を形成し、前記金属磁性
薄膜の表面にレーザーを照射することを特徴とする磁気
記録媒体の製造方法である。Means for Solving the Problems The present invention provides Co and Cr or Co and Ni and C on a substrate.
This method of manufacturing a magnetic recording medium is characterized in that a metal magnetic thin film containing r as a main component is formed, and a laser beam is irradiated onto the surface of the metal magnetic thin film.
作用
本発明の磁気記録媒体の製造方法によれば、磁性層表面
に強固な酸化皮膜が形成され、耐久性が向上する。Effect: According to the method of manufacturing a magnetic recording medium of the present invention, a strong oxide film is formed on the surface of the magnetic layer, improving durability.
実施例
第１図〜第５図を用いて本発明の実施例について説明す
４゜
本発明の要点は、金属磁性薄膜の表面をレーザー照射に
より酸化するところにある。金属を酸化するためには酸
素の存在下で昇温すればよい。本発明においては、レー
ザーが熱源である。表面性のよい金属表面にレーザーを
照射するとほとんど反射されてしまう。しかし、わずか
に吸収され、金属の極表面が酸化され酸化被膜が形成さ
れる。Embodiment 4 An embodiment of the present invention will be described with reference to FIGS. 1 to 5. The key point of the present invention is to oxidize the surface of a metal magnetic thin film by laser irradiation. In order to oxidize a metal, it is sufficient to raise the temperature in the presence of oxygen. In the present invention, a laser is the heat source. When a laser beam is irradiated onto a metal surface with good surface properties, most of it is reflected. However, a small amount of it is absorbed, and the extreme surface of the metal is oxidized, forming an oxide film.
酸化被膜が形成されると、酸化被膜は金属表面よりもレ
ーザーを吸収し易いために、急激に昇温される。昇温が
進むと酸化も促進され、非常に効率よく金属磁性薄膜の
表面を酸化することができる。When the oxide film is formed, the temperature is rapidly increased because the oxide film absorbs laser light more easily than the metal surface. As the temperature increases, oxidation is also promoted, and the surface of the metal magnetic thin film can be oxidized very efficiently.
る。金属磁性薄膜のみ急激に昇温されるため、基板にか
かる熱負荷が軽減される利点がある。Ru. Since only the metal magnetic thin film is rapidly heated, there is an advantage that the thermal load applied to the substrate is reduced.
高速で移動している金属磁性薄膜にレーザーを照射して
金属磁性薄膜の表面を酸化するためには大出力のレーザ
ー源が必要である。現在実用化されている大出力のもの
としては、エキシマレーザ−（約５００Ｗ）、ＹＡＧレ
ーザ−（約１ ｋＷ）、炭酸ガスレーザー（約５ｋＷ）
がある。本発明においてはどのレーザーを用いてもよい
が、炭酸ガスレーザーが使い易くてよい。第４図はレー
ザー源の一例を概略示したものである。第４図は炭酸ガ
スレーザーの場合である。レーザー発信器９から放射さ
れるレーザーはビー１１エキスパンダーｌＯにより所望
の大きさに広げられる。広がったレーザーをアパーチャ
ーあるいはシリンドリアルレンズあるいはそれらを併用
したビーム整形器１１により所望の形状にする。所望の
形状にしたレーザー７を金属磁性薄膜表面にに照射する
。炭酸ガスレーザー以外の場合もビームエキスパンダー
以後は同様である。尚、レーザー照射の方法として、レ
ーザーを走査する方法ももちろん可能である。A high-output laser source is required to oxidize the surface of a metal magnetic thin film that is moving at high speed by irradiating it with a laser beam. High-power lasers currently in practical use include excimer lasers (approx. 500 W), YAG lasers (approx. 1 kW), and carbon dioxide lasers (approx. 5 kW).
There is. Although any laser may be used in the present invention, a carbon dioxide laser may be used because it is easy to use. FIG. 4 schematically shows an example of a laser source. Figure 4 shows the case of a carbon dioxide laser. The laser beam emitted from the laser transmitter 9 is expanded to a desired size by the beam expander 10. The expanded laser beam is shaped into a desired shape using an aperture, a cylindrical lens, or a beam shaper 11 using a combination thereof. A laser 7 shaped into a desired shape is irradiated onto the surface of the metal magnetic thin film. The same applies to cases other than carbon dioxide lasers after the beam expander. Incidentally, as a method of laser irradiation, a method of scanning the laser is of course also possible.
必要なレーザー出力は波長によって吸収率が異なるので
、使用するレーザーよって調整する必要がある。また、
金属磁性薄膜の移動速度によっても調整する必要がある
。The required laser power needs to be adjusted depending on the laser used, since the absorption rate varies depending on the wavelength. Also,
It is also necessary to adjust the speed of movement of the metal magnetic thin film.
まず、第１図について説明する。すでに金属磁性薄膜が
形成されている高分子フィルム８は供給ロール３３より
巻き出され巻き取りロール３４に巻き取られる。その間
にレーザー７を金属磁性薄膜表面に照射する。雰囲気は
大気でよいが、本発明の効果を効率よく発揮し、高速で
処理する場合にはノズル３５によりレーザー７を照射し
ている部分に酸素ガスを差し向ける。First, FIG. 1 will be explained. The polymer film 8 on which the metal magnetic thin film has already been formed is unwound from the supply roll 33 and wound onto the take-up roll 34 . During this time, a laser 7 is irradiated onto the surface of the metal magnetic thin film. The atmosphere may be air, but in order to efficiently exhibit the effects of the present invention and perform high-speed processing, oxygen gas is directed through the nozzle 35 to the area irradiated with the laser 7.
次に、第２図について説明する。すでに金属磁性薄膜が
形成されている高分子フィルム８は供給ロール３３より
巻き出され円筒状キャン３２の局面に沿って矢印Ｂの方
向に走行し巻き取りロール３４に巻き取られる。高分子
フィルム８が円筒状キャン３２の周面に沿って走行して
いる間にレーザー７を金属磁性薄膜表面に照射する。雰
囲気は大気でよいが、本発明の効果を効率よく発揮し、
高速で処理する場合にはノズル３５によりレーザー９を
照射している部分に酸素ガスを差し向ける。Next, FIG. 2 will be explained. The polymer film 8 on which the metal magnetic thin film has already been formed is unwound from the supply roll 33, travels in the direction of arrow B along the curve of the cylindrical can 32, and is wound onto the take-up roll 34. While the polymer film 8 is running along the circumferential surface of the cylindrical can 32, the laser 7 is irradiated onto the surface of the metal magnetic thin film. The atmosphere may be air, but the effect of the present invention can be efficiently exhibited,
When processing at high speed, oxygen gas is directed through the nozzle 35 to the area irradiated with the laser 9.
ここで、円筒状キャン３２を昇温すれば、本発明の効果
をより一層高めることが可能である。尚、円筒状キャン
３２を用いることの利点は、レーザー照射時のフィルム
の変形を抑制するところにもある。Here, by increasing the temperature of the cylindrical can 32, it is possible to further enhance the effects of the present invention. An advantage of using the cylindrical can 32 is that it suppresses deformation of the film during laser irradiation.
以下に具体的実施例について説明する。Specific examples will be described below.
高分子フィルムとして幅２０ｃｍ、膜厚８７Ｌｍのポリ
イミドフィルムを用い、第３図に示す真空蒸着装置によ
り金属磁性薄膜である膜厚０．２５μｍのＣｏ−Ｃｒ膜
を形成した。尚、Ｃｏ−Ｃｒ膜は、高密度磁気記録媒体
として注目されているものである。A polyimide film having a width of 20 cm and a thickness of 87 Lm was used as the polymer film, and a Co--Cr film having a thickness of 0.25 μm as a metal magnetic thin film was formed using the vacuum evaporation apparatus shown in FIG. Incidentally, the Co--Cr film is attracting attention as a high-density magnetic recording medium.
まず、第１図に示した方法によりレーザー照射処理を実
施した。この際に、レーザー７としては第４図に示した
炭酸ガスレーザー源から放射されたものを用い、長さ５
ｍ ｍｓ 幅２０ｃｍの形状とした。このときのレ
ーザー出力は４００Ｗとした。First, laser irradiation treatment was performed by the method shown in FIG. At this time, as the laser 7, one emitted from the carbon dioxide laser source shown in Fig. 4 was used, and the length was 5.
The shape was 20 cm wide. The laser output at this time was 400W.
ポリイミドフィルムは２０ｍ／分の速度で走行させた。The polyimide film was run at a speed of 20 m/min.
更に、ノズル３５より酸素ガスを差し向けて３０ｍ／分
の速度で走行させた。Furthermore, oxygen gas was directed through the nozzle 35 and the vehicle was run at a speed of 30 m/min.
次に、第２図に示した方法によりレーザー照射処理を実
施した。レーザー７としては第４図に示した炭酸ガスレ
ーザー源から放射されたものを用い、長さ５ｍｍ、
幅２０ｃｍの形状とした。このときのレーザー出力は４
００Ｗとした。円筒状キャン３２を２５０℃に昇温しで
ポリイミドフィルムは３０ｍ／分の速度で走行させた。Next, laser irradiation treatment was performed by the method shown in FIG. As the laser 7, one emitted from the carbon dioxide laser source shown in Fig. 4 was used, and the length was 5 mm.
The shape was 20 cm wide. The laser output at this time is 4
It was set to 00W. The temperature of the cylindrical can 32 was raised to 250° C., and the polyimide film was run at a speed of 30 m/min.
更に、ノズル３５より酸素ガスを差し向けて４０ｍ／分
の速度で走行させた。Further, oxygen gas was directed through the nozzle 35 and the vehicle was run at a speed of 40 m/min.
以上４種の具体的実施例で得られたサンプルと未処理の
サンプルを８ｍｍ幅にスリットしてテープ状にし、市販
の８ミリＶＴＲデツキを用いて走行耐久性、スチル耐久
性の評価を行なった。その結果を第１表に示した。The samples obtained in the above four specific examples and the untreated sample were slit into 8 mm width tapes, and running durability and still durability were evaluated using a commercially available 8 mm VTR deck. . The results are shown in Table 1.
以下余白
第１表
ザー照射により走行耐久性、スチル耐久性ともに顕著な
改善効果がある。この効果は、酸素の導入、さらには、
円筒状キャンを用いた昇温により更に高まる。この顕著
な効果は、分析の結果、金属磁性薄膜の表面が深さ１０
ｎｍ以上にわたって酸化され′ており、Ｃｏ酸化物を主
体とした酸化被膜が形成された状態になっていることが
判明した。特に酸化被膜の表面近傍はほとんどがＣｏ酸
化物であり、深層部に向かうにつれ徐々にＣｒ酸化物が
増加していた。The first margin below shows that laser irradiation has a significant improvement effect on both running durability and still durability. This effect is due to the introduction of oxygen and even
It is further increased by increasing the temperature using a cylindrical can. This remarkable effect is due to the fact that the surface of the metal magnetic thin film has a depth of 10 mm.
It was found that the film had been oxidized over a range of nanometers or more, and an oxide film mainly composed of Co oxide had been formed. In particular, the area near the surface of the oxide film was mostly Co oxide, and Cr oxide gradually increased toward the deeper layer.
次に、形成される酸化被膜の膜厚とスチル耐久時間との
関係について説明する。酸化被膜の膜厚を、レーザー照
射処理時の高分子フィルム８０走行速度を変えることに
より、変化させた。酸化被膜の膜厚は、オージェ電子分
光分析による酸素の深さ方向の分布状態から定義した。Next, the relationship between the thickness of the oxide film formed and the still durability time will be explained. The thickness of the oxide film was varied by changing the running speed of the polymer film 80 during the laser irradiation treatment. The thickness of the oxide film was defined from the distribution state of oxygen in the depth direction by Auger electron spectroscopy.
第５図に分析結果の一例を示す。第５図において酸素（
０）の検出感度はＣｏの２倍であるので、酸素の信号強
度を２分の１に補正したものとＣｏの信号強度が等しく
なる点（酸素の信号強度×１７２の線とＣｏの信号強度
を示す線との交点）を酸化被膜の膜厚とした。スチル耐
久時間は、′静止モードにおいて、媒体表面に傷が発生
し出力が極端に低下するまでの時間とした。レーザーの
条件は長さ５ ｍ ｍ。FIG. 5 shows an example of the analysis results. In Figure 5, oxygen (
Since the detection sensitivity of 0) is twice that of Co, the point where the signal intensity of oxygen corrected to half is equal to the signal intensity of Co (the line of oxygen signal intensity x 172 and the signal intensity of Co The intersection point with the line indicating The still durability time was defined as the time taken in the still mode until scratches were generated on the medium surface and the output was extremely reduced. The laser condition was a length of 5 mm.
輻２０ ｃ ｌｎｓ 出力４００Ｗで一定とした。第
２表に高分子フィルム８の走行速度、酸化被膜の膜厚、
スチル耐久時間の関係を示した。Radiation 20 c lns The output was kept constant at 400W. Table 2 shows the running speed of the polymer film 8, the thickness of the oxide film,
The relationship between still durability time is shown.
（以下余白）
第２表
要であることがわかる。また、５ｎｍ、３ｎｍでは極端
にスチル耐久性が劣化することもわかる。(Left below) It can be seen that Table 2 is essential. It can also be seen that still durability is extremely degraded at 5 nm and 3 nm.
尚、３ｎｍの酸化被膜は通常金属磁性薄膜を大気に放置
するだけで得られる程度のものである。−方、走行速度
と酸化被膜の膜厚との関係をみると速度が高くなると酸
化しにくくなることがわかる。Incidentally, an oxide film of 3 nm can usually be obtained by simply leaving a metal magnetic thin film in the atmosphere. - On the other hand, looking at the relationship between the running speed and the thickness of the oxide film, it can be seen that the higher the speed, the more difficult it is to oxidize.
逆に、速度が遅くなると酸化が進み、場合によっては熱
的ダメージにより金属磁性薄膜及び基板が損傷する。従
って、レーザー照射処理時の高分子フィルムの走行速度
の設定には十分な注意が必要である。On the other hand, if the speed is slow, oxidation progresses, and in some cases, the metal magnetic thin film and the substrate may be damaged due to thermal damage. Therefore, sufficient care must be taken in setting the running speed of the polymer film during laser irradiation treatment.
以上の実施例では、ポリイミドフィルム上にＣｏ−Ｃｒ
膜を形成したものについてのみの説明であったが、Ｃｏ
−Ｎｉ−Ｃｒ膜の場合にも同様の効果が確認された。ま
た、ポリイミドフィルム以外の高分子フィルムを用いて
も同様の効果が確認された。ただし、昇温する際には高
分子フィルムの耐熱温度に十分注意する必要がある。ま
た、レーザー処理装置の機構を変更することで基板が高
分子フィルム以外のもの、例えば、ガラス等でも本発明
の効果が得られる。膜形成手段として真空蒸着法につい
てのみ説明したが、スパッタ法で成膜した金属磁性薄膜
でも同様の効果が得られた。In the above examples, Co-Cr was coated on the polyimide film.
The explanation was only about those that formed a film, but Co
A similar effect was confirmed in the case of the -Ni-Cr film. Furthermore, similar effects were confirmed even when polymer films other than polyimide films were used. However, when raising the temperature, it is necessary to pay sufficient attention to the heat resistance temperature of the polymer film. Further, by changing the mechanism of the laser processing apparatus, the effects of the present invention can be obtained even when the substrate is other than a polymer film, such as glass. Although only the vacuum evaporation method was explained as a film forming means, similar effects were obtained with a metal magnetic thin film formed by sputtering.
以上では高分子フィルム上に直接金属磁性薄膜を蒸着す
る例を中心に述べたが、下地層が形成されている高分子
フィルムを用いる場合も、本発明が適用可能であること
は明白である。Although the above description has focused on an example in which a metal magnetic thin film is directly deposited on a polymer film, it is clear that the present invention is also applicable to cases where a polymer film on which an underlayer is formed is used.
発明の効果
本発明によれば、レーザー照射により金属磁性薄膜表面
が酸化され強固な金属酸化被膜が形成され、走行耐久性
、スチル耐久性に優れた磁気記録媒体が製造が可能であ
る。Effects of the Invention According to the present invention, the surface of the metal magnetic thin film is oxidized by laser irradiation to form a strong metal oxide film, making it possible to manufacture a magnetic recording medium with excellent running durability and still durability.
第１図は本発明の一実施例における磁気記録媒体の製造
方法に用いるレーザー照射処理装置の構造の概略を示す
図、第２図は本発明の一実施例における磁気記録媒体の
製造方法に用いるレーザー照射処理装置の構造の概略を
示す図、第３図は一実施例における磁気記録媒体の製造
方法に用いる真空蒸着装置の内部構造の概略を示す図、
第４図はレーザー源の概略を示す図、第５図は金属磁性
薄膜の酸化状態を調べたオージェ電子分光分析の結果の
一例を示すグラフである。
ｌ・・・高分子フィルム、２・・・円筒状キャン、３・
ｏｓ供給ロール、 ４・・・巻き取りロール、５・・
・蒸発源、６・・・遮蔽板、７・・・レーザー ８・・
・金属磁性薄膜が形成されている高分子フィルム、９・
・・レーザー発信器、１０・・・ビームエキスパンダー
１１−φ・ビーム整形器、３２・・・レーザー照射処
理用円筒状キャン、３３・・・レーザー照射処理用供給
ロール、３４・・・レーザー照射処理用巻き取りロール
、３５・・・ノズル、Ａ、 Ｂ・・・矢印、Ｓ・・・
開口部。
代理人の氏名 弁理士 粟野重孝 はか１名第１図
第２図
７−・レー１７！−
８−・−金属崖柱蕩団見が形成′され２いる高分子フィ
ルム３３゛−°レーザー！！、！射処理用供給クール３
４・・・ レーサー照射処理用さき取りロール３５−・
−ノズル
３２−−レーサ″−照射処工里用円筒」犬キャン第
図FIG. 1 is a diagram schematically showing the structure of a laser irradiation processing apparatus used in a method of manufacturing a magnetic recording medium in an embodiment of the present invention, and FIG. FIG. 3 is a diagram schematically showing the structure of a laser irradiation processing device; FIG.
FIG. 4 is a diagram schematically showing a laser source, and FIG. 5 is a graph showing an example of the results of Auger electron spectroscopy, which investigated the oxidation state of a metal magnetic thin film. l...Polymer film, 2...Cylindrical can, 3.
os supply roll, 4... take-up roll, 5...
・Evaporation source, 6... Shielding plate, 7... Laser 8...
・Polymer film on which a metal magnetic thin film is formed, 9.
... Laser transmitter, 10... Beam expander 11-φ, Beam shaper, 32... Cylindrical can for laser irradiation processing, 33... Supply roll for laser irradiation processing, 34... Laser irradiation processing Take-up roll, 35... Nozzle, A, B... Arrow, S...
Aperture. Name of agent: Patent attorney Shigetaka Awano (1 person) Figure 1 Figure 2 7-・Lee 17! -8-・-Polymer film 33゛-°laser with two metal talus walls formed'! ! ,! Supply cool for injection treatment 3
4... Racer irradiation processing scraping roll 35-.
-Nozzle 32--Laser''-Cylinder for irradiation processing''Canine diagram
Claims (4)
主成分とする金属磁性薄膜を形成し、前記金属磁性薄膜
の表面にレーザーを照射し、前記表面からの深さが１０
ｎｍ以上のＣｏ酸化物を主体とした酸化皮膜を形成する
ことを特徴とする磁気記録媒体の製造方法。(1) A metal magnetic thin film containing Co and Cr or Co, Ni, and Cr as main components is formed on a substrate, and the surface of the metal magnetic thin film is irradiated with a laser to a depth of 10 mm from the surface.
A method for manufacturing a magnetic recording medium, comprising forming an oxide film mainly composed of Co oxide with a diameter of nm or more.
状キャンの周面に沿って前記高分子フィルムを走行させ
、前記円筒状キャンの周面上にあ前記金属磁性薄膜の表
面にレーザーを照射することを特徴とする請求項１記載
の磁気記録媒体の製造方法。(2) A metal magnetic thin film is formed on a polymer film, the polymer film is run along the circumferential surface of the cylindrical can, and a laser beam is applied to the surface of the metal magnetic thin film on the circumferential surface of the cylindrical can. 2. The method of manufacturing a magnetic recording medium according to claim 1, further comprising irradiating with.
２記載の磁気記録媒体の製造方法。(3) The method for manufacturing a magnetic recording medium according to claim 2, further comprising increasing the temperature of the cylindrical can.
ーザー照射面に酸素ガスを差し向けることを特徴とする
請求項１、２又は３記載の磁気記録媒体の製造方法。(4) The method for manufacturing a magnetic recording medium according to claim 1, 2 or 3, characterized in that when irradiating the surface of the metal magnetic thin film with a laser, oxygen gas is directed to the laser irradiated surface.
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63291155A JPH02137124A (en) | 1988-11-17 | 1988-11-17 | Production of magnetic recording medium |
| KR1019890001728A KR910007760B1 (en) | 1988-02-17 | 1989-02-15 | Producing method for vertical type magnetic recording media |
| DE68915021T DE68915021T2 (en) | 1988-02-17 | 1989-02-15 | Method for producing a recording medium with vertical magnetization. |
| EP89102609A EP0329116B1 (en) | 1988-02-17 | 1989-02-15 | Method for manufacturing perpendicular magnetic recording medium |
| US07/310,994 US4999220A (en) | 1988-02-17 | 1989-02-16 | Method for manufacturing perpendicular magnetic recording medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63291155A JPH02137124A (en) | 1988-11-17 | 1988-11-17 | Production of magnetic recording medium |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02137124A true JPH02137124A (en) | 1990-05-25 |
Family
ID=17765157
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63291155A Pending JPH02137124A (en) | 1988-02-17 | 1988-11-17 | Production of magnetic recording medium |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02137124A (en) |
-
1988
- 1988-11-17 JP JP63291155A patent/JPH02137124A/en active Pending
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