JPS6297133A - Production of magnetic recording medium - Google Patents

Abstract

PURPOSE:To stably obtain a long-sized medium in the state of large short wavelength output by introducing oxygen in the moving direction of a high-polymer film and hydrogen to the opposite side and directing Co or CoNi vapor so as to be made incident perpendicularly on the high-polymer film. CONSTITUTION:The high-polymer film 11 is fed by a rotary support 14. The Co or CoNi vapor is directed toward the film from an evaporating source 15 while the hydrogen and oxygen are introduced respectively from a hydrogen introducing nozzle 19 and oxygen introducing nozzle 20. The oxygen acts to satisfy the conditions of a vertically magnetized film and the oxide film on the head access side of the vertically magnetized film, i.e., the oxide film on the front side of the film can be made thin based on the reducing effect of the hydrogen introduced therein and therefore, the long-sized medium is produced in the state of the large short wavelength output.

Description

DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to a method of manufacturing a magnetic recording medium for high-density magnetic recording that can be magnetized perpendicularly to the surface of a substrate. The practical application of ferromagnetic metal thin film magnetic recording layers from coated magnetic recording layers is being considered.

Along with this, studies are also being conducted on manufacturing methods, focusing on vacuum evaporation methods suitable for forming ferromagnetic metal thin films.

FIG. 2 is a schematic diagram of the internal configuration of a vacuum evaporation apparatus used to manufacture a magnetic recording medium having a conventional Co-0 based or Co-Ni-○ based perpendicularly magnetized film as a magnetic recording layer.

In FIG. 2, 1 is a substrate such as a polymer film, 2 is a feeding shaft, 3 is a winding shaft, 4 is a rotating support, 6 is an evaporation source, 6 is a vacuum container, 7 is a shielding plate, 8 9 is a slit, 9 is a gas introduction nozzle, and 1o is a vacuum pump.

Using the apparatus shown in FIG. 2, CO or CoNi (Ni) is introduced from the evaporation source 6 while introducing oxygen gas from the gas introduction nozzle 9.
By evaporating a part of the evaporation source with a component that is incident almost perpendicularly to the substrate 1 through the slit 8, Co-〇 or Co-N i-0 is evaporated. It is possible to continuously form a perpendicularly magnetized film on a polymer film.

In terms of mass production, this method is superior to the Go-Cr electron beam evaporation film made by maintaining a sputtered perpendicular magnetization film 9 of Co-Cr at a high temperature on a rotatable support, and is suitable for high-density magnetic recording. This is a promising method for producing media.

Problems to be Solved by the Invention However, with the above-described configuration, when the obtained body is manufactured, output fluctuations, which are thought to be caused by fluctuations in spacing loss, are large, which poses a practical problem.

The present invention has been made in view of the above circumstances, and provides a method that can stably obtain a long medium with a high short wavelength output.

Means for Solving the Problems In order to solve the above-mentioned problems, the method for manufacturing a magnetic recording medium of the present invention introduces oxygen to the side of the polymer film in the direction of movement and hydrogen to the opposite side, so that almost all polymer films are formed. The co or Co Ni vapor is directed so that it is perpendicularly incident on the .

Function: In the method for manufacturing a magnetic recording medium of the present invention, with the above-described configuration, oxygen acts to satisfy the conditions of the perpendicularly magnetized film, and the oxide film on the hand access side of the perpendicularly magnetized film, that is, on the surface side of the film. Since it can be made thinner based on the reducing action of introduced hydrogen, it is possible to produce long media with high short wavelength output.

Embodiments Hereinafter, embodiments of the present invention will be described with reference to the drawings.

FIG. 1 is an internal configuration diagram of a vapor deposition apparatus used to carry out the present invention.

In FIG. 1, 11 is a polymer film, 12 is a feeding shaft, 13 is a winding shaft, 14 is a rotating support, 16 is an evaporation source, 16 is a vacuum container, 17 is a shielding plate, 18 is a slit, and 19 is hydrogen Introduction nozzle, 2o is oxygen introduction nozzle, 21
is a vacuum pump.

In FIG. 1, the distance from the center of the evaporation source 16 to the polymer film 11 directly above is 34.6 cm, the diameter of the rotating support is 66α, and the width of the slot 18 is 4 tyn.

The distance between the tips of the oxygen introduction nozzle 2o and the hydrogen introduction nozzle 19 is 12 cm, and the distance between each tip and the center of the evaporation source is 3 cm.
The effects of the present invention were confirmed in the following examples as No. 11:rn.

The surface temperature of the rotating support was kept constant at 26° C., and the degree of vacuum reached I x 10 −6 (Torr) before gas introduction, and then gas was introduced.

While moving a polyethylene terephthalate film with a thickness IQ of 4 m, Co -○, Co with a film thickness of 0.2 μm
A -Ni-0 film was formed, and after planarization, stearic acid was applied with a vacuum lid by about 30 people.Then, the film was slit to a width of 8 mm, and various magnetic tapes were produced as prototypes.

The performance comparison was performed using a ferrite ring head with a gap length of 0.16 μm, and selected 10 arbitrary points out of a total length of 1000 m to reproduce the reproduction output at a recording wavelength of 0.4/im.
0m was measured and the maximum and minimum output values were compared relative to each other.

The coercive force in the vertical direction was measured using a vibrating sample magnetometer.

A comparison of manufacturing conditions and performance is summarized in the table below.

From the above, it can be clearly seen that the magnetic recording medium obtained according to the present invention has good and stable reproduction output even in the longitudinal direction.

Although a magnetic tape has been described in this embodiment, it is also possible to manufacture magnetic disks and magnetic sheets according to the present invention, and uniform, high-performance media can be manufactured in large quantities.

Effects of the Invention As described above, according to the present invention, excellent effects such as the ability to mass-produce magnetic recording media that can be magnetized in the perpendicular direction can be obtained.

[Brief explanation of drawings]

FIG. 1 is an internal configuration diagram of an example of a vapor deposition apparatus used for carrying out the method of manufacturing a magnetic recording medium of the present invention, and FIG. 2 is an internal configuration diagram of a conventional vapor deposition apparatus. 11... Polymer film, 16... Evaporation source, 18... Slit, 19... Hydrogen introduction nozzle, 2o... Oxygen introduction nozzle. Name of agent: Patent attorney Toshio Nakao and one other person U-
11 Polymer film

Claims (1)

[Claims] Oxygen is introduced on the moving direction side of the polymer film, hydrogen is introduced on the opposite side, and the component Co is introduced almost perpendicularly into the polymer film.
Alternatively, a method for manufacturing a magnetic recording medium, comprising directing a Co--Ni vapor flow.