JPS6378336A - Production of magnetic recording medium - Google Patents
Production of magnetic recording mediumInfo
- Publication number
- JPS6378336A JPS6378336A JP22310986A JP22310986A JPS6378336A JP S6378336 A JPS6378336 A JP S6378336A JP 22310986 A JP22310986 A JP 22310986A JP 22310986 A JP22310986 A JP 22310986A JP S6378336 A JPS6378336 A JP S6378336A
- Authority
- JP
- Japan
- Prior art keywords
- oxygen
- oxygen atoms
- ions
- gas
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005291 magnetic effect Effects 0.000 title claims description 20
- 238000004519 manufacturing process Methods 0.000 title claims description 6
- 125000004430 oxygen atom Chemical group O* 0.000 claims abstract description 13
- 239000007789 gas Substances 0.000 claims abstract description 12
- 230000005294 ferromagnetic effect Effects 0.000 claims abstract description 9
- 229920006254 polymer film Polymers 0.000 claims abstract description 7
- 239000002184 metal Substances 0.000 claims description 6
- 229910052751 metal Inorganic materials 0.000 claims description 6
- 239000010409 thin film Substances 0.000 claims description 5
- 238000000034 method Methods 0.000 claims description 4
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 abstract description 6
- 238000006243 chemical reaction Methods 0.000 abstract description 6
- 238000007740 vapor deposition Methods 0.000 abstract description 5
- 230000000694 effects Effects 0.000 abstract description 4
- 239000001301 oxygen Substances 0.000 abstract description 4
- 229910052760 oxygen Inorganic materials 0.000 abstract description 4
- 239000013078 crystal Substances 0.000 abstract description 2
- 230000007935 neutral effect Effects 0.000 abstract description 2
- 150000002500 ions Chemical class 0.000 abstract 3
- 230000003993 interaction Effects 0.000 abstract 1
- 239000002245 particle Substances 0.000 abstract 1
- 239000010408 film Substances 0.000 description 5
- 230000004907 flux Effects 0.000 description 4
- -1 oxygen atom ions Chemical class 0.000 description 4
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 229910020630 Co Ni Inorganic materials 0.000 description 2
- 229910002440 Co–Ni Inorganic materials 0.000 description 2
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 2
- UQSXHKLRYXJYBZ-UHFFFAOYSA-N Iron oxide Chemical compound [Fe]=O UQSXHKLRYXJYBZ-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 229910001882 dioxygen Inorganic materials 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N iron Substances [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 229920000139 polyethylene terephthalate Polymers 0.000 description 2
- 239000005020 polyethylene terephthalate Substances 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 229910020632 Co Mn Inorganic materials 0.000 description 1
- 229910020678 Co—Mn Inorganic materials 0.000 description 1
- 229910020676 Co—N Inorganic materials 0.000 description 1
- 229910020707 Co—Pt Inorganic materials 0.000 description 1
- 229910020517 Co—Ti Inorganic materials 0.000 description 1
- 229910020515 Co—W Inorganic materials 0.000 description 1
- 239000004962 Polyamide-imide Substances 0.000 description 1
- 239000004734 Polyphenylene sulfide Substances 0.000 description 1
- 229910052777 Praseodymium Inorganic materials 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 125000004429 atom Chemical group 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 238000005566 electron beam evaporation Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 230000003472 neutralizing effect Effects 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 229920003207 poly(ethylene-2,6-naphthalate) Polymers 0.000 description 1
- 229920002312 polyamide-imide Polymers 0.000 description 1
- 239000011112 polyethylene naphthalate Substances 0.000 description 1
- 229920000069 polyphenylene sulfide Polymers 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明は高密度磁気記録に適する磁気記録層として強磁
性金属薄膜を用いた磁気記録媒体の製造方法に関する。DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a method of manufacturing a magnetic recording medium using a ferromagnetic metal thin film as a magnetic recording layer suitable for high-density magnetic recording.
従来の技術
磁気記録媒体は近年、２碌密度向上の要求に従来の強磁
性金属微粉末、酸化鉄微粉末等の粉末磁性体を結合剤中
に分散固定したいわゆる塗布型磁気記録層ではこたえる
ことが困難になってきておシ、強磁性金属薄膜を磁気記
録層とする磁気記録媒体の開発が盛んである（特開昭５
６−１５０１４号。Conventional technology In recent years, magnetic recording media have been able to meet the demand for increased density with so-called coated magnetic recording layers in which powdered magnetic materials such as fine ferromagnetic metal powder and fine iron oxide powder are dispersed and fixed in a binder. It has become increasingly difficult to develop magnetic recording media that use ferromagnetic metal thin films as magnetic recording layers (Japanese Unexamined Patent Publication No.
No. 6-15014.
特公昭５Ｂ−９１号公報）。Special Publication No. 5B-91).
中でも斜め蒸着を酸素ガスを導入しながら行うことで得
られる磁気記録層は、基板に微細な凹凸を多数設けたも
のを用いると、耐久性にも優れ実用に近すいている（米
国特許第４，５６４，５４９号明細書）
発明が解決しようとする問題点
しかしながら、上記した構成では、導入ガスの導入位置
を最適化したり、加熱したり、しても、大きな′保磁力
を得るには、導入ガス量が多くなシ、飽和磁束密度も低
下するため、より高密度化を図るだめの媒体を製造する
ことが困難となり改善が望まれていた。本発明は上記事
情に鑑み、なされたもので、耐久性と電磁変換特性を同
時に改良することの出来る磁気記録媒体の製造方法を提
供するものである。Among them, the magnetic recording layer obtained by oblique vapor deposition while introducing oxygen gas has excellent durability and is close to practical use if a substrate with many fine irregularities is used (U.S. Patent No. 4). , No. 564,549) Problems to be Solved by the Invention However, in the above configuration, even if the introduction position of the introduced gas is optimized or heated, it is difficult to obtain a large coercive force. Since the amount of introduced gas is large and the saturation magnetic flux density is also reduced, it is difficult to produce a medium with higher density, and improvements have been desired. The present invention has been made in view of the above circumstances, and provides a method for manufacturing a magnetic recording medium that can improve durability and electromagnetic conversion characteristics at the same time.
問題点を解決するための手段
上記した問題点を解決するため、本発明の磁気記録媒体
の製造方法は、回転支持体に沿って移動する高分子フィ
ルム上に外部よシ１０〜４０％の酸素原子を含むガスを
導入しながら強磁性金属薄膜を形成するものである。Means for Solving the Problems In order to solve the above-mentioned problems, the method for producing a magnetic recording medium of the present invention provides an external layer of 10 to 40% oxygen on a polymer film moving along a rotating support. A ferromagnetic metal thin film is formed while introducing a gas containing atoms.
作 用
本発明の磁気記録媒体の製造方法によシ得られる磁気記
録媒体は上記した構成により、原子状の酸素が活性なた
め、少ない酸素原子で強磁性金属薄膜を構成する柱状結
晶微粒子の表面酸化層が強。Function: The magnetic recording medium obtained by the method for manufacturing a magnetic recording medium of the present invention has the above-described structure, and since atomic oxygen is active, the surface of the columnar crystal fine particles constituting the ferromagnetic metal thin film is reduced by a small amount of oxygen atoms. Strong oxidation layer.
固に形成されるため、飽和磁束の低下があまり起らずに
すむのと、磁気特性も良好となシ優れた電磁変換特性を
与え、耐久性も酸化膜がち密になることから向上するこ
とになるものである。Because it is formed solidly, there is no significant drop in saturation magnetic flux, and the magnetic properties are good, giving excellent electromagnetic conversion characteristics, and the durability is also improved because the oxide film is dense. It is something that becomes.
実施例
以下、図面を参照しながら本発明の実施例について説明
する。図は本発明を実施するために用いた蒸着装置の要
部構成図である。図で１は真空容器、２は回転支持体、
３は高分子フィルム、４は巻出し軸、５は巻取シ軸、６
は蒸発源、７は入射角規制用マスク、８は酸素原子発生
器、９はガス導入ポート、１０は可変リーク弁、１１は
真空排気系、１２はフリーローラ、１３は蒸気流である
。Embodiments Hereinafter, embodiments of the present invention will be described with reference to the drawings. The figure is a configuration diagram of main parts of a vapor deposition apparatus used to carry out the present invention. In the figure, 1 is a vacuum container, 2 is a rotating support,
3 is a polymer film, 4 is an unwinding shaft, 5 is a winding shaft, 6
1 is an evaporation source, 7 is an incident angle regulating mask, 8 is an oxygen atom generator, 9 is a gas introduction port, 10 is a variable leak valve, 11 is a vacuum exhaust system, 12 is a free roller, and 13 is a steam flow.
８の酸素原子発生器は、酸素ガスを放電によシイオン化
し、酸素原子のイオンを静電分離し、中性化の電子シャ
ワーを通過させ、中性の酸素原子として、蒸気流と相互
作用するように配すればよい。尚９よシは酸素分子、窒
素分子、アルゴン等から適宜選択したガス分子を導入す
るように構成した。The oxygen atom generator 8 ionizes oxygen gas by electric discharge, electrostatically separates the oxygen atom ions, passes them through a neutralizing electron shower, and interacts with the vapor flow as neutral oxygen atoms. You can arrange it like this. Incidentally, the structure of 9 was constructed so as to introduce gas molecules suitably selected from oxygen molecules, nitrogen molecules, argon, etc.
本発明の実施例にみられる効果を明らかにするために比
較として、８の位置に９と同じガス導入ボートを設けて
蒸着が行えるようにした。For comparison, in order to clarify the effects seen in the examples of the present invention, the same gas introduction boat as in 9 was provided at position 8 so that vapor deposition could be performed.
厚み１０μｍのポリエチレンテレフタレートフィルム上
にＣｏ −Ｎ ｉ （Ｃｏ 、８０ｗｔ％ ）を電子ビ
ーム蒸着法によシ最小入射角３ｏ度で、０．１５μｍ蒸
着した。その時、酸素の導入条件を変えて、各種の膜を
得て、磁気特性と、耐しよく性を６０℃９０％ＲＨに１
ケ月放置し、初期に比べての飽和磁束密度の変化率を比
較した。電磁変換特性は、８ミリビデオでの標準モード
での輝度信号Ｓ／Ｎの相対比較とした。On a polyethylene terephthalate film having a thickness of 10 μm, Co-N i (Co, 80 wt%) was deposited to a thickness of 0.15 μm using an electron beam evaporation method at a minimum incident angle of 30 degrees. At that time, various types of films were obtained by changing the oxygen introduction conditions, and the magnetic properties and resistance were changed to 60°C, 90% RH.
After leaving it for several months, we compared the rate of change in saturation magnetic flux density compared to the initial state. The electromagnetic conversion characteristics were a relative comparison of luminance signal S/N in standard mode with 8 mm video.
酸素原子が１０％以下だと、耐しよく性と電磁変換特性
のいずれも不十分となシ４０チ以上だと逆に飽和磁束密
度が急激に低下するなど不安定になるので１０％〜４０
チの範囲、更に好ましくは１５〜３５チがよい。If the content of oxygen atoms is less than 10%, both durability and electromagnetic conversion characteristics will be insufficient.If the content is more than 40%, the saturation magnetic flux density will drop rapidly and become unstable, so 10% to 40%.
The range is preferably 15 to 35 inches, more preferably 15 to 35 inches.
上記した実施例ではＣｏ −Ｎ ｉをポリエチレンテレ
フタレートフィルム上に蒸着したが、これに限定されず
、高分子フィルムとしては、他にポリアミドイミド、ポ
リエチレンナフタレート、ポリフェニレンサルファイド
等でもよい。Ｃｏ −Ｎ ｉの代りＫＣｏ−Ｆ ｅ 、
Ｃｏ−Ｐ ｔ 、 Ｃｏ −Ｔ ｉ 。In the above embodiments, Co-Ni was deposited on a polyethylene terephthalate film, but the present invention is not limited thereto, and the polymer film may also be polyamideimide, polyethylene naphthalate, polyphenylene sulfide, or the like. KCo-Fe instead of Co-Ni,
Co-Pt, Co-Ti.
Ｃｏ−Ｃｒ 、Ｃｏ−Ｍｎ 、Ｃｏ−Ｍｏ 、Ｃｏ−Ｗ
。Co-Cr, Co-Mn, Co-Mo, Co-W
.
Ｃｏ−Ｃｏ 、Ｃｏ−Ｐｒ 、Ｃｏ−Ｎｉ−Ｆｅ等を用
いてもよい。Co--Co, Co--Pr, Co--Ni--Fe, etc. may also be used.
発明の効果
以上のように本発明によれば、耐久性と電磁変換特性を
同時に改良できるといったすぐれた効果がある。Effects of the Invention As described above, the present invention has the excellent effect of improving durability and electromagnetic conversion characteristics at the same time.
図は本発明を実施するのに用いた蒸着装置の−例の要部
構成図である。
２・・・・・・円筒キャン、３・・・・・・高分子フィ
ルム、６・・・・・・蒸発源、８・・・・・・酸素原子
発生器、９・・・・・・ガス導入ポート。
代理人の氏名 弁理士 中 尾 敏 男 ほか１名ｑ−
−−ｐ、爾ヤ〒ン
３−−一山分＋フィルム
６− 鎧た源
８− 舒業ぶ：５−仝生振The figure is a configuration diagram of essential parts of an example of a vapor deposition apparatus used to carry out the present invention. 2... Cylindrical can, 3... Polymer film, 6... Evaporation source, 8... Oxygen atom generator, 9... Gas introduction port. Name of agent: Patent attorney Toshio Nakao and one other person q-
--P, Yan 3--One pile + film 6- Armored source 8- Supply work: 5- Life-changing
Claims (1)
りガス導入を行いながら強磁性金属薄膜を形成する際、
導入ガスに１０％から４０％の範囲の酸素原子を含める
ことを特徴とする磁気記録媒体の製造方法。When forming a ferromagnetic metal thin film on a polymer film moving along a rotating support while introducing gas from the outside,
A method for manufacturing a magnetic recording medium, characterized in that the introduced gas contains oxygen atoms in a range of 10% to 40%.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22310986A JPS6378336A (en) | 1986-09-19 | 1986-09-19 | Production of magnetic recording medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22310986A JPS6378336A (en) | 1986-09-19 | 1986-09-19 | Production of magnetic recording medium |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6378336A true JPS6378336A (en) | 1988-04-08 |
Family
ID=16792965
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP22310986A Pending JPS6378336A (en) | 1986-09-19 | 1986-09-19 | Production of magnetic recording medium |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6378336A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0262724A (en) * | 1988-08-30 | 1990-03-02 | Matsushita Electric Ind Co Ltd | Production of magnetic recording medium |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6194242A (en) * | 1984-10-16 | 1986-05-13 | Fuji Photo Film Co Ltd | Manufacture of magnetic recording medium |
-
1986
- 1986-09-19 JP JP22310986A patent/JPS6378336A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6194242A (en) * | 1984-10-16 | 1986-05-13 | Fuji Photo Film Co Ltd | Manufacture of magnetic recording medium |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0262724A (en) * | 1988-08-30 | 1990-03-02 | Matsushita Electric Ind Co Ltd | Production of magnetic recording medium |
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