JPS55133551A - Device for driving circular face plate - Google Patents

Device for driving circular face plate

Info

Publication number
JPS55133551A
JPS55133551A JP4109879A JP4109879A JPS55133551A JP S55133551 A JPS55133551 A JP S55133551A JP 4109879 A JP4109879 A JP 4109879A JP 4109879 A JP4109879 A JP 4109879A JP S55133551 A JPS55133551 A JP S55133551A
Authority
JP
Japan
Prior art keywords
rotary
locus
detecting
constant
speed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4109879A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6136702B2 (enrdf_load_stackoverflow
Inventor
Nobuyuki Akiyama
Mitsuyoshi Koizumi
Yoshimasa Oshima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP4109879A priority Critical patent/JPS55133551A/ja
Publication of JPS55133551A publication Critical patent/JPS55133551A/ja
Publication of JPS6136702B2 publication Critical patent/JPS6136702B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP4109879A 1979-04-06 1979-04-06 Device for driving circular face plate Granted JPS55133551A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4109879A JPS55133551A (en) 1979-04-06 1979-04-06 Device for driving circular face plate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4109879A JPS55133551A (en) 1979-04-06 1979-04-06 Device for driving circular face plate

Publications (2)

Publication Number Publication Date
JPS55133551A true JPS55133551A (en) 1980-10-17
JPS6136702B2 JPS6136702B2 (enrdf_load_stackoverflow) 1986-08-20

Family

ID=12598996

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4109879A Granted JPS55133551A (en) 1979-04-06 1979-04-06 Device for driving circular face plate

Country Status (1)

Country Link
JP (1) JPS55133551A (enrdf_load_stackoverflow)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4614427A (en) * 1983-05-20 1986-09-30 Hitachi, Ltd. Automatic contaminants detection apparatus
JPS63122937A (ja) * 1986-11-13 1988-05-26 Hitachi Electronics Eng Co Ltd レーザスポットによる面板走査方法および面板走査制御装置
JPS63122936A (ja) * 1986-11-13 1988-05-26 Hitachi Electronics Eng Co Ltd 面板欠陥検出信号のサンプリング方法およびサンプリング装置
JP2005195545A (ja) * 2004-01-09 2005-07-21 Olympus Corp ３次元形状測定方法及び装置
JP2013246151A (ja) * 2012-05-29 2013-12-09 Jfe Steel Corp コイル形状測定装置及びコイル形状測定方法

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4614427A (en) * 1983-05-20 1986-09-30 Hitachi, Ltd. Automatic contaminants detection apparatus
JPS63122937A (ja) * 1986-11-13 1988-05-26 Hitachi Electronics Eng Co Ltd レーザスポットによる面板走査方法および面板走査制御装置
JPS63122936A (ja) * 1986-11-13 1988-05-26 Hitachi Electronics Eng Co Ltd 面板欠陥検出信号のサンプリング方法およびサンプリング装置
JP2005195545A (ja) * 2004-01-09 2005-07-21 Olympus Corp ３次元形状測定方法及び装置
JP2013246151A (ja) * 2012-05-29 2013-12-09 Jfe Steel Corp コイル形状測定装置及びコイル形状測定方法

Also Published As

Publication number Publication date
JPS6136702B2 (enrdf_load_stackoverflow) 1986-08-20

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