JPS54155983A - Vacuum deposition plating method - Google Patents

Vacuum deposition plating method

Info

Publication number
JPS54155983A
JPS54155983A JP6552578A JP6552578A JPS54155983A JP S54155983 A JPS54155983 A JP S54155983A JP 6552578 A JP6552578 A JP 6552578A JP 6552578 A JP6552578 A JP 6552578A JP S54155983 A JPS54155983 A JP S54155983A
Authority
JP
Japan
Prior art keywords
strip
rolls
chambers
vapor
order
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6552578A
Other languages
Japanese (ja)
Inventor
Shigeo Itano
Daizo Yamazaki
Tetsuyoshi Wada
Yoshikiyo Nakagawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Heavy Industries Ltd
Original Assignee
Mitsubishi Heavy Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Heavy Industries Ltd filed Critical Mitsubishi Heavy Industries Ltd
Priority to JP6552578A priority Critical patent/JPS54155983A/en
Publication of JPS54155983A publication Critical patent/JPS54155983A/en
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

PURPOSE:To carry out the title plating in a compact deposition chamber with a plurality of cheap cooling rolls of a small diameter by arranging the rolls for supporting a long-sized strip so that they form convex curvature against an evaporation surface and by cooling the strip with the rolls. CONSTITUTION:Thin steel strip 2 uncoiled by uncoiler 1 is passed through pinch rolls 3 and preliminary vacuum chambers 4, 5, 6 in order. The strip pass holes of chambers 4, 5, 6 are provided with slits 7 - 10 to control circulation of gas, and the vacuum degree of chambers 4, 5, 6 is raised in the order of 4, 5 and 6. Strip 2 enters vacuum deposition chamber 14 through pinch rolls 11, and vapor of metal 16 is deposited on strip 2. In order to prevent a temp. rise of strip 2 due to sensible heat of the metal vapor and latent heat of solidificatin of the vapor which rise causes re-evaporation of the deposited metal, strip 2 is cooled with a group of cooling rolls 30 of a small diameter.
JP6552578A 1978-05-31 1978-05-31 Vacuum deposition plating method Pending JPS54155983A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6552578A JPS54155983A (en) 1978-05-31 1978-05-31 Vacuum deposition plating method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6552578A JPS54155983A (en) 1978-05-31 1978-05-31 Vacuum deposition plating method

Publications (1)

Publication Number Publication Date
JPS54155983A true JPS54155983A (en) 1979-12-08

Family

ID=13289510

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6552578A Pending JPS54155983A (en) 1978-05-31 1978-05-31 Vacuum deposition plating method

Country Status (1)

Country Link
JP (1) JPS54155983A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57131361A (en) * 1981-02-09 1982-08-14 Mitsubishi Heavy Ind Ltd Zinc plating method by multi-stages vapor deposition
JPH067602U (en) * 1991-12-27 1994-02-01 有限会社コスモ Electric iron for hairdressing
EP2889396B1 (en) * 2013-12-24 2017-11-01 Bobst Manchester Limited Vacuum coater and method of operating a vacuum coater

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57131361A (en) * 1981-02-09 1982-08-14 Mitsubishi Heavy Ind Ltd Zinc plating method by multi-stages vapor deposition
JPS6325067B2 (en) * 1981-02-09 1988-05-24 Mitsubishi Heavy Ind Ltd
JPH067602U (en) * 1991-12-27 1994-02-01 有限会社コスモ Electric iron for hairdressing
EP2889396B1 (en) * 2013-12-24 2017-11-01 Bobst Manchester Limited Vacuum coater and method of operating a vacuum coater

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