JPS55128107A - Method of adjusting pattern inspecting device - Google Patents
Method of adjusting pattern inspecting deviceInfo
- Publication number
- JPS55128107A JPS55128107A JP3677479A JP3677479A JPS55128107A JP S55128107 A JPS55128107 A JP S55128107A JP 3677479 A JP3677479 A JP 3677479A JP 3677479 A JP3677479 A JP 3677479A JP S55128107 A JPS55128107 A JP S55128107A
- Authority
- JP
- Japan
- Prior art keywords
- output
- mirror
- stage
- lattice plate
- photodetector
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Mechanical Optical Scanning Systems (AREA)
- Image Processing (AREA)
- Image Analysis (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
PURPOSE: To make it possible to easily set the photo-scanning direction by photo- scanning a lattice plate placed on the stage by means of optical scanning means and adjusting so that the output obtained by receiving in a photodetector assumes a steady value in an optical scanning region.
CONSTITUTION: The rotation of a polyhedral mirror 2 is stopped, and laser light from a luminous source 1 is irradiated on a lattice plate 14 on a stage 4 through mirror surface of the many-sided mirror 2, thus the laser light being supplied to a detector 6. Then, a movable bedplate 5 is shifted in a direction X at a constant speed. When slits S1WSn of the lattice plate 14 are not parallel to the traveling direction of the movable bedplate 5, the output waveform of the detector 6 manifests a periodical output level so that it is adjusted by screws 4a, 4b and 4c of the stage 4 thereby to cause the output to have a constant value. Then, if the direction of the rotating shaft of the many-sided mirror is tilted when the mirror 2 is rotated, the outut of the photodetector 6 similarly assumes a periodical output level. Upon this occasion, the direction of the rotating shaft is adjusted by screws 9aW9c to make the output have a constant value.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3677479A JPS55128107A (en) | 1979-03-28 | 1979-03-28 | Method of adjusting pattern inspecting device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3677479A JPS55128107A (en) | 1979-03-28 | 1979-03-28 | Method of adjusting pattern inspecting device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS55128107A true JPS55128107A (en) | 1980-10-03 |
JPS616366B2 JPS616366B2 (en) | 1986-02-26 |
Family
ID=12479109
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3677479A Granted JPS55128107A (en) | 1979-03-28 | 1979-03-28 | Method of adjusting pattern inspecting device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS55128107A (en) |
-
1979
- 1979-03-28 JP JP3677479A patent/JPS55128107A/en active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS616366B2 (en) | 1986-02-26 |
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