JPS55128107A - Method of adjusting pattern inspecting device - Google Patents

Method of adjusting pattern inspecting device

Info

Publication number
JPS55128107A
JPS55128107A JP3677479A JP3677479A JPS55128107A JP S55128107 A JPS55128107 A JP S55128107A JP 3677479 A JP3677479 A JP 3677479A JP 3677479 A JP3677479 A JP 3677479A JP S55128107 A JPS55128107 A JP S55128107A
Authority
JP
Japan
Prior art keywords
output
mirror
stage
lattice plate
photodetector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3677479A
Other languages
Japanese (ja)
Other versions
JPS616366B2 (en
Inventor
Katsumi Fujiwara
Masahito Nakajima
Tadao Nakakuki
Taku Yoshida
Masayuki Oyama
Kikuo Mita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP3677479A priority Critical patent/JPS55128107A/en
Publication of JPS55128107A publication Critical patent/JPS55128107A/en
Publication of JPS616366B2 publication Critical patent/JPS616366B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Image Processing (AREA)
  • Image Analysis (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

PURPOSE: To make it possible to easily set the photo-scanning direction by photo- scanning a lattice plate placed on the stage by means of optical scanning means and adjusting so that the output obtained by receiving in a photodetector assumes a steady value in an optical scanning region.
CONSTITUTION: The rotation of a polyhedral mirror 2 is stopped, and laser light from a luminous source 1 is irradiated on a lattice plate 14 on a stage 4 through mirror surface of the many-sided mirror 2, thus the laser light being supplied to a detector 6. Then, a movable bedplate 5 is shifted in a direction X at a constant speed. When slits S1WSn of the lattice plate 14 are not parallel to the traveling direction of the movable bedplate 5, the output waveform of the detector 6 manifests a periodical output level so that it is adjusted by screws 4a, 4b and 4c of the stage 4 thereby to cause the output to have a constant value. Then, if the direction of the rotating shaft of the many-sided mirror is tilted when the mirror 2 is rotated, the outut of the photodetector 6 similarly assumes a periodical output level. Upon this occasion, the direction of the rotating shaft is adjusted by screws 9aW9c to make the output have a constant value.
COPYRIGHT: (C)1980,JPO&Japio
JP3677479A 1979-03-28 1979-03-28 Method of adjusting pattern inspecting device Granted JPS55128107A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3677479A JPS55128107A (en) 1979-03-28 1979-03-28 Method of adjusting pattern inspecting device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3677479A JPS55128107A (en) 1979-03-28 1979-03-28 Method of adjusting pattern inspecting device

Publications (2)

Publication Number Publication Date
JPS55128107A true JPS55128107A (en) 1980-10-03
JPS616366B2 JPS616366B2 (en) 1986-02-26

Family

ID=12479109

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3677479A Granted JPS55128107A (en) 1979-03-28 1979-03-28 Method of adjusting pattern inspecting device

Country Status (1)

Country Link
JP (1) JPS55128107A (en)

Also Published As

Publication number Publication date
JPS616366B2 (en) 1986-02-26

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